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SEMI S10-1103 © SEMI 1996, 2003 6 APPENDIX 1 RISK RANKING TABLES NOTICE : The material in this appendix is an official part of SEMI S10 and was approved by fu ll letter ballot procedures on April 2, 2003. NOTE A1-1: The …

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SEMI S10-1103 © SEMI 1996, 2003 5
AIChE
6
— Several standards covering risk assessment,
evaluation and specific topic, focused on chemical
products.
BS
7
5760–5:1991 — Reliability of systems, equipment
and components. Guide to failure modes, effects and
criticality analysis (FMEA and FMECA)
6
Available through the American Institute of Chemical Engineers, 3
Park Ave, New York, N.Y., 10016-5991, USA. http://www.aiche.org
7
Available through the British Standards institute, 389 Chiswick
High Road, London W4 4AL, United Kingdom www.bsi-global.com
SEMI S10-1103 © SEMI 1996, 2003 6
APPENDIX 1
RISK RANKING TABLES
NOTICE : The material in this appendix is an official part of SEMI S10 and was approved by full letter ballot procedures on
April 2, 2003.
NOTE A1-1: The following Tables A1-1 and A1-2 give the groups of severity and likelihood. Other examples can be found in
Related Information 3 (Risk Ranking Number) and Related Information 4 (more detailed numerical Severity and Likelihood).
Table A1-1 Severity Groups
Severity Group People (See Note A1-2.) Equipment/Facility
(See Note A1-3.)
Property
1 – Catastrophic One or more fatalities. System or facility loss. Chemical release with lasting
environmental or public health impact.
2 – Severe Disabling injury/illness. Major subsystem loss or facility
damage.
Chemical release with temporary
environmental or public health impact.
3 – Moderate Medical treatment or restricted
work activity (OSHA
recordable).
Minor subsystem loss or facility
damage.
Chemical release triggering external
reporting requirements.
4 – Minor First aid only. Non-serious equipment or
facility damage.
Chemical release requiring only routine
cleanup without reporting.
NOTE A1-2: This number is if 1-2 people are exposed to the risk. The severity group should be reconsidered to a
more severe severity group when 3 or more people are involved.
NOTE A1-3: Although it is not a safety risk it adds value to take in account product (e.g. wafers, reticles) damage.
No descriptions are given due to the fact of the value and number of products on a equipment can vary. Possible
descriptions can be: Rework of a wafer, Rework of a batch, Loss of a batch.
Table A1-2 Likelihood Groups
Likelihood Group Expected Frequency (% of Units- Year) (See Note 1.)
A – Frequent More than 1%
B – Likely More than 0.2% but not more than 1%
C – Possible More than 0.04%, but not more than 0.2%
D – Rare More than 0.02%, but not more than 0.04%
E – Unlikely Not more than 0.02%
Note 1: The frequency (in percent) is calculated by dividing the number of (observed or expected) occurrences by the number of unit-years that
the hazard has existed or is anticipated to exist, then multiplying the quotient by 100.
NOTE A1-4: If data are available, they should be used. If data are not available, the frequencies should be estimated.
NOTE A1-5: The following two example calculations are added for clarification of Table A1-2 only:
Example 1:
If something expected to happen 1 time in 5 units operated for 6 years the frequency will become:
(1 time/(5 units × 6 year of operation)) × 100% = 3.3% (= A – Frequent)
Example 2:
If something expected to happen 2 times on 50 units with 30 are operated for 6 years and 20 are operated for 7 years
the frequency will become
(2 times/(30 units × 6 year of operation + 20 units × 7 year of operation)) × 100% = 0.625% (= C – Possible)
SEMI S10-1103 © SEMI 1996, 2003 7
Table A1-3 Risk Ranking Matrix
LIKELIHOOD
RISK
RANKING
MATRIX
FREQUENT
A
LIKELY
B
POSSIBLE
C
RARE
D
UNLIKELY
E
CATASTROPHIC
1
SEVERE
2
MODERATE
3
S
E
V
E
R
I
T
Y
MINOR
4
Overall Risk Ranking Categories:
VERY HIGH HIGH MEDIUM LOW VERY
LOW
NOTE A1-6: The Risk Categories of “Very High” and “Very Low” correspond identically with the Risk Categories,
used in previous SEMI documents (e.g., S10-12-96, S2, and S14) of “Critical” and “Slight”. The terms were
changed to facilitate translation from English.
NOTICE: SEMI makes no warranties or representations as to the suitability of the guidelines set forth herein for
any particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer' s instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
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respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
guideline. Users of this guideline are expressly advised that determination of any such patent rights or copyrights,
and the risk of infringement of such rights are entirely their own responsibility.