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SEMI E109-0305 © SEMI 2001, 2005 12 Attribute Name Definition Access Reqd Form PodIDStatus Current state of the PodID verification. RO Y Enumerated: ID NOT READ, WAITING FOR HOST ON ID STATUS, ID VERIFICATION OK, ID VERI…

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10.2.2 From the host point of view, an object is instantiated if the host is able to query the equipment about that
object, its current state, and other attributes. Once instantiated, the object is considered destroyed (no longer
instantiated) if the response to such queries is “unknown object”.
10.2.3 Summary of reticle pod object instantiation:
1. Bind, ReticleTransferJob, or PodNotification Service;
2. PodID read with no currently existing pod objects having the PodID just read; and
3. ProceedWithPod or CancelPod Service on an UNASSOCIATED port with a pod.
10.2.4 Reticle Pod Object Identifier (ObjID)
10.2.4.1 The purpose of an Object Identifier is to allow references to an object within the system. The object
identifier is created when an object is instantiated and should be unchanged or persistent until the end of the object
lifecycle. The Object Identifier shall be unique at the equipment during lifecycle of the object. The PodID is the
Reticle Pod Object Identifier. The equipment is responsible for ensuring uniqueness of the PodID prior to
instantiation by the bind, pod notification, or ReticleTransferJob service.
10.2.5 Reticle Pod Object Destruction
10.2.5.1 Normally, the Reticle Pod Object reaches the end of its lifecycle when the reticle pod is unloaded from the
equipment. Abnormally, the Reticle Pod Object reaches the end of it’s lifecycle when a CancelBind,
CancelReticleTransferJob, or CancelPodNotification service is executed prior to the reticle pod being loaded, or
when an equipment based pod verification fails following pod instantiation by the bind service.
10.2.5.2 Summary of reticle pod object destruction:
1. A reticle pod is unloaded from the equipment;
2. A CancelBind, CancelReticleTransferJob or CancelPodNotification service is received; and
3. An equipment based verification fails (after the object has been instantiated via the bind services).
10.3 Reticle Pod Attribute Definitions
10.3.1 The following table contains the attributes that are of importance to the host and/or the equipment in order to
manage the history and the reports about the reticle pod object.
10.3.2 REQD Column
10.3.2.1 All attributes in the following table are required to be associated with the reticle pod object. However only
the attributes marked with a “Y” in the REQD column are always required to be maintained and updated by the
equipment. The attributes marked with an “N” in the REQD column are only required to be maintained if they are
provided by the host by either the Bind, PodNotification, ReticleTransferJob or ProceedWithPod Services or if the
equipment has means of determining the attribute values. (For example, if the equipment has a ReticleID reader, the
equipment can determine the ContentMap).
10.3.3 ACCESS Column
10.3.3.1
Even though a value may be marked as RO (read only), the initial value for the attribute may be provided
by the host when attached to either the Bind, PodNotification, ReticleTransferJob or ProceedWithPod services. The
only other time the PodCapacityStatus attributes are updated is at the first ProceedWithPod service.
10.3.4 Pod Attribute Definition Table
Table 6 Pod Attribute Definition
Attribute Name Definition Access Reqd Form
ObjType Object type. RO Y Text equal to “Reticle Pod”.
ObjID Object identifier. RO Y Text 1 to 80 characters equal to the PodID.
Capacity Maximum number of reticles in
pod.
RO Y Positive integer. If a pod arrives at a load port
with no warning the default value is one.
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Attribute Name Definition Access Reqd Form
PodIDStatus Current state of the PodID
verification.
RO Y Enumerated:
ID NOT READ, WAITING FOR HOST ON
ID STATUS, ID VERIFICATION OK, ID
VERIFICATION FAILED.
ReticlePodAccessing-
Status
The current accessing state of the
reticle pod by the equipment. The
current substate of the
ReticlePodAccessingStatus state
model.
RO Y Enumerated:
NOT AVAILABLE, AVAILABLE, IN
ACCESS, COMPLETE.
ContentMap Ordered list of reticle identifiers
corresponding to slot 1,2,3……n.
RO Y Ordered list of n elements, where n is equal to
the value of “Capacity” above, and each
element consists of a ReticleID.
When a slot has no reticle, the ReticleID value
should be null.
ReticlePodLocationID Identifier of current location of the
reticle pod.
RO Y Text 1 to 80 characters.
ReticlePodLocking-
Status
The current state of pod locking by
the equipment. The current
substate of the
ReticlePodLockingStatus.
RO Y Enumerated:
NOT LOCKED, RELEASED AND LOCKED,
HOLD.
SlotMap Ordered List of slot status as
provided by the host until a
successful slot map read, then as
read by the equipment.
RO Y Ordered List of n elements where n is equal to
the value of “Capacity” above.
