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SEMI E5-1104 © SEMI 1982, 2004 165 Figure 7 Wafer Rotation on Film Frame Figure 8 Orientation Reference and Index Determination

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SEMI E5-1104 © SEMI 1982, 2004 164
Figure 6
Wafer Rotation Position in Degrees
SEMI E5-1104 © SEMI 1982, 2004 165
Figure 7
Wafer Rotation on Film Frame
Figure 8
Orientation Reference and Index Determination
SEMI E5-1104 © SEMI 1982, 2004 166
Figure 9
Wafer Map Transmitted by Equipment