semi合集-English.pdf - 第386页

SEMI E52-0703 © SEMI 1995, 2003 22 Code Gas Name Symbol Formula Synonym Ref 291 Ethyl Formate C3H6O2 HCO 2 C 2 H 5 Ethyl ester formic acid; HC00C2H5 3 292 Methyl acetate C3H6O2 CH 3 CO 2 CH 3 Methyl ester acetic acid; UN…

100%1 / 7923
SEMI E52-0703 © SEMI 1995, 2003 21
Code Gas Name Symbol Formula Synonym Ref
221 Ethyl Fluoride C2H5F CH
3
CH
2
F Fluoroethane, R-161, FREON-
161
2
54 Ethane C2H6 CH
3
CH
3
1
218 Dimethylcadmium C2H6Cd (CH
3
)
2
Cd 2
73 Dimethyl Ether C2H6O CH
3
OCH
3
Methylether 1
136 Ethanol C2H6O CH
3
CH
2
OH 2
169 Ethyleneglycol C2H6O2 HOCH
2
CH
2
OH Ehtanediol, Glycol 2
284 Dimethyl selenide C2H6Se C
2
H
6
Se (CH3)2Se; Selenium dimethyl;
Dimethylselenium
2
212 Dichlorodimethylsilane C2H6SiCl2 (CH
3
)
2
SiCl
2
2
220 Dimethyltellurium C2H6Te (CH
3
)
2
Te 2
135 Dimethylzinc C2H6Zn (CH
3
)
2
Zn 3
164 Dimethylaluminum-hydride C2H7Al (CH
3
)
2
AlH DMAH 13
85 Dimethylamine C2H7N (CH
3
)
2
NH 1
233 Monoethylamine C2H7N C
2
H
5
NH
2
2
285 Ethoxy silane C2H8OSi C
2
H
8
OSi 2
219 Dimethylsilane C2H8Si (CH
3
)
2
SiH
2
2
137 Halothane C2HBrClF3 BrClHCCF
3
6
186 2,2 Dichloro1,1,1
Trifluoroethane
C2HCl2F3 CHCl
2
-CF
3
Freon 123, Suva 123 2
204 Chlorodifluoroethylene C2HClF2 CF
2
=CHCl R-1122, FREON-1122 4
223 Fluoroacetylene C2HF FC=CH 2
155 Pentafluoroethane C2HF5 CF
3
CHF
2
F-125, R-125 9
59 Cyanogen C2N2 NCCN Oxalodinitrile 1
138 Hexafluoropropylene C3F6 CF
3
CF=CF
2
Perfluoropropylene or Propylene,
Perfluoro
1
225 Hexafluoroacetone C3F6O (CF
3
)
2
CO 2
286 Hexafluoropropylene oxide C3F6O C
3
F
6
O Hexafluoroepoxypropane 2
128 Perfluoropropane C3F8 CF
2
(CF
3
)
2
1
287 Trimethoxy silane C3H10O3Si C
3
H
10
O
3
Si 2
190 Trimethyl Silane C3H10Si (CH
3
)
3
SiH 2
165 Trimethylaminealane C3H12AlN (CH
3
)
3
NAlH
3
TMAA 11
267 Hexafluoro Propane C3H2F6 CH
2
FCF
2
CF
3
1,1,1,2,2,3-Hexafluoropropane 2
288 Pentafluoropropanol C3H3F5O C
2
F
5
CH
2
OH Perfluorodihydropropanol,
1,1,1,2,2-Pentafluoropropane
2
276 Acrylonitrile C3H3N CH
2
=CHCN Acrylon; Propenenitrile 3
66 Allene C3H4 CH
2
=C=CH
2
Propadiene 1
68 Methyl Acetylene C3H4 CH
3
C=CH Propyne 1
289 Acrylic acid C3H4O2 C
3
H
4
O
2
2-Propenoic acid;
CH2=CHCOOH
2
290 Trifluoropropane C3H5F3 C
3
H
5
F
3
1,1,1-Trifluoropropane;
CH3CH2CF3
2
61 Cyclopropane C3H6 C
3
H
6
1
69 Propylene C3H6 CH
3
CH=CH
2
Propene 1
