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SEMI E133-0705 © SEMI 2004, 2005 18 9.3.5.2. 1.3 A list element of attribute Instru ctions with a value of “R2RUpdateModel”. 9.3.6 Outputs — The followi ng data types and data ty pe values are used i n R2R co ntrol outpu…
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# Description Req’d Comments
R2R.I.10.
Provide the optional PCS Analysis Engine method capabilities
The R2R Control Analysis Engine shall provide all or a subset of
the optional interface method capabilities as defined in this
standard. See ¶10.4.1.
N
Table 12 Additional R2R Control Functional Group Capabilities
# Description Req’d Comments
R2R.A.1.
Accept and utilize feedback data
The R2R Control Analysis Engine shall be able to accept
historical information about the target process control
environment, and advice adjustments for improving processing
based on this data; typical feedback data is post process
metrology information from previous process events on the target
process.
In the context of R2R control, feedback data is defined as data
that is utilized to improve capability for future process runs.
Y The controller must utilize feedback
information to maintain dynamic
models.
R2R.A.2.
Automatically configure internally for control of a target
process
The R2R Control Analysis Engine shall be able to request and/or
accept information about the specific process control environment
as necessary, and automatically configure to provide control of
the process. For example, the R2R Control Analysis Engine may
request and utilize experimental data to determine optimal
baseline control models for the target process.
C
#1
Item R2R.A.2 and/or R2R.A.3, required.
R2R.A.3.
Support manual configuration for control of a target process
The R2R Control Analysis Engine shall be able to request and/or
accept configuration information so that the Analysis Engine may
be configured by an external system to provide control of the
process.
C
#1
Item R2R.A.2 and/or R2R.A.3, required.
R2R.A.4.
Accept and utilize feedforward data
The R2R Control Analysis Engine shall be able to accept
information about current material to be processed and adjust
recommendations for improving processing based on this data.
In the context of R2R control, feedforward data is defined as data
that is utilized to improve capability for the current process run.
N
#1
C indicates “conditional” with the conditions specified in the Comment column.
9.3.4 R2R General Capability Description
9.3.4.1 A R2R module should accept the following inputs and outputs using the common interface structure
described in Figure 5. Not all inputs and outputs are required depending on the functionality needed by the R2R
model. For example, R2R function may only need feedback data in the form of Substrate Data.
9.3.5 Inputs—The following data types and data values are used in R2R control input messages:
9.3.5.1 The R2R Controller analysis engine inherits the input data structure and data structure requirements from
the PCS Analysis Engine.
9.3.5.2 The following data types and data type values shall be supported by a R2R control analysis engine when
included in an input data structure, where supported means that the AE will be able to utilize the information
provided by the data type and perform any indicated action associated with that data:
9.3.5.2.1 PCSAETarget Class
9.3.5.2.1.1 Attribute AEType with a value of “R2R”
9.3.5.2.1.2 A list element of attribute Instructions with a value of “R2RCalculateControlAdvice”
SEMI E133-0705 © SEMI 2004, 2005 18
9.3.5.2.1.3 A list element of attribute Instructions with a value of “R2RUpdateModel”.
9.3.6 Outputs — The following data types and data type values are used in R2R control output messages:
9.3.6.1 The R2R Controller analysis engine inherits the output data structure and data structure requirements from
the PCS Analysis Engine.
9.3.6.2 The following data types and data type values shall be supported by a R2R control analysis engine when
included in an output data structure, where supported means that the AE will be able to provide these data types and
values when behavioral conditions warrant, as indicated below.
9.3.6.2.1 DataCollection Class — The following DataItem Names or Name/Value pairs shall be supported for
DataItems in the specified BinCategory.
Table 13 Data Types Required to be Supported by an Input Message for an Analysis Engine
BinCategory DataItem Name Value Description Role
#1
Reqd Form
Calculated
Outputs
ControlAdvice N.A.
#2
A set of name-value pairs that constitute a control
advice. Context associated with the
AnalysisEngineDataSet Input may identify the system
to which the R2R control recipe advice parameters are
expected to be applied.
D Y any
#1
Where, in the Role column, ‘D’ indicates “data” and ‘C’ indicated “context”
#2
N.A. indicates “not applicable”, because specification is on DataItem as opposed to a specific value of DataItem.
9.3.6.2.2 ControlAdvice — This attribute contains the control advice, structured as an unordered list of name-value
pairs. The method in which the control advice is utilized is beyond the scope of this document.
