semi合集-English.pdf - 第3051页

SEMI E122.1-0703 © SEMI 2003 6 Service SECS-II Field Values Req. Descriptio n CPVAL 4 L, c 1. L, 3 1. U4 2. U4 3. U4 … c. L, 3 1. U4 2. U4 3. U4 N Specifies datalog options for specific test ids. L, c (c = # of (TestId, …

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SEMI E122.1-0703 © SEMI 2003 5
Service SECS-II Field Values Req. Description
CPVAL
1
L, n
1. U4
2. U4
:
n. U4
N Provides single execution override of test-sites
enabled/disabled by remote commands
ENABLE-SITE and DISABLE-SITE.
CPNAME
2
“DATALOGDATASETS” N DATALOGDATASETS parameter.
CPVAL
2
L, n (n - # of datasets)
1. L, 2
1. A[80]
2. List, p
1. U4
…
p. U4
n. L, 2
1. A[80]
2. L, q
1. U4
…
q. U4
N Datalog output can be directed to separate
datasets on a per-test-site basis.
L, n (n - # of datasets)
1. L, 2
1. Dataset Name
1
2. L, p (Zero-length list = all test-sites)
1. SiteID
11
…
p. SiteID
1p
n. L, 2
1. Dataset Name
n
2. L, q (Zero-length list = all test-sites)
1. SiteID
n1
…
q. SiteID
nq
CPNAME
3
“DATALOGBYTESTTYPE” N DATALOGBYTESTTYPE parameter.
CPVAL
3
L, b
1. L, 3
1. U4
2. U4
3. U4
…
b. L, 3
1. U4
2. U4
3. U4
N Specifies datalog options by general TestType.
L, b (b = # of (TestType, TestStatus) pairs
being assigned reports.)
1. L, 3
1. TestType
1
2. TestStatus
1
3. ReportID
1
(If omitted, the default report
is assigned.)
…
b. L, 3
1. TestType
b
2. TestStatus
b
3. ReportID
b
CPNAME
4
“DATALOGBYTESTID” N
SEMI E122.1-0703 © SEMI 2003 6
Service SECS-II Field Values Req. Description
CPVAL
4
L, c
1. L, 3
1. U4
2. U4
3. U4
…
c. L, 3
1. U4
2. U4
3. U4
N Specifies datalog options for specific test ids.
L, c (c = # of (TestId, TestStatus) pairs being
assigned reports.)
1. L, 3
1. TestID
1
2. TestStatus
1
3. ReportID
1
…
c. L, 3
1. TestID
c
2. TestStatus
c
3. ReportID
c
CPNAME
5
“DATALOGOPTION” N DATALOGOPTION parameter.
CPVAL
5
U4 N Turns datalog on/off.
(0:No Log, 1:Log Pass, 2:Log Failures, 3: Log
All)
CPNAME
6
“DATALOGPLANNAME” N DATALOGPLANNAME parameter.
CPVAL
6
A[80] N Turns on datalogging according to a
predefined plan. This parameter overrides all
other individual datalog setting options in a
START command.
START-EXEC RCMD “START-EXEC” Y
STOP RCMD “STOP” Y
STOP-EXEC RCMD “STOP-EXEC” Y
6 Variable Data Item Mapping
6.1 The purpose of this section is to define the list of variable items required by the TSEM. Values of these
variables will be available to the host through collection event reports and host status queries.
6.2 Requirements
6.2.1 All generic variable items defined in SEMI E30 are required by all TSEM equipment.
6.2.2 Any supplier-defined variables shall be documented in the same format used by this document. The following
minimum information is required:
<variable name> Class: <ECV, SV, or DVVAL> Format: <SML>
Description: <If class = DVVAL, description must contain statement of when data is valid.>
<If format = ASCII, then a length is required. It is assumed to be left-justified unless otherwise noted.>
6.3 Data Types
6.3.1 Equipment Constants (ECVs) can be changed by the host using S2,F15. The operator may be able to change
some values, but the equipment does not change the values on its own. The value of an equipment constant may be
queried by the host at any time, using the S2,F13/14 transaction. They reside in non-volatile memory of the
equipment. Equipment constants remain in effect until they are overwritten either by manual entry or by a S2,F15
(NEW EQUIPMENT CONSTANT SEND).
6.3.2 Equipment constants have various uses in TSEM, including the following:
• Equipment offsets that match the performance of several pieces of equipment that would otherwise perform
differently due to inherent manufacturing differences. Examples are home values and motion axis scaling
factors.
SEMI E122.1-0703 © SEMI 2003 7
• Setting the configuration of the equipment to allow for different material specifications, equipment options,
material flows, frequency of automatic functions, etc. An example is yield check frequency.
• Managing optional machine features. Examples are constants that indicate whether optional features such as
automated media stackers are present and control the configuration and function of these optional subsystems
when they are present.
6.3.3 Status Variables (SVs) are valid at all times. An SV may not be changed by the host but may be changed by
the equipment or operator. The value of status variables may be queried by the host at anytime using the S1,F3/4 or
S6,F19/20 transactions.
6.3.4 DVVALs are variables that are valid only upon the occurrence of specific collection events. An attempt to
read a variable item at the wrong time does not generate an error, but the data reported may not have relevant
meaning.
6.3.5 Data Item Requirements for Multi-Head, Multi-Site Equipment — The identification for multi-head and multi-
site data (variable items, status variables, events, etc.) is addressed in this specification through the use of status
variables. In Table 5, the subscript “v” is used to denote the number of virtual testers, “h” is used to denote the
number of tester heads, “s” to denote the number of tester head sites, and “b” to denote the number of bins or
classes.
6.3.6 class, hard-bin, and soft-bin — Equipment is to maintain DVVALs which provide three levels of granularity
for test results: class, hard-bin, and soft-bin. Classes, hard-bins, and soft-bins are expected to be defined within a
process program, and their names are made available as DVVALs. When device testing has completed, the process
program is to determine the class, hard-bin, and soft-bin with which the device is to be associated, based on the
results of the testing. Finally, a summation of the number of devices associated with each class, hard-bin, and soft-
bin is also maintained throughout the execution of a process program, and these are also made available as
DVVALs.
6.4 For multiple sites scenarios, if a variable is described as List by number of sites, then a list is expected, one
value for each site.
Table 5 Variable Item Mapping Table
Variable Name Description SECS-II Type Class Comments
ActiveSites List of test-sites that are to be tested. L, n
1. U4
2. U4
:
n. U4
SV n = # of active sites
Address Address of the reported vector. U4 DVVAL Valid only in Datalog
reports.
Channel Hardware channel or resource
identifier.
A[80] DVVAL List by PinID.
ClassID Test result class number. U4 DVVAL List by test-site.
ClassName Test result class name. A[80] DVVAL List by ClassID.
ConfigInfo Physical configuration information. Format is
determined by
vendor.
SV Implementation specific
variable.
Cycle Cycle count for this report. U4 DVVAL Valid only in Datalog
reports.
DatalogConfig Datalog Configuration. A[80] SV
DatalogPlanName Datalog report plan name. A[80] SV
DockingStatus Information on handler/prober
docking status.
BOOLEAN SV