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SEMI S6-93 © SEMI 199 3 7 A P PENDIX 1 PROCESS EQUIPMENT EXHA US T REQUIREMENT SUMMA RY Page 1 of 2 Manufacturer Equipment Name Model Supplier Represen ta tive Date Demand Status Norm al Peak Other (Ex plai n) Doors, Hat…

SEMI S6-93 © SEMI 1993 6

8.3.12.6 in Chapter 9 of “Industrial Ventilation,” A

Manual of Recommended Practice, 20th Edition,

(Appendix 2, Reference 1). A companion reference is

Chapter 5 of HVAC Systems Testing, Adjusting, and

Balancing, (Appendix 2, Reference 3).

8.3.12.7 As with any test performed to establish or

verify specifications, the measuring instruments used

should be in good working condition and current

calibration.

8.3.12.8 If an air balancing contractor is used, it

should be certified by the Associated Air Balance

Council (AABC) or the National Environmental

Balancing Bureau (NEBB) as meeting their technical

standards for membership.

8.3.12.9 For additional information, see National

Standards for Field Measurement and Instrumentation -

Total System Balance, Volume Two, No. 12173,

(Appendix 2, Reference 6). Also see Procedural

Standards for Testing of Cleanrooms, (Appendix 2,

Reference 4).

8.3.13 The exhaust specification provided to the user

by the supplier should include design information on

the complete equipment exhaust system. A prototype

exhaust data worksheet is shown in Appendix 1. The

supplier should also provide:

8.3.13.1 A scaled drawing of the equipment exhaust

system showing all connections, dampers, monitoring

devices, etc.

8.3.13.2 A diagram of the exhaust connection with

critical dimensions, established set point, and the

location of the traverse point used to develop the

specifications.

8.3.13.3 Any special case exceptions.

8.3.13.4 A list of materials used in the construction of

the exhaust enclosure and materials for components of

the exhaust system.

8.3.14 The supplier should provide the user with a list

of constituents that could be expected in the exhaust

stream when the equipment and the users’ exhaust

system are operating within design specifications.

Information typically required is:

8.3.14.1 Percent by volume.

8.3.14.2 Percent by weight.

8.3.14.3 State of constituent (liquid, gas, or solid).

8.3.14.4 Temperature of the composite exhaust stream

under normal operations.

8.3.14.5 Information should be based on a continuous

twenty-four hour operation of the equipment.

(Extrapolation is generally acceptable if the method

used is well-documented and can be duplicated.)

SEMI S6-93 © SEMI 19937

APPENDIX 1

PROCESS EQUIPMENT EXHAUST REQUIREMENT SUMMARY

Page 1 of 2

Manufacturer

Equipment Name Model

Supplier Representative Date

Demand Status Normal Peak Other (Explain)

Doors, Hatches & Covers Closed % Open Removed

Chemical Location Chemical Contents Condition

1. ____________________ _____________________ ______Empty ______Full

2. ____________________ _____________________ ______Empty ______Full

3. ____________________ _____________________ ______Empty ______Full

4. ____________________ _____________________ ______Empty ______Full

5. ____________________ _____________________ ______Empty ______Full

6. ____________________ _____________________ ______Empty ______Full

Electrical Power ______On ______Off _______Disconnected

Equipment at Operating Temperature Yes ______No

Other Utilities On ______Off _______Disconnected

Process Material Positions ______Occupied ________Empty

Equipment Status at Time of Measurement

_______Up and at Idle _______Up and Ready to Start Cycle

_______Specific Point in the Process Cycle

(Explain)___________________________________________________________________________________

___________________________________________________________________________________________

_______Down for Installation/Modification _______Down for Cleaning

_______Down for Preventive Maintenance _______Down for Repair

PROCESS EQUIPMENT EXHAUST REQUIREMENT SUMMARY (continued)

Page 2 of 2

NOTE: Repeat this sheet for each exhaust connection to the machine.

Manufacturer

Equipment Name________________________________________________ Model

Demand Status __________________Normal ___________Peak ____________Other (Explain)__________

Duct Connection Identity

Connection Inside Diameter_____________________________________________centimeters (inches)

Connection Outside Diameter____________________________________________centimeters (inches)

*Priority Target Tolerance Stability

Flow Volume m/s (CFM) _______ ______ -0% +______% ±_______%

Flow Velocity m/s (FPM) _______ ______ -0% +______% ±_______%

Static Pressure _______ ______ -0% +______% ±_______%

pascals (inches of water)

Data Corrected to Sea Level ______Yes ______No

Data Corrected to Std Air Density ______Yes ______No

Exhaust Stream Temperature ______°C (°F) ______°C (°F) ______°C (°F)

Min Normal Max

Measurement Location

Altitude____________m (ft) ambient temperature____________°C (°F) Humidity

Chemical Make-up of Expected Effluent Stream

Element State % Concentration Volume Weight

___________ ________ ________________ ________ ______

___________ ________ ________________ ________

Exhaust Schematic Diagram Included _______Yes _______No

* Priority is the rank order importance (from one to four) of the indicated value in proper operation of the

equipment. The balance will adjust to priority one values at the expense of other values in this sheet.