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SEMI P41-0304 E © SEMI 2004 3 Item Element or attribute Mandatory or Optional Data Type Description unit Attribute Mandatory String Unit system. InspectionArea Element Mandatory - Top element of inspection area. Refer to…

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SEMI P41-0304
E
© SEMI 2004 2
Tables 2–7. The columns in these tables are described
in the following sections. A layered structure is shown
in Figures 2–7. Figure 1 is explanation of Figures 2–7.
6.2.1 Item Name Column — The name with which the
data item is referenced.
6.2.2 Element or Attribute Column — Indicates
whether the item is an element or an attribute.
6.2.3 Mandatory or Optional Column — Indicates
whether the item is mandatory or optional.
6.2.4 Data Type Column — The type of data as defined
in Table 1.
Table 1 Data Types
Type Description
String A string of ASCII characters from 0 to 32767characters in length.
Integer A string of numeric characters (0 through 9) that represent an integer value.
Float A string representing a floating point value in exponent float.
6.2.5 Description Column – Description of what the data item is and what value restrictions it has
Table 2 Description of Basic Information Section
Item
Element or
attribute
Mandatory or
Optional
Data Type Description
MDML Element Mandatory - Route element.
data_no Attribute Optional Integer Management number in inspection tool.
date_stamp Attribute Optional String Generating time.
BasicInformation Element Mandatory - Top element of basic information.
MaskMaterialInformation Element Mandatory - Top element of material information.
MaskSize Element Mandatory - Mask size information.
unit Attribute Mandatory String Unit system.
shape Attribute Optional String Mask substrate shape.
MaskSize_X Element Mandatory Float Mask substrate size X.
MaskSize_Y Element Mandatory Float Mask substrate size Y.
MaskThickness Element Mandatory Float Mask substrate thickness.
MaskAbsorber Element Optional String Masking absorber.
DefectInspection Element Mandatory - Top element of basic information on defect
inspection.
preparation_date Attribute Optional String Generating time of basic information on defect
inspection.
InspectionTool Element Mandatory - Top element of defect inspection tool
information.
tool_name Attribute Optional String General name of tool.
tool_no Attribute Optional String Tool management number at mask fab.
ToolCoordinateInformation Element Mandatory - Top element of tool work stage coordinate
information. Subsequent structures are in Table
5. Refer to Figure 9.
InspectionMethod Element Mandatory String Defect inspection method.
PreparationOperator Element Optional String Operator name who created inspection basic
information.
ReferenceAreaDB Element Optional String When reusable basic information exists, the
reference address is to be described.
DirectionInformation Element Mandatory - Top element of direction for Mask and tool work
stage. Subsequent structures are in Table 6. Refer
to Figure 10.
AreaInformation Element Mandatory - Top element of inspection area information.
LensDistance Element Optional Float Lens separation at the die to die inspection.
SEMI P41-0304
E
© SEMI 2004 3
Item
Element or
attribute
Mandatory or
Optional
Data Type Description
unit Attribute Mandatory String Unit system.
InspectionArea Element Mandatory - Top element of inspection area. Refer to Figure
8.
unit Attribute Mandatory String Unit system.
InspectionArea_X Element Mandatory Float Inspection area X.
InspectionArea_Y Element Mandatory Float Inspection area Y.
InspectionAreaChip_X Element Mandatory Float Inspection area X of one die in die to die
inspection.
InspectionAreaChip_Y Element Mandatory Float Inspection area Y of one die in die to die
inspection.
ChipSize_X Element Mandatory Float Die size X in die to die inspection.
ChipSize_Y Element Mandatory Float Die size Y in die to die inspection.
InspectionChipNumber Element Mandatory - Element of die number.
InspectionChipNumber_X Element Mandatory Integer Inspected number of die in X at die to die
inspection.
InspectionChipNumber_Y Element Mandatory Integer Inspected number of die in Y at die to die
inspection.
Reference Repeatable
Element
Mandatory - Top element of reference point.
origin Attribute Mandatory String Origin point name of this reference position.
ReferencePointName Element Mandatory String Reference point name.
ReferencePosition Element Mandatory - Element of reference position.
unit Attribute Mandatory String Unit system.
