semi合集-English.pdf - 第1457页

SEMI 30.1-0200 © SEMI 1998, 2000 32 Parameter Value CPName Desc ription Range Format pairs a s are supported by the equipme nt. ** “ELEME NTLIST” is req uired when using the SEM I M21 coordina te sy ste m in the definiti…

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SEMI 30.1-0200 © SEMI 1998, 200031
Parameter Value
CPName
Description Range Format
2. L,2
1. “PPNAME”
2. ProcessProgramID
3. L,2
1. “SLOTLIST”
2. L,n
1. SlotID
1
:
n.
Or
1. “SUBSTRATELIST”
2. L,n
1. SubstrateID
1
:
n.
4. L,2
1. “AUTOSTART”
2. AutoStart
5. L,2
1. “TABLE-AREA-DEF”
2. AreaTableName
6. L,2
1. “AREANAME”
2. L,n
1. AreaName
1
:
n.
7. L,2
1. “TABLE-ALIGN-DEF”
2. AlignTableName
8. L,2
1. “ALIGNNAME”
2. L,n
1. AlignName
1
:
n.
9. L,2
1. “ELEMENTLIST” **
2. L,n
1. ElementID
1
:
n.
10. L,2
1. CPNAME*
2. CEPVAL*
m. L,2
1. CPNAME*
2. CEPVAL*
NOTES: “PPBUILDID” and “PPNAME” are required.
“SLOTLIST”, “SUBSTRATELIST”, “AREALIST”, and
“ALIGNLIST” are optional.
* Supplier shall define as many of these CPNAME, CEPVAL
SEMI 30.1-0200 © SEMI 1998, 2000 32
Parameter Value
CPName
Description Range Format
pairs as are supported by the equipment.
** “ELEMENTLIST” is required when using the SEMI M21
coordinate system in the definition of an AlignName or
AreaName.
“PROCESS-BLD-
GROUP” (for Review
Equipment)
L,m
1. L,2
1. “PPBUILDID”
2. ProcessBuildGroupID
2. L,2
1. “PPNAME”
2. ProcessProgramID
3. L,2
1. “SLOTLIST”
2. L,n
1. SlotID
1
:
2. SlotID
n
Or
1. “SUBSTRATELIST”
2. L,n
1. SubstrateID
1
:
n. SubstrateID
n
4. L,2
1. “AUTOSTART”
2. AutoStart
5. L,2
1. “TABLE-ANOMALY-DEF”
2. AnomalyTableName
6. L,2
1. “ANOMALYNAME” or
“M21-ANOMALYNAME”
2. L,n
1. AnomalyID
1
or M21AnomalyID
1
:
n.
7. L,2
1. “ALIGN-TABLE-DEF”
2. AlignTableName
8. L,2
1. “ALIGNNAME”
2. L,n
1. AlignName
1
:
n.
9. L,2
1. “ELEMENTLIST”**
2. L,n
1. ElementID
1
:
n.
10. L,2
m ≥ 2
List of m
data items
SEMI 30.1-0200 © SEMI 1998, 200033
Parameter Value
CPName
Description Range Format
1. CPNAME*
2. CEPVAL*
m. L,2
1. CPNAME*
2. CEPVAL*
NOTES: “PPBUILDID” and “PPNAME” are required.
“SLOTLIST”, “SUBSTRATELIST”, “AREALIST”, and
“ALIGNLIST” are optional.
* Supplier shall define as many of these CPNAME, CEPVAL
pairs as are supported by the equipment.
** “ELEMENTLIST” is required when using the SEMI M21
coordinate system in the definition of an AlignName or
AreaName.
NOTE 1: Required ISEM parameters: “CARRIERID”, “LOCATIONID”, “PROCESS-BLD-GROUP”
13.2.3 Remote Commands vs. Processing States — The following table indicates states where the remote
commands are allowed. This is indicated with a “X” mark.
Table 10 Remote Commands vs. Processing States
COMMAND
PROCESSING STATE
STOP
START
RESUME
PP-UPDATE
PP-SELECT
PAUSE
NEXT-
M
ATERIAL
MAP-
CARRIER
PP-ASSIGN
CLEANUP
ABORT
P
P-UNASSIG
N
IDLE XXXX
ABORTED XX X
PROCESSING ACTIVE
STOPPING XX
ABORTING
PAUSE
ALARM PAUSED X X X
PROCESS PAUSE
PAUSING X X X
PAUSED X X X X X
CHECKING X X X
PROCESS
SETTING UP X X XX XX
READY X X X X X X
EXECUTING
LOAD X X X X
UNLOAD X X X X
WORKING
INSPECT X X X X X
ALIGN X XXXX
REVIEW X XXXX