81 Methyl Vinyl Ether C3H6O CH
3
OCH=CH
2
1
184 Acetone C3H6O CH
3
COCH
3
2
SEMI E52-0703 © SEMI 1995, 2003 22
Code Gas Name Symbol Formula Synonym Ref
291 Ethyl Formate C3H6O2 HCO
2
C
2
H
5
Ethyl ester formic acid;
HC00C2H5
3
292 Methyl acetate C3H6O2 CH
3
CO
2
CH
3
Methyl ester acetic acid; UN
1231
3
331 Acetaldehyde methoxy C3H6O2 CH
3
OCH
2
CHO 3
332 Acetone, hydroxy C3H6O2 CH
3
COCH2OH Acetol 3
333 Glycol methylene ether C3H6O2 C
3
H
6
O
2
1,3-Dioxolane 3
334 Propanoic acid C3H6O2 CH
3
CH
2
CO
2
H Propionic acid 3
335 Glycidol C3H6O2 CH
2
CHCH
2
OH 1-Propanol, 2,3 epoxy 3
293 Propenamine C3H7N C
3
H
7
N Allylamine; Monoallylamine; UN
2334
2
89 Propane C3H8 CH
3
CH
2
CH
3
1
187 Isopropal Alcohol C3H8O (CH
3
)
2
CHOH 2-Propanol 2
149 Trimethylaluminum C3H9Al Al(CH
3
)
3
TMA, TMAl 4
151 Trimethylarsenic C3H9As (CH
3
)
3
As Trimethylarsine, TMAs 2
277 Trimethylborane C3H9B (CH
3
)
3
B 2
131 Trimethoxyborine C3H9BO3 B(OCH
3
)
3
TMB, Trimethylborate 2
152 Trimethylgallium C3H9Ga Ga(CH
3
)
3
TMGa 4
153 Trimethylindium C3H9In (CH
3
)
3
In TMIn 3
109 Trimethylamine C3H9N (CH
3
)
3
N Methylamine 1
294 Trimethyl ester phosphoric acid C3H9O4P C
3
H
9
O
4
P Methyl phosphate;
Trimethoxyphosphine oxide
2
132 Trimethylphosphorous C3H9P (CH
3
)
3
P Trimethylphosphine, TMP 2
133 Trimethylphosphite C3H9PO3 (CH
3
O)
3
P TMPi, Trimethoxyphosphine 2
150 Trimethylantimony C3H9Sb (CH
3
)
3
Sb Trimethylstibene 2
295 Heptafluoropropane C3HF7 C
3
HF
7
1,1,1,2,3,3,3-Heptafluoropropane,
Freon 227
2
241 Perfluorobutane C4F10 C
4
F
10
3
270 Hexafluoro-2-Butyne C4F6 CF
3
C=CCF
3
Bis(trifluoromethyl)acetylene;
Perfluoro-2-butyne
3
296 Hexafluorocyclobutene C4F6 C
4
F
6
Perfluorocyclobutene;
1,2,3,3,4,4-
Hexafluorocyclobutene
3
297 Hexafluoro butadiene-1,3 C4F6 CF
2
=CF-CF=CF
2
Perfluorobutadiene-1,3; 3
129 Octafluorocyclobutane C4F8 (CF
2
)
4
Perfluorocyclobutane or
Cyclobutane, Perfluoro
1
236 Octafluorobutane C4F8 C
4
F
8
3
351 Perfluoro (Oxacyclopentane) C4F8O C
4
F
8
O 3
111 Isobutane C4H10 (CH
3
)
2
CHCH
3
2-Methylpropane or Propane, 2-
Methyl
1
117 Butane C4H10 CH
3
(CH
2
)
2
CH
3
1
271 Butanol-1 C4H10O CH
3
CH
2
CH
2
CH
2
OH 3
336 Butanol-2 C4H10O CH
3
CH
2
CH(OH)CH
3
3
337 Tertiary Butyl Alcohol C4H10O (CH
3
)
3
COH 3
338 Diethyl ether C4H10O C
2
H
5
OC
2
H
5
3
339 Methyl propyl ether C4H10O CH
3
OC
3
H
7
3
340 Methyl isopropyl ether C4H10O (CH
