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SEMI E125-0305 © SEMI 2003, 2005 13 9.2.2.2 RevisionNotice — This class provides the date and tim e of any metadata revisi on, and the e quipment whose metadata was c hanged. 9.2.2.2. 1 RevisionNotice Association Definit…

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SEMI E125-0305 © SEMI 2003, 2005 12
9.1.2.12 NotificationRequest — This class describes the notification preferences of the metadata client.
9.1.2.12.1 NotificationRequest Attribute Definition Table
Table 18 NotificationRequest Attribute Definition
Attribute Name Definition Form
enable The client’s preference for revision notification. Boolean. If true, the client’s preference is to be
notified of metadata revisions. If false, the
preference is to not be notified of metadata revisions.
9.2 Metadata Client
9.2.1 Figure 7 shows the interface and argument data types that clients must support in order to receive metadata
revision notifications.
Figure 7
Metadata Client Interface
9.2.2 MetadataClient Operations
Table 19 MetadataClient Operation Definition
Operation Description Type
MetadataRevised Notifies the client that the metadata has recently changed. FF
9.2.2.1 MetadataRevised — The equipment shall send this notification whenever it detects a change in the
metadata, if the client has requested to be notified through a prior invocation of the “NotifyOnRevisions” operation
of the EquipmentMetadataManager interface.
9.2.2.1.1 MetadataRevised Operation Arguments
Table 20 MetadataRevised Argument Definitions
Argument Description Kind Form
revision The date and time at which the metadata
change was detected by the equipment.
in Structured data of type RevisionNotice, described in
Section 9.2.2.2 .
MetadataRevised(in newRevision : RevisionNotice)
MetadataClient
«interface»
EquipmentElement
CEM::
equipment
RevisionNotice
11
1
newRevision
1
MetadataRevision
revisionDate
SEMI E125-0305 © SEMI 2003, 2005 13
9.2.2.2 RevisionNotice — This class provides the date and time of any metadata revision, and the equipment whose
metadata was changed.
9.2.2.2.1 RevisionNotice Association Definition Table
Table 21 RevisionNotice Association Definition
Association Role Name Definition Comments
equipment The root equipment node that represents the equipment as a
whole.
One and only one element of a type
derived from the SEMI E120 type
EquipmentElement.
newRevision The date and time at which the metadata was revised. Structured data, of type
MetadataRevision
9.2.2.2.2 equipment — Providing the root equipment node with a RevisionNotice should not be interpreted to mean
that the root equipment node’s metadata has changed. It is strictly provided as a means for clients to determine
which equipment has undergone the change.
10 Equipment Metadata
10.1 Management of Equipment Metadata
10.1.1 When equipment configuration changes result in a change to any information described using the classes in
Section 9.1.2.9 of this document or by the SEMI Common Equipment Model, the equipment shall update the
metadata description accordingly at the time of the change. If clients have requested revision notification (see
Sections 9.1.2.9 and 9.1.2.10 ), the equipment shall notify each interested client at the time of the change, or at the
first opportunity when its communication status permits. This includes reconfiguration of the equipment after its
introduction into the factory. Ensuring that all aspects of equipment metadata are kept up-to-date and available to
the factory is a critical aspect of maintaining equipment metadata.
10.2 Equipment Structure
10.2.1 The physical equipment structure shall be described according to the SEMI Common Equipment Model.
Suppliers shall provide a model of those elements of their equipment for which it is necessary and practical to
facilitate (at least) utilization tracking, process control, and technical support objectives.
10.3 Equipment Nodes
10.3.1 Equipment Node Description
10.3.1.1 Figure 8 shows how to describe the parameters, events, objTypes, and exceptions available from an
element (or node) of the equipment hierarchy. Providing this descriptions indicates that the specified node acts as
the source of all Events, Exceptions, ObjTypes, and Parameters that are included in the description. All Parameters,
Exceptions, ObjTypes, and Events associated with a given equipment node are independent of the Events,
Exceptions, ObjTypes, and Parameters associated with other equipment nodes.
SEMI E125-0305 © SEMI 2003, 2005 14
EquipmentNodeDescrip tio n
1
parameters0..*
1..*
ex cept ions0..*
1..*
objT ypes0..*
Parameter
CEM::Nameable
node 1
1
SEMIObjType Exception
StateMachin eInstance
s tateMachines 1
0..*
Figure 8
Describing Equipment Nodes
10.3.1.2 EquipmentNodeDescription — This class is used to identify a specific element of the equipment hierarchy,
and to describe the Parameters, Exceptions, ObjTypes, and Events for which this node is the source. This is
achieved through the StateMachineInstance (Section 10.8.6), SEMIObjType (Section 10.8.5 ), Exception (Section
10.7 ), and Parameter (Section 10.4 ) classes. Only one EquipmentNodeDescription shall be provided for a given
equipment node. Equipment elements may be any concrete class derived from Nameable, as defined in the SEMI
E120 specification, Common Equipment Model.
10.3.1.3 EquipmentNodeDescription Association Definition Table
Table 22 EquipmentNodeDescription Association Definition
Association Role Name Definition Comments
stateMachines An unordered list of state machines that are supported by
this equipment node.
List of elements of type
StateMachineInstance, described in
Section 10.8.6. There shall be one map
provided for each event that the node
can generate, including events for which
no Parameters are available.
objTypes An unordered list of the SEMIObjTypes that are
associated with this equipment node.
List of elements of type SEMIObjType,
describe in Section 10.8.5 .
exceptions An unordered list of exceptions that can be reported by
this equipment node.
List of elements of type Exception
described in Section 10.7 .
parameters An unordered list of typed parameters provided by this
equipment node.
List of elements of type Parameter,
described in Section 10.4 . Any
parameters that represent variables from
SEMI standards shall be typed and
named according to Sections 10.5.4 and
10.4.10 . Each parameter name for this
node shall be unique. Parameter names
need not be unique across equipment
nodes.
node The equipment node being described. Element of a type derived from the
SEMI E120 Nameable class.