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SEMI E88-1104 E © SEMI 1999, 2004 2 SEMI E37 — High-Spee d SECS Message Services (HSMS) Generic Services SEMI E37.1 — High-Speed SECS Message Se rvices Single Selected-Session Mode (HSMS-SS) SEMI E84 — Specification for …

SEMI E88-1104

SPECIFICATION FOR AMHS STORAGE SEM (STOCKER SEM)

This specification was technically approved by the Global Information & Control Committee and is the direct

responsibility of the North American Information & Control Committee. Current edition approved by the

North American Regional Standards Committee on July 11, 2004. Initially available at www.semi.org

September 2004; to be published November 2004. Originally published September 1999; last published July

2004.

This standard was editorially modified in September 2004 to correct a formatting error. Changes were made

to Table 6.

1 Purpose

1.1 This standard establishes a Specific Equipment

Model (SEM) for AMHS storage equipment (Stocker

SEM). The model consists of equipment characteristics

and behaviors that are to be implemented in addition to

the SEMI E30 fundamental requirements and selected

additional capabilities. The intent of this standard is to

facilitate the integration of Stocker SEM equipment

into an automated (e.g., semiconductor fabrication and

flat panel display) factory. This document accomplishes

this by defining an operational model for Stocker SEM

equipment as viewed by a factory automation controller

(Host). This definition provides a standard host

interface and equipment operational behavior (e.g.,

control, state models, and data reports). Several topics

require additional activity that are within the scope of

this standard: queuing, parallel interface for carrier

transfer (SEMI E23), stocker controller architecture,

and scheduling and transport of the transfer unit.

2 Scope

2.1 The scope of this standard is limited to the usage

and description of AMHS storage equipment (Stockers)

as perceived by a SEMI Equipment Communications

Standard 2 (SECS-II) host that complies with the GEM

model (as specified in Section 13). It defines the view

of the equipment through the SECS communication

link. It does not define the internal operation of the

equipment. It includes a specific transfer command

state model and stocker controller state model as the

basis for all equipment of this class.

2.2 This document assumes that the GEM fundamental

requirements and selected additional capabilities (as

specified in Section 13) have been implemented on the

Stocker SEM equipment. It expands the GEM standard

requirements and capabilities in the areas of state

models (stocker controller, transfer command, carrier

and stocker crane state models), collection events,

alarm documentation, remote commands, data item

variables, and material movement.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 SEMI Standards Alignment

3.1.1 The GEM (SEMI E30) model was used as the

basis for Stocker SEM requirements definition in

alignment with existing AMHS SEM Specifications.

3.2 AMHS Storage Equipment Description

3.2.1 This standard is targeted at the different

types/configurations of 300 mm AMHS storage

equipment. The term Stocker SEM equipment refers to

all the types of AMHS storage equipment. The

equipment types may have fundamental mechanical

differences.

3.2.2 Stocker (configuration)

3.2.2.1 A Stocker is generally an AMHS automated

storage and retrieval device used to provide temporary

storage of carriers. The device is not required to

provide temporary storage of carriers (for example,

when used as a device to connect multiple IBSEM

devices or as a floor to floor lifter). Additionally, any

number of physical interfaces may exist to connect the

stocker with external devices such as: Interbay and/or

Intrabay Transport Systems, Process Equipment, other

StockerSEM devices, Operator ports, etc.

4 Referenced Standards

4.1 SEMI Standards

SEMI E4 — SEMI Equipment Communications

Standard 1 Message Transfer (SECS-I)

SEMI E5 — SEMI Equipment Communications

Standard 2 Message Content (SECS-II)

SEMI E23 — Specification for Cassette Transfer

Parallel I/O Interface

SEMI E30 — Generic Model for Communications and

Control of Manufacturing Equipment (GEM)

SEMI E88-1104

SEMI E37 — High-Speed SECS Message Services

(HSMS) Generic Services

SEMI E37.1 — High-Speed SECS Message Services

Single Selected-Session Mode (HSMS-SS)

SEMI E84 — Specification for Enhanced Carrier

Handoff Parallel I/O Interface

4.2 Other References

Harel, D., “Statecharts: A Visual Formalism for

Complex Systems,” Science of Computer Programming

8 (1987) 231-274.

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 AMHS — Automated Material Handling System

5.1.2 BP — Buffer Port

5.1.3 FOUP — Front Opening Unified Pod

5.1.4 GEM — Generic Equipment Model

5.1.5 IBSEM — InterBay/IntraBay Specific Equipment

Model

5.1.6 ITS — Interbay or Intrabay Transport System

5.1.7 LP — Loading Port

5.1.8 OP — Output Port

5.1.9 PGV — Person Guided Vehicle

5.1.10 SC — Stocker Controller

5.1.11 TCP/IP — Transmission Control

Protocol/Internet Protocol

5.1.12 TSC — Transport System Controller

5.2 Definitions

5.2.1 Automated Material Handling System — an

automated system to store and transport materials

within the factory.

5.2.2 automation — the capability of managing

material and data within the factory.

5.2.3 bidirectional load port — a load port used for

loading and unloading carriers.

5.2.4 buffer — a set of one or more locations for

holding carriers at the production equipment.

5.2.5 buffer port — special buffer port location on a

stocker output shuttle. Contains carrier presence

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sensors so that the host can be notified when a carrier is

situated at this position.

