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SEMI E32-0997 © SEMI 1994 , 1997 5 Standardized ob j ects are su pported by an att ribute defin i tion tabl e with the f ollo wing col umn heading s: Attribute Name Definition Access Reqd Form The formal te xt name o f t…
SEMI E32-0997 © SEMI 1994, 1997 4
The subject of alarm reporting is not covered in this
document. While material movement-related alarm
situations will exist, the definition of the mechanism for
reporting such alarms is left to other standards
documents.
This standard presents a solution from the concepts and
behavior down to the messaging services. It does not
define the messaging protocol.
A messaging service includes the identification that a
message shall be exchanged and definition of the data
contained within that message. It does not include
information on the structure of the message, how the
data is represented within the message, or how the
message is exchanged. This additional information is
contained with the message protocol.
The defined services may be applied to multiple
protocols. Information on the mapping of material
movement services to specific protocols (e.g., SECS-II)
are added as adjunct standards.
1.3 References — The following SEMI standards are
related to the Material Movement standard:
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E23 — Specification for Cassette Transfer
Parallel I/O Interface
SEMI E30 — Generic Model for Communications and
Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts,
Behavior, and Services
Other References:
ISO/TR 8509:1987, Information Processing Systems,
Open Systems Interconnection — Service Conventions
Harel, D., “Statecharts: A Visual Formalism for
Complex Systems,” Science of Computer Programming
8 (1987) 231–274
1
1.4 Conventions
1.4.1 State Models
Definition of behavior of systems or subsystems is
based upon state models using the Harel notation. A
discussion of this notation is available in the article by
David Harel referenced above.
The Harel notation does not include the concept of
“creation” and “deletion” of state models to represent
transient entities. The “transfer job” described in this
document is such an entity, where each new transfer job
1 A brief tutorial on the Harel Statechart Notation is provided as
Application Note A.5 of the SEMI E30 (GEM) standard.
created uses a copy of the same state model. In this
document, the use of an oval is used to denote the
creation of an entity and also the deletion of that entity.
Transition tables are provided in conjunction with the
state diagrams to describe explicitly the nature of each
state transition. A transition contains columns for
Transition #, Current State, Trigger, New State,
Action(s), and Comment. The “trigger” (column 3) for
the transition occurs while in the “current” state. The
“actions” (column 5) include a combination of (1)
actions taken upon exit of the current state, (2) actions
taken upon entry of the new state, and (3) actions taken
which are most closely associated with the transition.
No differentiation is made.
1.4.2 Object Services — SEMI E39 Object Services
Standard (OSS) requires that standardized objects be
subtypes of the Top Object, that their attributes be
defined in a table format and include specification of
the value for object type, and that the objects support
the GetAttr and SetAttr services. See SEMI E39 for
details.
SEMI E32-0997 © SEMI 1994, 19975
Standardized objects are supported by an attribute definition table with the following column headings:
Attribute Name Definition Access Reqd Form
The formal text name of
the attribute.
Description of the information contained. RO or RW Y or N Any valid form.
(See below.)
Access — RO (Read Only) or RW (Read and Write) to
indicate the access that users of the service have to the
attribute.
Reqd — A “Y” or “N” in the Required (Reqt) column
indicates if this attribute must be supported in order to
meet fundamental compliance for the service.
Form — Indicates the format of the attribute. (See
Section 4.5.2 for definitions.)
2 Definitions
The following definitions are arranged in alphabetical
order. Some are defined using terms defined elsewhere
within this section. Please reference such definitions as
needed. No references beyond this section should be
necessary for a basic understanding of these terms.
Active Transfer Partner — (Opposite of Passive
Transfer Partner) A transfer partner is considered active
when it physically participates in the micro level
portion of the transfer, either by moving the transfer
object or by moving impediments within the transfer
envelope (e.g., doors, clamps). This term refers to the
micro level transfer phase only, and not to any setup
activities prior to the transfer (e.g., a port door may be
opened during setup phase by passive partner).
Atomic Transfer — The basic unit of movement. The
transfer of a single transfer object from Equipment A
directly to Equipment B where only one change in
ownership occurs.
Compound Transfer — Combination of two or more
atomic transfers executed sequentially or concurrently
to achieve a single goal (e.g., exchange carriers or move
a carrier between process machines using a transfer
agent).
Dynamic Port — (Opposite of Static Port) A port with
associated mechanisms capable of assisting with the
physical movement of a transfer object or of interfering
with the transfer of an object during the transfer. Such
mechanisms may include doors, elevators, and robot
arms. A transfer partner using a dynamic port for the
transfer may be active or passive as required.
NOTE 1: The concepts of “dynamic” and “static” are
associated with a port rather than equipment, as equipment
may have both dynamic and static ports.
Equipment — Mechanical entity in the factory which
plays a role in the manufacturing process. The
equipment referenced in this document include
machines used for processing, transport, and/or storage
of material (see definition of material).
Host — In the context of material movement, the host
is an entity, generally separate from either transfer
partner, which coordinates and supervises a transfer
job.
Interactive Transfer — A transfer in which both
partners are active and must interact in the performance
of the transfer.
