semi合集-English.pdf - 第1441页
SEMI 30.1-0200 © SEMI 1998, 2000 16 Variab le Name Type Descripti on Level Class Forma t Comment multi-lot runs (ba tch). Clas sif ication RSV Classif ication code of an anom aly. A DVVA L A[1. .80] Coord2D CV The two-di…
SEMI 30.1-0200 © SEMI 1998, 200015
Table 4 Variable Item Dictionary
Variable Name Type Description Level Class Format Comment
ActiveLocation CV The current carrier location
that has substrates in the
executing state of the
processing state model.
ALL SV U2 Valid in all data
collection events as
defined in Table 3.
AlignList CV A list of alignment sites
information being used by
the current active process
program.
ALL DVVAL L,n
1. <AlignName>
:
n.
The order in which the
alignment name appears
in the list is important
and is equipment-
dependent.
AlignName CV Alignment name ALL DVVAL A[1..16] An item in the
AlignList variable.
AnomalyArea CV The area within the bounds
of an anomaly (in units of
micron
2
).
ALL DVVAL F4
Anomaly-Attributes CV Miscellaneous anomaly
information that is
equipment-dependent and
defined by the equipment
supplier.
ALL DVVAL L,n
1. <attribute
1
>
:
n. <attribute
n
>
Mainly used as part of
other anomaly-related
data (list) (i.e.,
AnomalySize).
Anomaly-Comment RSV Operator-generated
comment associated with
the anomaly.
A DVVAL A[1..80]
AnomalyData2D CV Coordinate data for an
anomaly.
A DVVAL L,5
1. <AnomalyID>
2. <CoordSys>
3. <Coord2D>
4. <Anomaly-
Attributes>
AnomalyID CV A unique anomaly
identifier.
A DVVAL A[1..16]
AnomalySize CV The X,Y extent of the
anomaly in microns. The
dimensions of the smallest
rectangle that contains the
anomaly whose sides are
parallel to the X and Y axis.
A DVVAL L,2
1. <XExtent>
2. <YExtent>
XExtent and YExtent
are of Format F4.
AnomalyTable-
Name
CV Name identifier of anomaly
table.
ALL SV A[1..80]
AnomalyTable-Type CV Type of anomaly table.
(See Section 11.)
ALL SV A[1..20] “TABLE-AREA-DEF”,
“TABLE-ALIGN-
DEF”, “TABLE-
ANOMALY-DEF”,
“TABLE-M21-
ANOMALY-DEF”
BatchID CV The batch identification of
the current material
inspected/reviewed.
ALL DVVAL A[1..16]
CarrierBuild CV ID of the CARRIERBLD
ISEM job that the
inspection/review data is
associated with.
ALL SV A[1..80] See Section 14.
CarrierID CV Physical identification of
the current material
inspected/reviewed.
ALL DVVAL A[1..16]
CarrierNumber CV Used to identify carriers in ALL DVVAL A[1..16]
SEMI 30.1-0200 © SEMI 1998, 2000 16
Variable Name Type Description Level Class Format Comment
multi-lot runs (batch).
Classification RSV Classification code of an
anomaly.
A DVVAL A[1..80]
Coord2D CV The two-dimensional
coordinate of an anomaly.
ALL DVVAL L,2
1. <CoordX>
2. <CoordY>
CoordSys CV The identification for a
coordinate system
definition. SEMI M20,
M20P, or SEMI M21.
ALL DVVAL A[1..16] “M20”
“M21”
“M20P”
CoordX CV The coordinate in the X
direction of a site (anomaly,
alignment site, or the lower
left-hand of an area or
element).
ALL DVVAL F4
CoordY CV The coordinate in the Y
direction of a site (anomaly,
alignment site, or the lower
left-hand of an area or
element).
ALL DVVAL F4
DefaultPriority CV The default priority given a
material location if none is
assigned.
ALL EC U2
DeltaX CV The X-axis translation of
M20P coordinate system
relative to the SEMI M20
coordinate system.
ALL DVVAL F4
DeltaY CV The Y-axis translation of
M20P coordinate system
relative to the SEMI M20
coordinate system.
ALL DVVAL F4
ElementID CV The SEMI M21 address for
a specific rectangular
element on a substrate.
ALL DVVAL I4[2] May refer to a field or
die.
ElementList CV A list of SEMI M21
elements where processing
can be attempted.
ALL DVVAL L,n
1. <ElementID>
:
n.
Fiducial CV The physical feature used to
associate a fiducial line
used for orientation (i.e.,
flat or notch on a substrate).
ALL DVVAL A[1..16] “FLAT”
“NOTCH”
GroupAnomaly-
Count
CV Anomaly count for the
current or last group (i.e.,
field or die inspected).
G DVVAL U2
GroupArea CV Square Area (microns
2
) of
the last group inspected.
G DVVAL F4
GroupComment RSV Operator-generated
comment associated with
the group.
G DVVAL A[1..80]
GroupID CV Inspection/review group
identification for the current
inspection/review.
ALL DVVAL U2
InspectionPPID CV Process program used on
the inspection/review tool
ALL DVVAL A[1..80]
SEMI 30.1-0200 © SEMI 1998, 200017
Variable Name Type Description Level Class Format Comment
for the current
inspection/review.
InspectionRunID CV Run identification in the
current inspection/review.
ALL DVVAL A[1..16]
LotID CV Lot identification of the
current material
inspected/reviewed.
ALL DVVAL A[1..16]
M20Data CV The silicon substrate size,
fiducial type, and
orientation to use.
ALL DVVAL L,3
1. <SubstrateSize
2. <Fiducial>
3. <Orientation>
M21Data CV The data necessary to
establish an ISEM SEMI
M21 layout on a substrate.
ALL DVVAL L,2
1. L,3
1. <M21XSize>
2. <M21YSize>
3. <Tile>
2. L,n
1. L,3
1. <ElementID>
2. <CoordX>
3. <CoordY>
:
n.
M21XSize CV The value of the SEMI M21
coordinate system in the X-
direction.
ALL DVVAL F4
M21YSize CV The value of the SEMI M21
coordinate system in the Y-
direction.
ALL DVVAL F4
Offset CV The distance of the actual or
found location of a site
relative to its defined or
expected location.
ALL DVVAL L[2] Refers to SiteDeltaX,
SiteDeltaY which are o
f
Format F4.
OperatorAction CV The action taken by the
operator on the equipment’s
operator I/O.
ALL DVVAL A[1..80]
OperatorComment CV Operator-generated
comment, not associated
with any reporting level.
ALL DVVAL A[1..80] (See also Run-
Comment, Substrate-
Comment, Area-
Comment,
RegionComment, Site-
Comment, and
AnomalyComment.)
OperatorID CV Identification of the
operator of the
inspection/review
equipment.
ALL DVVAL A[1..16] This information may
be added by the host in
the ISEM Tables. (See
Section 11.)
Orientation CV How the wafer is loaded on
the equipment.
ALL EC F4 “0” degrees indicates
that the wafer has the
primary fiducial
towards the operator.
ProcessBuild-
GroupID
CV Name of the current or last
process program executed.
ALL SV A[1..80] See Section 14.
ProcessEquipmentID CV Identification of the process
equipment used with the
ALL DVVAL A[1..16] This information may
be added by the host in