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SEMI S13-0305 © SEMI 1998, 2005 3 5 Terminology NOTE 3: Terminology defined in SEMI S1, SEMI S2, SEMI S6, SEMI S8, SEMI S10, SEMI S12, SEMI S 14 and SEMI S16 is incorporated herein by referen c e. 5.1 Definitions 5.1.1 c…
SEMI S13-0305 © SEMI 1998, 2005 2
NOTE 1: This document contains several Related Information sections that restate documentation criteria that appear in other
SEMI documents. These restatements were current as of the dates that the Related Information sections were written and are
included for the convenience of the users of this document. As the other SEMI documents may be changed at any time, the users
of this document must refer to the other SEMI documents for the official versions of these criteria.
NOTE 2: This document contains several Related Information sections that include proposed subject-specific documentation
criteria developed by the SEMI S13 Revision TF. It was the intent of the Task Force responsible for SEMI S13 that the criteria
in these Related Information sections be incorporated in future revisions of the documents to which they pertain and that these
Related Information sections be removed from SEMI S13 by revising SEMI S13 with the same effective date as the effective date
of the addition of these criteria to the documents to which they pertain.
NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the
responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 Evaluation reports are not within the scope of SEMI S13.
3.2 SEMI S13 does not address physical characteristics of documents.
4 Referenced Standards
4.1 SEMI Standards
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S6 — Safety Guideline for Ventilation
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S12 — Guideline for Equipment Decontamination
SEMI S14 — Safety Guideline for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing
Equipment
SEMI S16 — Environmental, Health and Safety Guidelines for Semiconductor Manufacturing Equipment Disposal
4.2 ANSI Standard
1
ANSI Z400.1 — American National Standard for Hazardous Industrial Chemicals - Material Safety Data Sheets -
Preparation
4.3 Other Standards
International Labor Convention No. 170
2
— Convention Concerning Safety in the Use of Chemicals at Work
EN1050
3
Safety of Machinery — Principles for risk assessment
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
1 American National Standards Institute, Headquarters: 1819 L Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020; Fax:
202.293.9287, New York Office: 11 West 42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900; Fax: 212.398.0023,
www.ansi.org
2 International Labour Organization, 4, route des Morillons CH-1211 Geneva 22 Switzerland, Tel: +41.22.799.6111 , Fax: +41.22.798.8685,
http://www.ilo.org/
3 European Committee for Standardization(CEN) 36 rue de Stassart, B - 1050 Brussels, Tel: + 32 2 550 08 11, Fax: + 32 2 550 08 19,
http://www.cenorm.be/cenorm/index.htm; European Committee for Electrical Standardization(CENELEC), 35, Rue de Stassartstraat, B-1050
Brussels, Belgium, Phone: +32 2 519 68 71, Fax: +32 2 519 69 19, http://www.cenelec.org/Cenelec/Homepage.htm
SEMI S13-0305 © SEMI 1998, 2005 3
5 Terminology
NOTE 3: Terminology defined in SEMI S1, SEMI S2, SEMI S6, SEMI S8, SEMI S10, SEMI S12, SEMI S14 and SEMI S16 is
incorporated herein by reference.
5.1 Definitions
5.1.1 consumable parts — parts which are recognized by the equipment supplier as having a useful lifetime which
is expected to be significantly less than the lifetime of the equipment.
NOTE 4: Consumable parts include some parts that degrade gradually (such as o-rings) and some that degrade suddenly (such as
drive belts).
5.1.2 decommissioning — the process of removing equipment from service for disposition by sale, storage, or
disposal.
5.1.3 documents provided to the equipment user — documents provided by the equipment supplier, such as
operation manual, maintenance manual, installation manual, safety manual, or OEM manual, which are intended for
use with equipment.
NOTE 5: Additional safety features provided in the equipment according to the equipment user’s requisition or request may be
described separately. Documents concerning the additional safety features may be provided with the documents provided to the
equipment user as a separate attachment.
5.1.4 evaluation report — a report describing the results of an evaluation to determine the conformance of
equipment to a SEMI document.
5.1.5 supporting device — a device which is prepared to assist in the use of equipment.
5.1.6 unjamming — service task used to loosen automated material handler from entanglement.