Interfering — A dynamic port is interfering when any
of its associated mechanisms are positioned where they
are capable of physically obstructing the transfer.
Macro Level — Level of material movement that
involves coordination by the host but may not require
knowledge of the physical process used to accomplish
the material transfer.
Material — A term used interchangeably with “transfer
object” to refer to discrete objects which may be
transferred to and from equipment. This may include
product, carriers, reusable fixtures, etc. See transfer
object definition.
Material Location — A physical position on a piece of
equipment at which a transfer object may reside. Many
material locations may be accessed directly through a
port, but this is not a requirement. Some material
locations internal to the equipment may not be
accessible by a transfer agent.
Message Service/Service — A service (or a message
service) represents a set of functions offered to a user
by a provider. An unconfirmed service consists of a
sequence of service primitives — the request from the
sender to the communications facility and an indication
to the receiver from the communications facility. Each
of these service primitives is described by a list of
parameters. A confirmed service adds a response to the
initial request. The primitives for a response are called
the response and the confirmation. A service excludes
definition of message structure and protocol.
Micro Level — Level of material movement
characterized by peer-to-peer interaction of the transfer
partners to achieve synchronization of the detailed
mechanical steps of material transfer.
SEMI E32-0997 © SEMI 1994, 1997 6
Object — Webster's defines an object as “something
perceptible.” In the software world, an object is a
combination of attributes and behavior. It may refer to
something concrete, such as a transfer object, or to a
concept, such as a transfer job.
Ownership — An equipment is said to “own” a transfer
object from the time the object is transferred into one of
its ports until it is transferred out of the equipment. This
indicates that the equipment has physical control of the
transfer object.
Passive Transfer — A transfer that involves one active
and one passive partner. During a passive transfer, the
active partner retains control of the transfer envelope
during the entire physical transfer.
Passive Transfer Partner — (Opposite of Active
Transfer Partner) A transfer partner is considered
passive when it takes no part in the physical micro level
transfer, moving nothing within the transfer envelope.
This term refers to the physical micro level transfer
phase only. Setup activities prior to the transfer may be
performed by a Passive Transfer Partner (e.g., a port
door may be opened during setup phase).
Port — A point on the equipment at which a change of
equipment ownership of a transfer object occurs. A port
is not itself a material location, but shall have an
associated location. A port may be thought of as an
access point to an a material location on an equipment.
The definition of the term port includes any dedicated
mechanisms that either prepare for, facilitate, or are
capable of interfering with the transfer. All equipment
shall have a minimum of one port.
NOTE 2: While they are of use to the host system, the
commonly used designations “Input Port” and “Output Port”
are irrelevant in the context of this document. They are based
on a flow of material through an equipment rather than the
movement of transfer objects (which may be carriers rather
than the material itself). Transfer objects may have to be
moved into and out of both these types of ports.
Receiving Port — For a specific transfer, the port into
which a transfer object is to be placed.
Sending Port — For a specific transfer, the port from
which a transfer object is to be removed.
Static Port — (Opposite of Dynamic Port) A port with
no associated mechanisms capable of assisting or
interfering with the transfer of an object. A transfer
partner utilizing a static port for the transfer shall
always be passive.
Transfer Agent — An equipment specialized to the
transport of material from one equipment (or storage
area) to another.
Transfer Envelope — The three-dimensional space
occupied during the transfer by the transfer object and
all associated transfer mechanisms of both transfer
partners. This defines the space in which transfer
activity occurs and in which the potential for physical
interference with the transfer exists.
Transfer Job — The set of atomic transfers
constructed by the host to accomplish a cohesive
material movement objective. See the section on
compound transfers below.
Transfer Object — A physical object that is
transferred to and from equipment, such as a product
material, an empty carrier, or a carrier containing
material to be processed. Tools (e.g., stepper reticles)
and expendable materials also may be transfer objects.
The term “material” is used interchangeably with
“transfer object.”
Transfer Partners — In a given atomic transfer, the
equipment sending a transfer object and the equipment
receiving the transfer object are transfer partners.
Transfer Specification — The list of data provided by
the host to define an atomic transfer.
Transfer System Controller — Entity that is responsible
for management of multiple transfer agents. The
transfer system controller presents a single
communications interface to its host representing these
multiple agents.
3 Overview
Material movement is concerned with the transfer of
objects (WIP, tools, expendable materials, etc.) among
process equipment, buffers, and storage facilities. These
objects may optionally be contained (singly or in mass)
within a carrier. Empty carriers may also be considered
objects.
Material movement may include several different types
of entities. These are divided into two classes: Host and
Equipment. The host is the supervising entity which
organizes the transfer and gives the appropriated
instructions to each equipment involved. An equipment
physically participates in the transfer, either sending or
receiving material. The class of equipment may be
divided into three types:
Process Equipment — Equipment which performs
value-added operations on the factories’ products. This
includes those equipment which physically changes the
product and those which measure/test the product.
Transfer Agent — A type of equipment specialized to
the movement of transfer objects from place to place
within a factory. Transfer agents themselves may be of
different types and with widely-differing