5.2.6 carrier — a container with one or more fixed

positions for holding substrates. Examples of carriers

include FOUPs and open cassettes.

5.2.7 carrier ID — a readable and unique identifier for

the carrier.

5.2.8 FOUP—a closed carrier for holding wafers.

5.2.9 host — the factory computer system, or an

intermediate system, that represents the factory and the

user to the equipment. Refers system that controls or

supervises the Stocker Controller (SC) throughout this

document.

5.2.10 independent port — a load port on the stocker

that is dedicated to input or output. It is considered that

the carriers can only be transferred in one direction.

5.2.11 interbay transport system — a transport system

used to move work-in-process between stockers in

different parts of the factory.

5.2.12 Intrabay Transport System — a transport

system dedicated to one or more bays in the factory and

responsible for transferring carriers to and from

production equipment. ITS consists of the physical

units of the system (e.g., vehicles, nodes, docking

stations), the low-level unit controllers, and a system-

level controller. ITS excludes factory floor storage

systems (stockers), but includes any short-term storage

integral to the system, such as storage locations within

an overhead track system that are accessible only to

units of the particular ITS.

5.2.13 load port — the interface location on the

equipment where carriers are transferred.

5.2.14 loading port — user or vehicle accessible port

location on a stocker output shuttle. Contains carrier

presence sensors so that the host can be notified when a

carrier is situated at this position.

5.2.15 output port —port location on a stocker output

shuttle, typically accessible by the stocker crane.

Contains carrier presence sensors so that the host can be

notified when a carrier is situated at this position.

5.2.16 process equipment — equipment used to make

semiconductor devices. This excludes metrology and

material handling equipment.

5.2.17 production equipment — equipment used to

produce semiconductor devices, including wafer

sorting, process, and metrology equipment and

excluding material handling equipment.

SEMI E88-1104

5.2.18 Stocker Controller — stocker Equipment

Controller that communicates with the host and

represents the system as the equipment.

5.2.19 stocker crane — stocker transfer agent

specialized for the movement of carriers between

shelves and input and output port locations.

5.2.20 stocker equipment — an individual stocker

viewed as a single piece of equipment, with distributed

components and distributed control, as illustrated in

Figure 1. The stocker controller communicates with the

host using HSMS and GEM and represents the system

as an equipment. The factory may require more than

one type of stocker.

5.2.20.1 Communications with transport system

equipment may require a low-level handshake with a

transport unit directly involved in the transfer of

material (such as a vehicle or a docking station on an

overhead track).

5.2.20.2 Communications between the various stocker

units and controllers are proprietary to the supplier.

Stocker

Controller

internal proprietary

communications

Factory Host

Stocker

Equipment

host/equipment

communications

factory network

Stocker

Unit

Stocker

Unit

Figure 1

Example of Stocker Equipment

5.2.21 stocker shelf — locations within the stocker

equipment to store carriers. These locations exclude

load ports.

5.2.22 stocker unit — a physical component of the

stocker system, such as a stocker crane, ID reader,

wafer sensor, shuttle port, etc.

5.2.23 swapping port — a load port on the stocker

capable of handling single load and unload of carriers

or simultaneous replace of carriers.

5.2.24 transfer agent — a component of equipment

specialized to the movement of transfer objects from

place to place within a factory. May be of different

types with widely-differing characteristics. Examples

are fixed-arm robots, robot arms on fixed tracks,

overhead gantries or even systems containing a

heterogeneous collection of other transfer agents.

Humans may also act as transfer agents.

5.2.25 transfer completed port — the destination port

specified in a transfer command.

5.2.26 transfer port — point on the transport system at

which a change of equipment ownership of the carrier

occurs.

5.2.27 transfer unit — the element of movement

(assemblage of carriers) of the ITS that consists of a

maximum number of carriers allowed in a specific

transfer command:

 AA is the maximum number of carriers allowed for

acquire at the transfer source.

 BB is the maximum number of carriers allowed for

deposit at the transfer destination.

 CC is the maximum number of carriers allowed for

transfer in one transport vehicle.

5.2.27.1 The maximum size of the transfer unit is the

minimum of AA, BB, and CC.

5.2.27.2 For purposes of the Stocker SEM, the transfer

unit is limited to one carrier.

5.2.28 transport system — the component of AMHS

that moves material from one part of the factory to

another.

5.2.29 transport unit — a physical component of a

transport system, such as a vehicle, node, or docking

unit.

5.2.30 zone — a logical assignment referencing a set of

one or more locations. A stocker can have several

logical zone assignments. For example, a specific

stocker may have 2 zones defined as LEFT_ZONE and

RIGHT_ZONE. The assignment of zones is specific to

the Stocker SEM equipment supplier and it may be

desirable for the supplier to remain flexible in the

assignment of zones so that it could be configured to

meet the specific requirements of different users. A

specific zone may only contain shelf locations or ports,

but not both. A location may be in at most one zone.

6 Overview and Assumptions

NOTE 1: This section has been included as background

information to help clarify requirements.

6.1 Destination Control (to Shelf or to Output Port)

6.1.1 The destination is controlled by Host when the

carrier is input to the stocker (i.e., the carrier enters the

stocker domain). The destination of the transfer

command is required. It would be invalid for the Host

to issue a transfer command to the SC without

including a valid destination.