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SEMI F84-0304 © SEMI 2004 1 SEMI F84-0304 SPECIFICATION FOR DIMENSION OF THREE PORT CO MPONENTS (EXCEPT MFC/MFM) FOR 1.125 INCH TYPE TWO FASTENER CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEM S This specification w…

SEMI F83-0304 © SEMI 2004 6

R1-3 Design Example 3

R1-3.1 Seal Design — See Figure R1-3.

R1-3.2 Surface Hardness — The sealing surface (the bottom of the counterbore) has a minimum hardness of 300

Vickers. The hardness may be tested per ISO 6507.

R1-3.3 Surface Roughness — The sealing surface (the bottom of the counterbore) has a surface roughness of 0.1

micrometers Ra max. The surface roughness may be tested per SEMI F37-0299.

R1-3.4 Surface Scratches — The sealing surface (the bottom of the counterbore) is without any lateral scratches

which are visible to non-magnified normal vision.

Figure R1-3

Design Example 3

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the risk of infringement of such rights are entirely their own responsibility.

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SEMI F84-0304 © SEMI 2004 1

SEMI F84-0304

SPECIFICATION FOR DIMENSION OF THREE PORT COMPONENTS

(EXCEPT MFC/MFM) FOR 1.125 INCH TYPE TWO FASTENER

CONFIGURATION SURFACE MOUNT GAS DISTRIBUTION SYSTEMS

This specification was technically approved by the Global Gases Committee and is the direct responsibility of

the Japanese Gases & Facilities Committee. Current edition approved by the Japanese Regional Standards

Committee on November 20, 2003. Initially available at www.semi.org February 2004; to be published

March 2004.

1 Purpose

1.1 This standard establishes the properties and

physical dimensions of three port components for 1.125

inch type surface mount gas distribution systems.

2 Scope

2.1 This document includes common requirements,

layout, size, detailed specifications, and dimensions of

the components.

2.2 This standard applies to all three port two fastener

components (except mass flow controllers and mass

flow meters).

The components (i.e. valves, pressure

regulators, pressure transducers, filters and purifiers)

are mounted on substrates with fasteners accessible

from the top.

2.3 This standard only applies to components, which

control flow of ≤ 50 slm nitrogen equivalent at 308 kPa

(44.7 psia). This standard also only applies to

components with operating pressures less than 3445

kPa (500 psia) at 20°C.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This standard only addresses the component; it

does not address the seals, the sealing system, or the

assembly process and does not guarantee the

performance of the sealing system. The user should be

aware that gas delivery system performance and sealing

system performance are addressed elsewhere in the

SEMI standards.

3.2 The user should be aware that alternative

technologies are commercially available.

3.3 International, national, and local codes, regulations,

and laws should be consulted to ensure that the

equipment meets regulatory requirements in each

location of use.

4 Referenced Standards

4.1 SEMI Standards

SEMI E49.9 — Guide for Ultrahigh Purity Gas

Distribution Systems in Semiconductor Manufacturing

Equipment

SEMI F20 — Specification for 316L Stainless Steel

Bar, Extruded Shapes, Plate, and Investment Castings

for Components Used in High Purity Semiconductor

Manufacturing Applications

4.2 ASME Standards

ASME Y14.5 — Dimensioning and Tolerancing

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Definitions

5.1.1 components for surface mount — a gas

distribution system component having inlets and outlets

located on the bottom of the component with the

attachment mechanism accessible from the top.

5.1.2 Ra — roughness average. The arithmetic average

of the absolute values of the measure profile height

deviations taken within the sampling length and

measured from the graphical centerline.

5.1.3 two fastener configuration — the component has

two fasteners per sealing point. The sealing point is

located in the middle of the two fasteners.

6 Common Requirements

6.1 Dimensional Requirements — All components

shall meet the requirements outlined in Figure 1. All

1 American Society of Mechanical Engineers. Three Park Avenue,

New York, NY 10016-5990, USA. Telephone: 800.843.2763

(U.S./Canada), 95.800.843.2763 (Mexico), 973.882.1167 (outside

North America). Website: www.asme.org

geometric dimensioning and tolerancing complies with

ASME Y14.5 and/or the applicable ISO standard.

NOTE 1: All dimensions are in millimeters unless otherwise

noted.

NOTE 2: The through hole of the sealing port will be

elliptical if the through hole is drilled at an angle. In this

case, the diameter shall apply to the major diameter of the

ellipse.

6.2 Material — The material used to manufacture the

base of the components shall comply to SEMI F20 with

the exception that the sulfur content shall comply to

SEMI E49.9.

NOTE 3: SEMI E49.9 was withdrawn. However, a ballot to

combine E49.8 and E49.9 in one single standard was

submitted for SEMICON West 2003.

6.3 Burrs and Sharp Edges — Unless specifically

noted on the drawing, remove all burrs and sharp edges.

6.4 Handles and Displays — Rotating handles and

removable displays shall stay within the maximum

envelope of the base of the component with the

exception of toggle and/or lockout/tagout valves at the

discretion of the system designer. They shall be

movable or removable such that they do not interfere

with the access of the mounting fasteners from above.

a b c d e f g h i j

φ28.6

MAX

127

MAX

φ23

MAX

20.6

MIN

6.5

±0.2

28.6

+ 0.3

-0.5

28.6

+ 0.3

-0.5

10.9

φ4.4

±0.1

UNIT: [mm]

Figure 1

Dimensional Requirements for All Components