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SEMI E40-0705 © SEMI 1995, 2005 21 10.4.2 PRJobCreateEnh Table 8 PRJobCre ateEnh Service De tail Parameter Req/Ind Rsp/Cnf Comment PRJobID M M User supplied Job ID. Must be unique among jobs known by the processing resou…

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SEMI E40-0705 © SEMI 1995, 2005 20
Parameter Name Definition Form: Possible Values
PRStatus Reports the acceptance or rejection of a requested operation. Structure composed of:
PRAck
(List of) Status
RecID Identifier of the recipe applied. Text:
Unique with respect to the processing agent.
RecipeVariable Variables supporting a recipe method. Structure composed of:
RecipeVarName
RecipeVarValue
RecipeVarName The name of the recipe variable. Text:
Depends on recipe
RecipeVarValue Value of the recipe variable. Depends on variable
Status Reports any errors found. Structure composed of:
ErrorCode
ErrorText
Timestamp Event date and time. Text:
yyyymmddhhmmsscc
10.4 Service Detail — The tables below define the parameters for each service. In some cases, parameters have
additional detail which is defined in the parameter definition section.
10.4.1 PRJobCreate
Table 7 PRJobCreate Service Detail
PRJobCreate Service Detail Section
Parameter Req/Ind Rsp/Cnf Comment
PRJobID - M The processing agent assigns the unique identifier which is used in all
subsequent process job communications.
PRMtlType M -
(List of) PRMtlName M - All material shall be of the same material type. This is an ordered list and
indicates the order in which the process job should process the material, if
it is single wafer processing equipment.
PRRecipe M -
PRProcessStart M - Indicates auto or manual start.
PRStatus - M
PRRecipe Parameter Detail Section
PRRecipeMethod M -
RecID M - The process job recipe identifier shall be unique within the domain of the
processing agent.
(List of) Recipe Variable C - Parameters required depend on the recipe method selected.
PRStatus Parameter Detail Section
PRAck - M Indication of acceptance to perform the job.
(List of) Status - C Error information, required if PRAck is unsuccessful.
SEMI E40-0705 © SEMI 1995, 2005 21
10.4.2 PRJobCreateEnh
Table 8 PRJobCreateEnh Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobID M M User supplied Job ID. Must be unique among jobs known by the processing
resource or else the resource shall reject the create request.
PRMtlType M - May be NULL when no material is processed.
(List of)
PRMtlName
M - An ordered list that associates a set materials with process conditions (process
programs or recipes).
PRRecipe M - This is a structure.
PRProcessStart M - Indicates auto or manual start.
PRPauseEvent M - If null, then processing will not be automatically paused.
PRStatus - M Indicates success or failure.
10.4.3 PRJobMultiCreate — This service creates multiple process jobs. Each job can be created uniquely.
Table 9 PRJobMultiCreate Service Detail
Parameter Req/Ind Rsp/Cnf Comment
(List of)
PRJobMultiSpec
M C An ordered list of job specifications as follows:
(list of)
Structure:
PRJobID
PRMtlType
(List of) PRMtlName
PRRecipe
PRProcessStart
PRPauseEvent
(list of) PRJobID - M Shall be returned for process jobs specified in the request service
that the equipment created.
PRStatus - M Indicates success or failure.
10.4.4 PRJobDequeue — Remove one or more jobs from the queue. PRStatus shall indicate any jobs which could
not be removed because they either did not exist or were in the PR JOB ACTIVE state.
Table 10 PRJobDequeue Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobList M M (List of) PRJobID
In the request, PRJobList specifies the jobs to be removed. In the reply,
PRJobList indicates the jobs successfully removed.
PRStatus - M Indicates success or failure.
10.4.5 PRJobCommand — All of the process job commands described in Section 8.2.3 are communicated using the
PRJobCommand service. The commands are Abort, Stop, Cancel, Pause, Resume, and Start Process. This standard
does not specify any required parameters. Abort is the only command which is required to be supported.
Table 11 PRJobCommand Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobID M - Identifies the process job on which to perform the command.
PRCmdName M -
(List of) CmdParameter C - Dependent on the command selected.
SEMI E40-0705 © SEMI 1995, 2005 22
Parameter Req/Ind Rsp/Cnf Comment
PRStatus - M
10.4.6 PRJobAlert — Notification of process job milestones achieved by the processing resource are communicated
using the PRJobAlert service. Process job milestones, which are described in ¶8.2.1, are events which are important
to the control and tracking of the process job. The milestones required to be supported are PR Job Setup, PR Job
Processing, PR Job Processing Complete, and PR Job Complete. An additional milestone, PR Job Waiting for Start,
is used with the manual start option.
Table 12 PRJobAlert Service Detail
Parameter Req/Ind Comment
Timestamp M
PRJobID M Identifies the process job on which the milestone has been reached.
PRJobMilestone M
PRStatus M
10.4.7 PRJobEvent — Process job informational event notification, which is described in ¶8.2.2, is communicated
using the PRJobEvent service. These are defined for Waiting for Material and Process Job State Change events.
Support for informational events is not required.
Table 13 PRJobEvent Service Detail
Parameter Req/Ind Comment
PREventID M
Timestamp M
PRJobID M Identifies the process job which generated the event.
PREventData C
10.4.8 PRJobSetRecipeVariable — Sends a request to change the settings for a list of recipe variable parameters.
Implementation of this service is optional.
Table 14 PRJobSetRecipeVariable Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobID M -
RecVariableList M - (list of)
RecipeVariable
PRStatus - M Indicates success or failure. Failure is if a variable can’t be set. A
List of variables which could not be set is returned in the status.
10.4.9 PRJobSetStartMethod — Sends a request to change the start method for job(s). This request will fail if a
specified job is not in the QUEUED/POOLED state. Implementation of this service is optional.
Table 15 PRJobSetStartMethod Service Detail
Parameter Req/Ind Rsp/Cnf Comment
PRJobList M - (List of) PRJobID
PRProcessStart M - Indicates auto or manual start.
PRStatus - M Indicates success or failure.