3
)
2
CHOCH
3
3
SEMI E52-0703 © SEMI 1995, 2003 23
Code Gas Name Symbol Formula Synonym Ref
341 Isobutyl Alcohol C4H10O (CH
3
)
2
CHCH
2
OH 3
298 Diethyl sulfide C4H10S C
4
H
10
S UN 2375; Ethyl sulfide; 2
214 Diethylzinc C4H10Zn Zn(C
2
H
5
)
2
2
161 Tertiarybutylarsine C4H11As C(CH
3
)
3
AsH
2
TBA 8
213 Diethylamine C4H11N (C
2
H
5
)
2
NH 2
162 Tertiarybutylphosphine C4H11P C(CH
3
)
3
PH
2
TBP 8
250 Tetramethylgermanium C4H12Ge (CH
3
)
4
Ge 2
299 Tetramethoxygermanium C4H12GeO4 (CH
3
O)
4
Ge Ge(OMe)4 2
300 Dimethoxydimethyl silane C4H12O2Si (CH
3
O)
2
Si(CH
3
)
2
KBM 22 2
301 Tetramethoxy silane C4H12O4Si (CH
3
O)
4
Si Silicic Acid (H4SiO4);
Tetramethyl ester; Tetramethyl
silicate
2
302 Tetramethyl lead C4H12Pb (CH
3
)
4
Pb (CH3)4Pb; Plumbane,
tetramethyl;
2
154 Diethylsilane C4H12Si (C
2
H
5
)
2
SiH
2
2
251 Tetramethylsilane C4H12Si (CH
3
)
4
Si 2
252 Tetramethyl Tin C4H12Sn (CH
3
)
4
Sn 2
166 Dimethylethylaminealane C4H14NAl (CH
3
)
2
C
2
H
5
NAlH
3
DMEAA 14
158 Tetramethylcyclotetra-siloxane C4H16Si4O4 (CH
3
)
4
H
4
(SiO)
4
TOMCATS 7
93 Ethyl Acetylene C4H6 CH
3
CH
2
C=CH 1
100 Butadiene C4H6 CH
2
=C=CHCH
3
Methylallene 1
98 Transbutene C4H8 CH
3
CH=CHCH
3
2
104 Butene C4H8 CH
3
CH
2
CH=CH
2
1-Butene 1
106 Isobutene C4H8 (CH
3
)
2
C=CH
2
Isobutylene, Methylpropene 2
107 Cisbutene C4H8 CH
3
CH=CHCH
3
Cis-2-Butene 2
207 Cyclobutane C4H8 C
4
H
8
Tetramethylene 2
182 Tetrahydrofuran C4H8O C
4
H
8
O 2
140 Nickel Carbonyl C4O4Ni Ni(CO)
4
1
266 Octafluorocyclopentene C5F8 CF
2
=C(CF
3
)-CF=CF
2
3
120 Methylbutene C5H10 CH
3
CH
2
CCH
3
=CH
2
2-Methyl-1-Butene 1
122 Dimethylpropane C5H12 (CH
3
)
4
C Neopentane 2
231 Isopentane C5H12 CH
3
CH
2
CH(CH
3
)
2
2-Methylbutane 2
240 Pentane C5H12 CH
3
(CH
2
)
3
CH
3
2
303 Trimethylvinylsilane C5H12Si C
5
H
12
Si Vinyltrimethylsilane;
CH2=CHSi(CH3)3
2
272 Hexafluoro Acetylacetone C5H2F6O2 C
5
H
2
F
6
O
2
1
304 Pyridine C5H5N C
5
H
5
N Azabenzene; Azine 2
305 Methyl methacrylate polymer C5H8O2 C
5
H
8
O
2
Poly(methyl methacrylate); 2-
Methyl1-2-propenoic acid
2
230 Iron Carbonyl C5O5Fe Fe(CO)
5
2
192 Hexafluorobenzene C6F6 C
6
F
6
2
178 4-Methyl, 1-Pentene C6H12 (CH
3
)
2
CHCH
2
CH=CH
2
2
127 Hexane C6H14 CH
3
(CH
2
)
4
CH
3
2
170 Hexanediol-1,6 C6H14O2 HO(CH
2
)
6
OH Hexyleneglycol,
Hexamethyleneglycol
2
257 Triethylaluminum C6H15Al (C
2
H
5
)
3
Al 2