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SEMI E127-0705 © SEMI 2003, 2005 41 Attribute Name Definition Access Reqd Form DataType Identifies the format of the value of the Data Row attribute DataItem i . RO Y Enumerated: binary Boolean text integer unsigned inte…

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SEMI E127-0705 © SEMI 2003, 2005 40
15.2 Data Row Template Object
15.2.1 The Data Row Template provides the organization of data within any Data Row of a given Data Table
Object.
15.2.2 Data Row Template Attributes are defined in Table 22.
Table 22 Data Row Template Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text. Complies with restrictions of ObjID in
SEMI E39.
ObjType Type of Object. RO Y Text = “DataRow_Template”.
DataInfoIDList Identifies the names of the individual
data in the order in which the data will
be transferred within a row when
exported.
RO Y Ordered list of 1+ text.
NumEntries Number of columns in table. RO Y Unsigned integer.
15.2.2.1 Data Information Object
15.2.2.1.1 A Data Information object describes the properties available for an individual DataItem
i
in a Data Row
for a table. The attributes of this object provide information about a kind of data item that can be reused for multiple
tables, so that the information does not need to be duplicated.
15.2.2.1.2 All DataItems in a specific position within a row (that is, all that fall in the same column of a table) have
the same set of properties. For example, a Data Information object for any cell in the column named “Xcoord” have
the same description, the same data type, the same units, and so forth.
15.2.2.1.3 Assurance data is designated to be a container for information known by the IMM that describes the
trustworthiness of the data itself. Since it is expected that the IMM Data will be used for decision making on the
process tool, it is important that the client has access to not only the data but any other information to tell the client
that the data is reliable. For Raw Data, examples of this might include actual voltages or laser power that is
delivered to a measurement sensor (different from the setpoint), signal-to-noise ratios, or other parameters. For
Result Data, examples might include goodness of fit for a model, confidence limit in a specific model parameter, or
other information that is generated by the IMM.
15.2.2.1.4 The attributes of the Data Information object are defined in Table 23.
Table 23 Data Information Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text. Corresponds to the name of the item of
data (the column header). Complies with
restrictions of ObjID in SEMI E39.
ObjType Type of Object. RO Y Text = “DataInformation”.
Assurance Information that describes the
trustworthiness or believability in data
generated.
RO N List of 0+ structures consisting of
AssuranceName
AssuranceDataType
AssuranceValue
AssuranceUnits
SEMI E127-0705 © SEMI 2003, 2005 41
Attribute Name Definition Access Reqd Form
DataType Identifies the format of the value of the
Data Row attribute DataItem
i
.
RO Y Enumerated:
binary
Boolean
text
integer
unsigned integer
floating point IEEE 754
array
list
structure
Description Describes the type of entry. RO N Text.
Interdependency
Rule
Describes interdepencies with other
entry types.
RO N Text.
Units Units of measurement. RO Y Enumerated.
Use Descibes how the entry type is used. RO N Text.
ValidityRule Describes the conditions, such as
boundaries, where the entry is valid.
RO N Text.
Table 24 Assurance Element Definitions
Element Name Description Form
AssuranceName The name of the assurance data used. Text.
AssuranceDataType Identifies the form of AssuranceValue. Enumerated:
binary
Boolean
text
integer
unsigned integer
floating point IEEE 754
array
list
structure
AssuranceValue The actual measured or calculated value. Per AssuranceDataType.
AssuranceUnits Identifies the units (if any). Enumerated text.
15.3 Master Data Table Objects
15.3.1 A Master Data Table Object is an empty table that provides a full set of Data Row Templates and Data
Information for all of the possible row items (the superset) that the IMM is capable of producing. The existence of
this table allows the client to obtain the description of data contained in Data Information beforehand. Actual row
contents, and related Data Information, for an actual IMM Data Table Object must be a subset of those provided by
the Master Data Table Object, and the order of data within a row may vary from table to table.
15.3.2 Exactly three Master Data Table Objects are required, one for each of the three types of tables. Their ObjIDs
shall be defined as “RawDataMaster”, “ConvertedDataMaster”, and “CalibratedDataMaster”.
15.3.3 A scenario for obtaining Row Templates and Data Information from a Master Data Table Object is provided
in Related Information.
15.3.4 Provision of Master Data Table Objects is an optional capability. In some implementations, due to the
possible variation of Data Information attributes (for example, the Units attribute) and their dependence on recipes,
it would be difficult to implement without having a specific recipe.
SEMI E127-0705 © SEMI 2003, 2005 42
16 Requirements for Objects Defined in Other Standards
16.1 Substrate Object
16.1.1 SEMI E90 defines a generic set of substrate attributes needed for basic manufacturing and substrate tracking.
The integration of measurement into a process tool requires additional information be available, both to the IMM
itself when a substrate is received and to advanced process control systems that depend on the measurement results.
16.1.2 Substrate Attributes
16.1.2.1 Table 25 defines the additional substrate attributes required by this standard. By providing them with the
substrate, they are available as context information for the IMM measurement tables defined below.
Table 25 Additional Substrate Attribute Definitions
Attribute Name Definition Access Reqd Form
ProcessFlowStep Identifies exposure-level step in product
fabrication process.
RW Y User-supplied text.
OrientationIn Shows the orientation of the substrate as
loaded.
RO Y Floating point, in radians.
OrientationOut Shows the orientation of the substrate as
unloaded.
RO Y Floating point, in radians.
ProcessToolID Name of last process tool or ObjID of
last tool process module.
RW Y User-supplied text. Shall conform to SEMI E39
restrictions on ObjID.
ProcessRecipeID Name of recipe used in last process step. RW Y User-supplied text.
SubstSide Indicates the side of the substrate
measured, as determined by the
measurement recipe.
RO Y Enumerated:
Front
Back
Both
Unknown
16.2 Process Job Management
16.2.1 Requirements
16.2.1.1 The IMM shall be able to receive a Process Job Create request specifying a recipe, variable parameters,
and list of one or more substrates, and it shall either accept or reject the request.
16.2.1.2 A Process Job Create request may be rejected if another Process Job still is active, or if there is an error in
the request message.
16.2.1.3 A Process Job in the PROCESSING state shall transition to PROCESS COMPLETE when it has
completed all measurement activities and stored the raw data. Upon this transition, the substrate may be removed
from the IMM, and all IMM Raw Data objects generated are ready for use. The conversion of data may still be in
process at this point.
17 Event and Exception Management
17.1.1 All data is defined either as the attributes of an object or as the attributes of an event. Data that must be
available at the time of an associated event is defined for each type of object. The data provided with an event or
alarm report shall be the new value that results from the event.
18 Message Service Definitions
18.1 List of Services
18.1.1 This section defines the content of service messages specified in this document and details the parameters for
each message. Table 26 provides an alphabetical list of all services specified in this standard. Services marked with
a Y in the column labeled “Control” shall be rejected if received from a Data Client.