1. Enumerated
1
.
n. Enumerated
n
Enumerated:
UNDEFINED, EMPTY, CORRECTLY
OCCUPIED. The number shown above is the
slot number.
SlotMapStatus Current state of slot map
verification.
RO Y Enumerated:
SLOT MAP NOT READ, WAITING FOR
HOST ON SLOT STATUS, SLOT MAP
VERIFICATION OK, SLOT MAP
VERIFICATION FAILED.
10.3.5 Rules for Reticle Pod Attributes
The equipment shall change object attributes, ContentMap and SlotMap, provided by the host. All other
attributes, such as LocationID, shall be set and maintained by the equipment.
The attributes, Capacity, ContentMap, Reticle count, shall be provided with Bind, PodNotification,
ReticleTransferJob,
or ProceedWithPod service before or when SlotMap is provided.
The SlotMap shall be provided with Bind, PodNotification, ReticleTransferJob or ProceedWithPod to verify
PodID, when the SlotMap verification is equipment based. And it shall not be provided when the SlotMap
verification is host based.
Reticle pod properties may be provided before the reticle pod arrives as part of the Bind, PodNotification, or
ReticleTransferJob service and should be retained until either a CancelBind, CancelPodNotification, or
CancelReticleTransferJob service is received or the reticle pod is removed.
Reticle pod properties may also be provided by the ProceedWithPod service. The reticle pod properties that are
provided by the ProceedWithPod service may differ based whether or not the object is instantiated by the
service.
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Reticle pod properties that are required shall be actively updated by the equipment.
10.3.6 Reticle Pod Location
10.3.6.1 A reticle pod location, signified by LocationID, is used for tracking. A reticle pod location is any physical
area that is capable of holding a pod. It is not intended to represent entire mechanisms, which may have a variety of
other properties of interest, but only that portion where a reticle pod may rest.
10.3.7 Reticle Pod Location Examples
10.3.7.1 Reticle Pod Locations include reticle pod
load port locations, internal pod buffer locations, as well as
grippers, conveyors, and elevators that are used internally for moving the pod from one fixed location to another.
10.3.8 Slot Map Relation to Content Map The slot map attribute and content map attribute hold similar
information. The purpose of these attributes differs. The slot map is provided so that the equipment or host can
quickly verify that the pod has reticles correctly placed in the correct slot (as provided by the host). This verification
is based on a slot map read. The content map is provided so that the host can communicate the specific ReticleID in
a specific slot as delivered and that the equipment can communicate the specific ReticleID that it places in a specific
slot.
10.3.9 Reticle Pod Location Naming All locations shall be assigned a unique name. Information about the
reticle pod location can be obtained by querying the Pod Object for the ReticlePodLocationID or by asking the
equipment for the PodLocationMatrix. The text form of the ReticlePodLocationID shall be descriptive of the
location.
10.3.10 Capacity
10.3.10.1 The Capacity parameter can be sent to the equipment by the host in the PodNotification, Bind,
ReticleTransferJob, or the ProceedWithPod service. However the equipment shall update this
10.3.10.2 Parameter based on the results of the read slot map operation. Furthermore, the equipment shall update
the parameter based on it’s own actions. If the equipment does not know the value of Capacity prior to instantiation,
the equipment shall instantiate the reticle pod object with the value of one for Capacity.
10.3.11 The ReticlePodAccessing
10.3.11.1 Status is used by the host to know whether or not the reticle pod owned by the equipment can be
transferred from the equipment.
10.3.11.2 Enumerated values of ReticlePodAccessing-Status correspond to the substates of
ReticlePodAccessingStatus (see Figure 2).
10.4 Reticle Pod State Model
10.4.1 The purpose of the Reticle Pod State Model is to define the host’s view of a reticle pod. The equipment shall
maintain a separate and independent state model for each reticle pod in/at the equipment.
10.4.2 Reticle Pod State Model Diagram
10.4.3 Reticle Pod State Definitions
10.4.3.1 RETICLE POD — The RETICLE POD state has four ANDed (orthogonal) substates: RETICLE POD ID
STATUS, RETICLE POD SLOT MAP STATUS, RETICLE POD ACCESSING STATUS, AND RETICLE POD
CLAMPING STATUS.
10.4.3.1.1 RETICLE POD ACCESSING STATUS — This is a substate of RETICLE POD and indicates the current
accessing status of the pod. It has three substates, NOT ACCESSED, IN ACCESS, and COMPLETE. The initial
default entry substate is NOT ACCESSED.
10.4.3.1.1.1 NOT ACCESSED — This is a substate of RETICLE POD ACCESSING STATUS and is active when
the reticle pod has not been opened. It has two substates NOT AVAILABLE and AVAILABLE.
10.4.3.1.1.1.1 NOT AVAILABLE This is a substate of NOT ACCESSED and is active when the reticle pod has been
instantiated via service but has not been received by the equipment.