6 General Criteria of Documents Provided to the Equipment User
6.1 The EHS information needed to perform a task should either be included in the document provided to the user
that describes how to perform a task or be provided separately in another document. In latter case, the document
provided to the user describing the task should identify where to find EHS information relevant to the task.
6.2 Documents provided to the equipment user should provide specific instructions to enable safe installation,
operation, maintenance, decontamination and decommissioning of the equipment.
EXCEPTION: Any procedure that is to be performed only by the equipment supplier’s personnel does not need to
be described in the documentation provided to the equipment user.
NOTE 6: A service manual may be included in the documents provided by the equipment supplier based on the contract.
6.2.1 The documents provided to the equipment user should describe the hazards inherent in equipment, warn of the
potential of exposure to hazards, and provide information as to how to minimize risk.
6.3 The equipment supplier should identify, within the documents provided to the equipment user, the intended
audience for each equipment document supplied to the user.
6.4 The equipment supplier should provide, in the documents provided to the equipment user, at least the EHS
information related to items in the following list. Other SEMI “S” series documents address these subjects for
inclusion in documents provided to the equipment user.
Safety interlocks
Emergency shutdown
Ergonomics
Seismic performance
Environmental performance
Industrial Hygiene
Fire Protection
SEMI S13-0305 © SEMI 1998, 2005 4
Decontamination and decommissioning
NOTE 7: Some documentation criteria regarding Safety interlock systems are given in Appendix 1 of this guideline at the time
of publication.
6.5 Where contractually agreed upon, it is recommended that the documents provided to the equipment user should
be provided in the primary languages of the location in which the equipment is to be used.
NOTE 8: Where required by law, the documents provided to the equipment user must be provided in the primary languages of
the location in which the equipment is to be used.
6.6 Each document should identify the language(s) in which it was originally written.
6.7 Procedures needed to maintain the effectiveness of safety design features or devices should be described in the
documents provided to the equipment user.
6.8 The documentation provided to the user may state that the user is responsible for analyzing and controlling the
risks of work not described in the documentation.
6.9 The Equipment supplier should provide information in the documents provided to the equipment user about
how to check if the documents are applicable for the particular model.
6.9.1 Each document provided to the equipment user (e.g., operations, maintenance, installation, drawings, sub-
systems) should include at least a reference to a list of all documents that are necessary to compose a complete set of
documents for the equipment model. Reference may be made to a website containing the list.
7 Hazards Inherent in Equipment
7.1 The hazards inherent in equipment identified as part of the SEMI S2 evaluation should be described in the
documents provided to the equipment user.
7.2 The summary should include the location and the type of each hazard in a safety section of the documents
provided to the equipment user.
7.3 The documents provided to the equipment user should include a list of hazardous materials (e.g., lubricants,
cleaners, and coolants) required for maintenance, ancillary equipment or peripheral operations.
NOTE 9: See §11 for discussion of MSDSs.
7.4 Hazards related to by-products and effluents of supplier-characterized baseline processes should be described in
the documents provided to the equipment user.
7.5 The documents provided to the equipment user should describe the safety measures in the equipment that
mitigate risk in the event of fire, explosion or chemical leakage within the equipment or of earthquake.
8 Hazardous Energy Control Procedures
8.1 Any source of hazardous energy (such as electrical, chemical, thermal, mechanical, radiation, pneumatic or
hydraulic energy) that exists in equipment and which may pose a risk to workers maintaining or servicing the
equipment should be described in the documents provided to the equipment user along with the procedures for
isolation (“lockout/tagout”) and control of each of the hazardous energies.
NOTE 10: The procedures must allow compliance with requirements at the locations of use. In the USA, the procedure must be
consistent with 29 CFR1910.147.
9 Hazard Alerts
9.1 The equipment supplier should explain, in the documents provided to the equipment user, the meaning of
hazard alerts. Examples of hazard alerts include: visual alerts, auditory alarms, safety labels, status indicators; or
hazard alert systems integral with the equipment’s operating system (e.g., displayed through the video display).
9.2 Descriptions of the label locations and, if appropriate, additional safety information relating to the hazards they
describe should also be provided.
9.3 Pictographs or symbols may be used to represent the hazard alerts in the document provided to the equipment
user.