semi合集-English.pdf - 第5613页

SEMI P10-0705 © SEMI 1990, 2005 108 < x s : e l e m e n t n a m e = " B i n S i z e " t y p e = " x s : s t r i n g " / > < x s : e l e m e n t n a m e = " S e v e r i t y Cr i t e r i o…

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SEMI P10-0705 © SEMI 1990, 2005 107
- < xs: sequence>
< xs: elem ent nam e= "De fect Qu alit yI d" type= "x s:st ring"
m inOccurs
= " 0 " / >
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m axOccurs
= "u nbounde d">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "W indow Type ">
< xs: at t ribut e nam e= "p1 0 Mult iV alue "
type
= " xs:in t e ger " use= " required"
fixed
= "4 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< /
xs: com plexType>
< / xs: elem ent>
- < xs: elem ent nam e= "I nspect ionAr eaExclude" m inOccurs= "0 "
m axOccurs
= "u nbounde d">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "W indow Type ">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " xs:in t e ger " use= " required"
fixed
= "4 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "
Visua lI nspCr it er ia " t ype= "x s:st ring"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "Die ToDieI nspect ion" t ype= "x s:boole a n"
/ >
< xs: elem ent nam e= "DieToDieM e a su r em ent s"
type
= " xs:boolean" / >
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< xs: elem ent nam e= "De fect EquipRe qd" type= " x s:st ring"
/ >
< xs: elem ent nam e= "EquipSit e Reqd" type= "x s:st ring"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent
nam e= " D efe ct I nspMode Re qd"
type
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< xs: elem ent nam e= "Defe ct I nspPixelSizeReqd"
type
= " x s:dou ble" m inOccurs= " 0 " / >
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< xs: elem ent nam e= "De fect Type" type= "xs:st r in g"
/ >
< xs: elem ent nam e= "De fect I nspSen sit ivit yRe qd"
type
= " x s:st r ing" / >
- < xs: sequence m inOccurs= " 0 "
m axOccurs
= "u nbounde d">
SEMI P10-0705 © SEMI 1990, 2005 108
< xs: elem ent nam e= "BinSize " t ype= "x s:st ring"
/ >
< xs: elem ent nam e= "Sever it yCrit er ionReqd"
type
= " x s:st r ing" / >
< / xs: sequence>
< / xs: sequence>
< xs: elem ent nam e= "De fect Se t upFile N a m e Reqd"
type
= " x s:st r ing" m inOccurs= " 0 " / >
< / xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "De fect EquipUse d" type= " xs:st ring"
/ >
< xs: elem ent nam e= "EquipSit e Use d" type= "
xs:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "De fect I nspM odeUse d"
type
= " x s:st r ing" m inOccurs= " 0 " / >
< xs: elem ent nam e= "De fect I nspPix elSize Use d"
type
= " xs:dou ble" m inOccurs= " 0 " / >
- < xs: sequence m inOccurs= " 0 " m axOccurs= "unbounded">
< xs: elem ent nam e= "De fect Type" type= "xs:st r in g"
/ >
< xs: elem ent nam e= "De fect I nspSen sit ivit yUse d"
type
= " xs:st r ing" / >
- < xs: sequence m inOccurs= " 0 "
m axOccurs
= "u nbounde d">
< xs: elem ent nam e= "BinSize " t ype= "x s:st ring"
/ >
< xs: elem ent nam e= "Sever it yCrit e r ionUsed"
type
= " x s:st r ing" / >
< / xs: sequence>
< / xs: sequence>
< xs: elem ent nam e= "De fectSe t upFile N a m e Used"
type
= " x s:st r ing" m inOccurs= " 0 "
m axOccurs
= "u nbounde d" / >
< / xs: sequence>
< xs: elem ent nam e= "De fect I nspDa t e " t ype= " x s:da t eTim e"
m inOccurs
= " 0 " / >
- < xs: sequence m inOccurs= " 0 " m axOccurs= "unbounded
">
< xs: elem ent nam e= "Repa ir Equ ipReqd" type= " x s:st ring"
/ >
- < xs: sequence m inOccurs= " 0 " m axOccurs= "unbounded">
< xs: elem ent nam e= "EquipSit e Reqd"
type
= " x s:st r ing" / >
< / xs: sequence>
< / xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "Repa ir Equ ipUsed" t ype= "xs:st ring"
/ >
- < xs: sequence m inOccurs= " 0 " m axOccurs= "unbounded">
SEMI P10-0705 © SEMI 1990, 2005 109
< xs: elem ent nam e= "EquipSit e Use d"
type
= " x s:st r ing" / >
< / xs: sequence>
< / xs: sequence>
- < xs: elem ent nam e= "Mea sure dI nspect ionAr ea "
m inOccurs
= " 0 " m axOccurs= " unbounded">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "W indow Type ">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " xs:in t e ger " use= " required"
fixed
= "4 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
- < xs: elem ent nam e= "Mea sure dI nspect ionAr eaExclude"
m inOccurs
= " 0 " m axOccurs= " unbounded">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "W indow Type ">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " xs:in t e ger " use= " required"
fixed
= "4 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent
nam e= " M easuredD e fect D e nsity"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea su re dD efect Cou nt " type= "xs:int "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Mea su re dD efect Cou nt Rep"
type
= " x s:in t " m inOccurs= "0 " / >
< xs: elem ent nam e= "Mea sure dDefe ct Count W it hinSpe c"
type
= " x s:in t " m inOccurs= "0 " / >
< xs: elem ent nam e= "Mea sure dDefe ct iveD ie Den sit y"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sur edDefect iveD ie Count "
type
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< xs: elem ent nam e= "Mea sur edDefect iveD ie Cou nt Re p"
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= " x s:in t " m inOccurs= "0 " / >
< xs: elem ent nam e= "Mea sur e dPe r ce nt Defect iveD ie"
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= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea su re dD efect FileN a m e "
type
= " xs:st r ing" m inOccurs= " 0 " m axOccurs= "unbounded"
/ >
< xs: elem ent nam e= "PrePellI nspe ct ionI d" t ype= "x s:st ring"
m inOccurs
= " 0 " / >