semi合集-English.pdf - 第1377页
SEMI E30-1103 © SEMI 1992, 2003 51 Recipe Edited or Delet ed by Operator: COMMENTS HOST EQUIPMENT COMMENTS New recipe edited, or deleted at equipment RcpChangeName = RCPID RcpChangeStatus = 2 (Modified) or 5 (Deleted) [I…
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50
Equipment-Initiated Process Program Download — Unformatted:
COMMENTS HOST EQUIPMENT COMMENTS
<--S7,F5 Process Program Request
Process Program Send S7,F6-->
<--S7,F41 Large Process Program Request
Large Process Program S7,F42-->
Program Acknowledge
<--S13,F3 Open Data Set Request
Open Data Set Data S13,F4-->
[START] repeat until ACKC13 is
error:
<--S13,F5 Read Data Set Request
Open Data Set Data S13,F6-->
[END]
<--S13,F7 Close Data Set Send
Close Data Set Acknowledge S13,F8-->
[IF]
S7,F27 is multi-block
[THEN]
<--S7,F29 Process Program Verification
Process Program S7,F30--> Inquire
Verification Grant [END_IF]
<--S7,F27 Process Program
Process Program S7,F28--> Verification Send
Verification Acknowledge
4.6.6 Scenarios for Recipes
4.6.6.1 Recipe Creation, Editing, or Deletion
Recipe Created by Operator:
COMMENTS HOST EQUIPMENT COMMENTS
New recipe created by operator
at equipment
RcpChangeName = RCPID
RcpChangeStatus = 1 (Created)
[IF] CEID for New Execution
Recipe Event enabled
[THEN]
<--S6,F11 Send Event Report
Event Report Acknowledge S6,F12-->
[END_IF]
SEMI E30-1103 © SEMI 1992, 2003
51
Recipe Edited or Deleted by Operator:
COMMENTS HOST EQUIPMENT COMMENTS
New recipe edited, or deleted
at equipment
RcpChangeName = RCPID
RcpChangeStatus = 2
(Modified) or 5 (Deleted)
[IF] CEID for Execution
Execution Recipe Change Event
enabled
[THEN]
<--S6,F11 Send Event Report
Event Report Acknowledge S6,F12-->
[END_IF]
Recipe Deletion by the Host:
COMMENTS HOST EQUIPMENT COMMENTS
Recipe Delete Request S15,F35-->
<--S15,F36 Recipe Delete Acknowledge. The
recipe is removed from non-
volatile storage.
4.6.6.2 Recipe Directory Request
Host requests a list of identifiers of currently stored recipes.
COMMENTS HOST EQUIPMENT COMMENTS
GetAttr Request S14,F1-->
<--S14,F2 GetAttr Data
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4.6.6.3 Recipe Upload
Host-Initiated Recipe Upload:
COMMENTS HOST EQUIPMENT COMMENTS
Recipe Upload Request S15,F31-->
<--S15,F32 Recipe Upload Data
Large Recipe Upload Request S15,F51-->
<--S15,F52 Large Recipe Upload Acknowledge
Acknowledge may be “accepted
and will be performed later
with completion signaled”.
When the equipment is ready to
send:
<--S13,F1 Send Data Set Send
Send Data Set Send S13,F2-->
Acknowledge
Open Data Set request S13,F3-->
<--S13,F4 Open Data Set Data
[START] repeat until
ACKC13 is error:
Read Data Set Request S13,F5-->
[END] <--S13,F6 Read Data Set Data
[IF]
CEID for upload event enabled
[THEN]
[IF]
ACKC13 is "ERROR: END OF DATA"
[Then]
<--S6,F11 Send Event Report “successful
Event Report Acknowledge S6,F12--> upload”
[ELSE]
<--S6,F11 Send Event Report “bad upload”
Event Report Acknowledge S6,F12--> [END_IF]
[END_IF]
Close Data Set Send S13,F7-->
<--S13,F8 Close Data Set Acknowledge