semi合集-English.pdf - 第742页
SEMI E100-1104 © SEMI 2000, 2004 5 d63 = 35 + 0.9 / -0.1 Figure 1 External Top View of 230 m m and 6 inch RSP Figure 2 Detail A: External Top View of Side Handling Flange Alignment Hole
SEMI E100-1104 © SEMI 2000, 2003 4
Table 1 Info Pad Assignments
Info Pad
RSP
Configuration
A B C D
230 mm reticle not
defined
not
defined
up down
6 inch reticle not
defined
not
defined
down down
to be assigned not
defined
not
defined
up up
to be assigned not
defined
not
defined
down up
6.12 Inner and Outer Radii — All required concave
features may have a radius of up to r65 to allow
cleaning and to prevent contaminant build-up. All
required convex features may also have a radius of up
to r66 to prevent small contact patches with large
stresses that might cause wear and particles. Note that
these limits on the radius of all required features are
specified as a maximum (not a minimum) to ensure that
the required features are not rounded off too much. The
lower bound on the radius is up to the carrier supplier.
Note also that this radius applies to every required
feature unless another radius is called out specifically.
Here a required feature is an area on the surface of the
carrier specified by a dimension (or intersections of
dimensions) that has a tolerance and not just a
maximum or minimum (such as the edges of the robotic
handling flange).
6.13 Carrier ID Exclusion Volume — Volume external
to the pod which must remain free from intrusion to
accommodate a carrier ID label or tag mounted on the
pod. No obstructions should exist in the carrier ID
exclusion volume as defined by x147, y137, y138, z180,
and z181. Figures 1 and 3 show dimensions for the
carrier ID exclusion volume. Table 2 defines the
dimensions for the carrier ID exclusion volume. If a
label is used, its surface must be at y139.
6.14 Conveyor Rails — Optional surfaces on the
bottom for transporting the RSP on roller conveyors.
The conveyor rail surfaces are bounded by x140, x141,
x142, y140, y141 and y142 as shown in Figure 9. The
height of the conveyor rail surface is defined by z171.
Table 2 defines the dimensions for the conveyor rails.
7 Related Documents
7.1 SEMI Standards
SEMI E15 — Specification for Tool Load Port
SEMI P1 — Specification for Hard Surface Photomask
Substrates
SEMI P33 — Provisional Specification for Develop-
mental 230 mm Square Hard Surface Photomask
Substrates
SEMI S8 — Safety Guidelines for Ergonomics
Engineering of Semiconductor Manufacturing
Equipment
SEMI E100-1104 © SEMI 2000, 2004 5
d63
= 35 + 0.9 / -0.1
Figure 1
External Top View of 230 mm and 6 inch RSP
Figure 2
Detail A: External Top View of Side Handling Flange Alignment Hole
SEMI E100-1104 © SEMI 2000, 2003 6
Figure 3
External Front View of 230 mm and 6 inch RSP
Figure 4
Section A-A: Internal Front View of 230 mm RSP
d63 =
35 + 0.9 / -0.1
Figure 5
Detail B: Top Robotic Handling Flange Hole Feature