ReferencePosition_X Element Mandatory Float X coordinate value of reference point.
ReferencePosition_Y Element Mandatory Float Y coordinate value of reference point.
ImageData Repeatable
Element
Mandatory - Image data of reference position. Subsequent
structures are in Table 7.
InspectionStartPosition Element Mandatory - Top element of inspection starting position.
origin Attribute Mandatory String Origin point name of this reference position.
unit Attribute Mandatory String Unit system.
InspectionStartPosition_X Element Mandatory Float X coordinate value of inspection start position.
InspectionStartPosition_Y Element Mandatory Float Y coordinate value of inspection start position.
Table 3 Description of Result Summary Section
Item
Element or
Attribute
Mandatory or
Optional
Data type Description
InspectionResult Element Mandatory - Top element of inspection results.
Summary Element Mandatory - Top element of summary information.
InspectionSummary Element Mandatory - Top element of defect inspection summary.
beginning_date Attribute Optional String Beginning time of defect inspection.
ending_date Attribute Optional String Ending time of defect inspection.
InspectionRecipe Element Mandatory - Element of inspection recipe.
recipe_name Attribute Optional String Inspection recipe name.
InspectionModeInformation Element Mandatory String Inspection mode.
InspectionDetectionSummary Element Mandatory - Top element of detected defect summary.
TotalDefect Element Mandatory Integer Number of detected defects in total.
ClassifyDefect Repeatable
Element
Mandatory Integer Number of defect types.
SEMI P41-0304
E
© SEMI 2004 4
Item
Element or
Attribute
Mandatory or
Optional
Data type Description
defect_type Attribute Mandatory String Defect type.
InspectionOperator Element Optional String Inspection Operator name.
ReticleJudgment Element Optional String Reticle disposition.
RepairSummary Repeatable
Element
Mandatory - Top element of repaired defect summary.
beginning_date Attribute Optional String Beginning time of defect repair.
ending_date Attribute Optional String Ending time of defect repair.
RepairTool Element Mandatory - Top element of repair tool information.
tool_name Attribute Optional String General name of tool.
tool_no Attribute Optional String Tool management number in mask fab.
ToolCoordinateInformation Element Mandatory - Top element of tool work stage coordinate
information. Subsequent structures are in Table
5. Refer to Figure 9.
RepairMethod Element Mandatory String Method of defect repairing.
DirectionInformation Element Mandatory - Top element of direction for Mask and tool work
stage. Subsequent structures are in Table 6. Refer
to Figure 10.
NumberRepairProcessing Element Mandatory - Element of number of repair processed.
TotalRepairProcess Element Mandatory Integer Number of repaired defects in total.
CalssifyRepairProcess Repeatable
Element
Mandatory Integer Number of defect types.
defect_type Attribute Mandatory String Defect type.
RepairOperator Element Optional String Repair operator name.
RepairJudgment Element Optional String Judegement of repair process.
EvaluationSummary Repeatable
Element
Mandatory - Top element of evaluated defect summary.
beginning_date Attribute Optional String Beginning time of evaluation.
ending_date Attribute Optional String Ending time of evaluation.
EvaluationTool Element Mandatory - Top element of evaluation tool information.
tool_name Attribute Optional String General name of tool.
tool_no Attribute Optional String Tool management number in mask fab.
ToolCoordinateInformation Element Mandatory - Top element of tool work stage coordinate
information. Subsequent structures are in Table
5. Refer to Figure 9.
EvaluationMethod Element Mandatory String Method of defect evaluation.
DirectionInformation Element Mandatory - Top element of direction for Mask and tool work
stage. Subsequent structures are in Table 6. Refer
to Figure 10.
NumberEvaluationProcessing Element Mandatory - Element of number of evaluation process.
TotalEvaluationProcess Element Mandatory Integer Number of evaluated defects in total.
CalssifyEvaluationProcess Repeatable
Element
Mandatory Integer Number of defect types.
defect_type Attribute Mandatory String Defect type.
EvaluationOperator Element Optional String Evaluation operator name.
EvaluationJudgment Element Optional String Judgment of evaluation process.