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SEMI E130-1104 © SEMI 2003, 2004 26 22.4 Remote Commands and PSEM300 Process Model Mapp ing 22.4.1 Each remote comm and either can or ca nnot be executed depending o n a state other than t he control state. 22.4.2 The fo…

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SEMI E130-1104 © SEMI 2003, 2004 25
22.3.18 SET-PROBE-CARD-ID — This command is used to set the probe card ID attribute on the tool.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “SET-PROBE-CARD-ID”
ProbeCardID M - Text Prober card identifier.
Ack - M Integer Service Acknowledgement.
22.3.19 SET-CONTROL-MAP — This command is used to identify the control map. See Section 15 for the
discussion of control maps.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “SET-CONTROL-MAP”
ControlMap M - Text Identifies the name of the control map.
X C - Integer
Y C - Integer
If coordinates are designated, both X and Y must be
provided. The host is responsible for providing XY
coordinates that match coordinates contained in the
Control Map.
Ack - M Integer Service Acknowledgement.
22.3.20 UNLOAD-SUBSTRATE — This command is used to unload the substrate occupying the chuck. The chuck
is unoccupied upon completion of this command.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “UNLOAD-SUBSTRATE”
Ack - M Integer Service Acknowledgement.
22.3.21 UNLOAD-ALLSUBSTRATES — This command is used to unload substrates occupying the chuck and
pipeline stages.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “UNLOAD-ALLSUBSTRATES”
SUSPEND C - Boolean If included, causes the substrate occupying the chuck to be
suspended.
Ack - M Integer Service Acknowledgement.
22.3.22 ONLINE-LOCAL — This command is used to change the control state from On-Line Remote to On-Line
Local.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “ONLINE-LOCAL”
Ack - M Integer Service Acknowledgement.
SEMI E130-1104 © SEMI 2003, 2004 26
22.4 Remote Commands and PSEM300 Process Model Mapping
22.4.1 Each remote command either can or cannot be executed depending on a state other than the control state.
22.4.2 The following table shows remote commands and the relationship between the PSEM300 process states to be
operated by these commands.
Table 9 Remote Command vs. Process State
UNLOAD-ALLSUBSTRATES
UNLOAD-SUBSTRATE
UNLOAD-TEST-SUBST
SET-CONTROL-MAP
SET-PROBE-CARD-ID
RESET-CONTROL-MAP
RESET-CONTACT-CNT
ONLINE-LOCAL
MOVE-TO-REF-DIE
MOVE-SUB-STEPS
MOVE-ABS
MOVE
LOCKOUT-CONTROL
LOAD-SUBSTRATE
LOAD-TEST-SUBST
INSPECT-PTP-ALIGNMENT
INSPECT-PROBES
INSPECT-INK-MARKS
INK-DIE
INK-DEVICE
INDEX
CLEAN-PROBES
PROCESSING STATE
IDLE O O O O O O
IDLE with ALARMS O O O O O
PROCESSING ACTIVE
…PROCESS
…SETTING UP
…EXECUTING
……AWAITING LOAD O O O O O O O O
……HANDLING MATERIAL
……SUBSTRATE LOADED
………AWAITING COMMAND O OOOOOOOOOOOOO O O O O OOOO
……… MOVING XYZ
………SERVICE TASK
…PROCESSING BLOCKED
O: Operation is allowed.
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22.5 Restriction on the Operator by Control States
22.5.1 For the remote commands, the operator of the prober or the host is restricted by the control states of the
equipment.
Table 10 Table of Restrictions on the Operator by Control States
Operator Host
Remote Commands
LOCAL REMOTE LOCAL REMOTE
CLEAN-PROBES O X X O
INDEX O X X O
INK-DEVICE O X X O
INK-DIE O X X O
INSPECT-INK-MARKS O X X O
INSPECT-PROBES O X X O
INSPECT- PTP-ALIGN O X X O
LOAD- TEST-SUBST O X X O
LOAD-SUBSTRATE O X X O
MOVE O X X O
MOVE-ABS O X X O
MOVE-SUB-STEPS O X X O
MOVE-TO-REF-DIE O X X O
UNLOAD-TEST-SUBST O X X O
RESET-CONTACT-CNT O O O O
RESET-CONTROL-MAP O X O O
SET-CONTROL X X X O
SET-PROBE-CARD-ID O O O O
SET-CONTROL-MAP O X O O
UNLOAD-SUBSTRATE O X X O
UNLOAD-ALLSUBSTRATES O X X O
ONLINE-LOCAL X X X O
O: Operation is allowed.
X: Operation is prohibited.
23 GEM Addition Request
23.1 The purpose of this section is to specify all GEM
addition requests that are required to support the
equipment of this class.
23.2
Requirements
23.2.1 GEM addition requests required of PSEM300
are as shown below:
Establish Communications,
Dynamic Event Report Configuration,
Variable Data Collection,
Status Data Collection,
Alarm Management,
Remote Control,
Equipment Constants,
Process Program Management,
Equipment Terminal Services,
Clock,
Spooling, and
Control (host-initiated).