9.4 Fault Detection Functional Group
9.4.1 This section defines the common capabilities of the FD functional group.
9.4.2 Table 11 describes the specialization for FD of each inherited general capability described in Table 5.
9.4.3 Table 12 describes the additional capabilities unique to the FD functional group.
Table 14 FD Functional Group Inherited Capabilities
# Description Req’d Comments
FD.I.1
Provide a Fault Detection capability as described in §5
The fault detection system shall analyze provided input data with
the purpose of detecting anomalies/faults.
Y Detailed inputs and outputs to be defined
in a future version of the standard.
However it is expected that the FD
engine will provide output sufficient to
analyze why the engine determined there
was a fault.
FD.I.2
Provide the required PCS Analysis Engine methods
The FD Analysis Engine shall provide the required interface
methods as defined in this standard.
Y Execute and Update.
FD.I.3
Provide the required PCS Analysis Engine method
capabilities
The FD Analysis Engine shall provide the required interface
method capabilities as defined in this standard. .
Y Log Data, Exception Handling, Get
Topic List, Subscribe to Topic, Get
Topic Data.
FD.I.4
Maintain models of selected process control system
environment(s)
The FD Analysis Engine shall maintain explicit or implicit
models of the selected process control environment. These
models shall be used to detect anomalies in the supplied data.
Y The specific form and behavior of these
models is beyond the scope of this
standard.
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# Description Req’d Comments
FD.I.5
Provide a mechanism to uniquely instruct the Analysis Engine
to perform an action
The FD Analysis Engine shall support an input mechanism
whereby the analysis engine can be instructed to take a specific
unique action.
Y The mechanism could be a single key
variable, e.g., model name or a complex
set of context data utilized internally to
perform context matching, etc. The
action could include application of a
specific model and generation of a FD
result.
FD.I.6
Interface with multiple external systems
FD Analysis Engine shall be capable of accepting inputs from, or
generating outputs to multiple external systems.
Y The definition of these systems will be a
function of the application environment;
these could include process tool or
metrology systems, or user interfaces.
FD.I.7
Basic Model Management
The FD Analysis Engine shall provide the capability to create/add
models, edit configuration of models, and delete models.
Y This capability will be supported through
the FD Analysis Engine interface.
FD.I.8.1
Interface with FC Analysis Engine
The FD Analysis Engine shall be capable of providing output that
can be used by a PCS-compliant FC Analysis Engine.
Y Output to FC is required. Other
interfaces are optional.
FD.I.8.2
Interface with other Analysis Engines
FD Analysis Engine shall be capable of either accepting outputs
from other Analysis Engines as inputs, or producing outputs that
are utilized by other Analysis Engines.
N E.g., using R2R outputs to distinguish
between controller changes and faults.
FD.I.9
Advanced Model Management
The FD Analysis Engine shall provide advanced model
management capabilities including but not limited to: secure
access to models, and automatic updating of models based on
process control environment changes.
N
FD.I.10
Provide the optional PCS Analysis Engine method capabilities
The FD Analysis Engine shall provide all or a subset of the
optional interface method capa
b
ilities as defined in this standard.
N
Table 15 Additional FD Functional Group Capabilities
# Description Req’d Comments
FD.A.1
Provide an interface for automatic notification of detected
faults
The FD Analysis Engine shall provide an interface to
automatically notify an external system when a fault is detected.
The interface must provide enough information about the detected
fault for the external system to make decisions about notification.
Y The external system may for example:
page or e-mail an engineer, or take the
tool in question off-line. Information
provided in the interface should include:
context, severity, and any fault details
(TBD in a future version of the
standard).
FD.A.2
Ability to test against reference/simulation data
The system should provide the ability to test and evaluate fault
detection models against historic, reference or simulated data
without affecting the production environment.
N This capability could be provided off-
line, i.e. as a capability that is available
in a mode when other required FD
capabilities are not necessarily available.
FD.A.3
Ability to interdict process/tool
The system should be capable of initiating the interdiction of a
process, either directly or indirectly, in a timely manner, in order
to prevent or prohibit the creation of out-of-spec material. This is
needed when the general event notification and/or interdiction
system(s) cannot respond fast enough to protect people, plant, or
product.
N NOTE: This would be in addition to the
capability defined in FD.I.1 above.