semi合集-English.pdf - 第1138页

SEMI E5-1104 © SEMI 1982, 2004 80 Stream,Function Name (Mnemonic) Direction S2,F44 Reset Spooling Acknowledge (RSA) M,H< -E Description Acknowledge or error Structure L,2 1. <RSPACK> (accept or reject) 2. L,m (m…

100%1 / 7923
SEMI E5-1104 © SEMI 1982, 2004 79
Stream,Function Name (Mnemonic) Direction
S2,F43 Reset Spooling Streams and Functions (RSSF) S,H->E,reply
Description
This message allows the host to select specific streams and functions to be spooled whenever spooling is active.
Structure
L,m
1. L,2
1. <STRID
1
>
2. L,n
1. <FCNID
1
>
.
.
n. <FCNID
n
>
.
.
m. L,2
1. <STRID
m
>
2. L,n
1. <FCNID
1
>
.
.
n. <FCNID
n
>
Exception
1. A zero-length list, m = 0, turns off spooling for all streams and functions.
2. A zero-length list, n = 0, turns on spooling for all functions for the associated stream.
Notes:
1. Turning off spooling for all functions for a specific stream is achieved by omitting reference to the stream from this message.
2. Spooling for Stream 1 is not allowed.
3. Equipment must allow host to spool all primary messages for a stream (except Stream 1).
4. A defined list of functions for a stream in this message will replace any previously selected functions.
SEMI E5-1104 © SEMI 1982, 2004 80
Stream,Function Name (Mnemonic) Direction
S2,F44 Reset Spooling Acknowledge (RSA) M,H<-E
Description
Acknowledge or error
Structure
L,2
1. <RSPACK> (accept or reject)
2. L,m (m = number of streams with errors)
1. L,3
1. <STRID
1
>
2. <STRACK
1
> (error in stream)
3. L,n (n = number of functions in error)
1. <FCNID
1
>
.
.
n. <FCNID
n
>
.
.
m. L,3
1. <STRID
m
>
2. <STRACK
m
> (error in stream)
3. L,n (n = number of functions in error)
1. <FCNID
1
>
.
.
n. <FCNID
n
>
Exception
1. If RSPACK = 0, a zero-length list, m = 0, is given, indicating no streams or functions in error.
2. A zero-length list, n = 0, indicates no functions in error for specified stream.
SEMI E5-1104 © SEMI 1982, 2004 81
Stream,Function Name (Mnemonic) Direction
S2,F45 Define Variable Limit Attributes (DVLA) M,H->E,reply
Description
Structure
L,2
1. <DATAID>
2. L,m (m = # of variables in this definition)
1. L,2
1. <VID
1
>
2. L,n (n = # of limits being defined/changed for VID
1
)
1. L,2
1. <LIMITID
1
>
2. L,p (p = {0,2})
1. <UPPERDB
1
>
2. <LOWERDB
1
>
.
.
n. L,2
1. <LIMITID
n
>
2. L,p (p = {0,2})
1. <UPPERDB
n
>
2. <LOWERDB
n
>
.
.
m.L,2
1. <VID
m
>
2. L,n (n = # of limits being defined/changed for VID
m
)
1. L,2
1. <LIMITID
1
>
2. L,p (p = {0,2})
1. <UPPERDB
1
>
2. <LOWERDB
1
>
.
.
n. L,2
1. <LIMITID
n
>
2. L,p (p = {0,2})
1. <UPPERDB
n
>
2. <LOWERDB
n
>
Exception
1. A zero-length list, m = 0, sets all limit values for all monitored VIDs to “undefined.”
2. A zero-length list, n = 0, sets all limits values for that VID to “undefined.”
3. A zero-length list, p = 0, sets that limit to “undefined.”