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SEMI T6-0697 © SEMI 1997, 2004 1 SEMI T6-0697 (Reapproved 1104) PROCEDURE AND FO RMAT FOR REPORTING OF TEST RESULTS BY ELECTRONIC DATA INTERCHANGE (EDI) This procedure was techn ically approved by the Global Trace abilit…

SEMI T5-96 © SEMI 1996, 2004 10

RELATED INFORMATION 1

NOTICE: This related information is not an official part of SEMI T5. This related information was approved for

publication by full letter ballot procedures.

R1-1 Considerations for Reliable Automatic

Reading of the Marking

R1-1.1 The following suggestions are offered to assist

in assuring the most reliable automatic reading of the

alphanumeric marking.

R1-1.2 Character Stroke Thickness — If a 5 × 9 dot

matrix is chosen for marking, it is recommended that

the minimum dot size be 0.100 mm. Double or higher

density dot matrix is recommended; when used, smaller

dot diameters may be employed. Stroke thickness

should be constant withing 20% over the entire

character set so that the reader settings may be

optimized for the specific wafer run.

R1-1.3 Contrast — The character should have

sufficient contrast to be legible. Contrast may be

affected by depth and other conditions.

R1-1.4 Clear Zone — It is recommended that the area

immediately beneath and a minimum of 0.500 mm

around the marking characters be of uniform

reflectivity and free of any lithography and process

overlay edges.

R1-2 Considerations for the Use of Front

Surface Markings

R1-2.1 Marks can impinge upon areas where devices

may be printed. Since mask geometries are varied,

considerations of the mark area should be made in mask

design and also when applying the mark specifications

to existing mask designs.

R1-2.2 When the mark is applied prior to epitaxial

deposition, a crown or epi may grow along the mark

edge. The height of this crown will depend upon the epi

thickness and the deposition process.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer's instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI T6-0697 © SEMI 1997, 2004 1

SEMI T6-0697 (Reapproved 1104)

PROCEDURE AND FORMAT FOR REPORTING OF TEST RESULTS BY

ELECTRONIC DATA INTERCHANGE (EDI)

This procedure was technically approved by the Global Traceability Committee and is the direct

responsibility of the North American Traceability Committee. Current edition approved by the North

American Traceability Committee on July 11, 2004. Initially available at www.semi.org September 2004; to

be published November 2004. Originally published in 1997; previously published in 1999.

1 Purpose

1.1 To facilitate the electronic transfer of quality and

test data between users and suppliers.

2 Scope

2.1 This document describes a procedure and format

using ANSI ASC X12 “863 Report of Test Results” for

electronic data interchange (EDI). The ANSI standard

provides a basic structure and codes for transmitting

messages. This is supplemented by SEMI-generated

codes to describe product parameters and test methods

specific to the semiconductor industry. For a descrip-

tion of the EDI business applications, see Appendices 1

and 2.

2.2 This standard may be used to report test results for

all products used in the semiconductor industry when

the applicable codes are included in a SEMI standard.

It is intended to provide a consistent method for

transmit-ting test results throughout the industry. Any

implemen-tation of this document shall be agreed upon

between trading partners.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI AUX001 — List of Vendor Identification Codes

SEMI M12 — Specification for Serial Alphanumeric

Marking of the Front Surface of Wafers

SEMI M18 — Format for Silicon Wafer Specification

Form for Order Entry

3.2 ANSI Standards

ASC X12 — 863 Report of Test Results, version 003

release 050

ASC X12 — Data Dictionary

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

4.1 Abbreviations and Acronyms

4.1.1 ANSI — American National Standards Institute

4.1.2 ASC X12 (Accredited Standards Committee X12)

— Comprised of industry members for the purpose of

creating EDI standards for submission to ANSI for

subsequent approval and dissemination.

4.1.3 EDI (Electronic Data Interchange) — The

computer-to-computer exchange of information which

has tradi-tionally been communicated using paper

documents.

4.2 Definitions

4.2.1 certificate of analysis EDI message — one

message containing measurement or statistical data for

one shipment, from one supplier site to one user site, of

one user part number against one user purchase order

shipped. Multiple lot numbers may be included in the

shipment. (See Appendix 5.)

4.2.2 codes — a recognized set of abbreviations or

conventions for representing specific elements of data.

4.2.3 EDI translation — the conversion of application

data to and from the ASC X12 standard format.

4.2.4 manufacturing lot — a generic description for a

group of parts that have a relationship as defined by the

party establishing the identification (e.g., batch,

shipment, production run, qualification/test run,

individual product). (See Application Notes.)

1 American National Standards Institute, Headquarters: 1819 L

Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020;

Fax: 202.293.9287, New York Office: 11 West 42nd Street, New

York, NY 10036, USA. Telephone: 212.642.4900; Fax:

212.398.0023, Website: www.ansi.org

SEMI T6-0697 © SEMI 1997, 2004 2

4.2.5 mapping — the process of identifying the

standards data element relationship to application data

elements.

4.2.6 message — entire data stream including the outer

envelope.

4.2.7 statistical results EDI message — one message

containing measurement or statistical data for defined

parameters for a stated period of time (see Appendix 5).

4.2.8 test results EDI message — used to designate

data provided by special request (e.g., engineering,

qualifications). This message contains specific

measurement or statistical data for one request, from

one trading partner to another trading partner, of one

part number against one purchase order. Multiple lot

numbers may be included (see Appendix 5).

4.2.9 trading partner — all members within the

channels of distribution within an industry (suppliers,

carriers, users, and intermediaries)

. This includes

buyers and sellers which represent SEMI terms of user

and supplier as well.

5 Requirements

5.1 An implementation model shall be agreed upon by

trading partners. It is the intent of this document to

make interpretation of the models used for transmitting

electronic messages more consistent, so that

implementations are based upon common practices.

5.1.1 Select one of the report types in Table 1 using the

business model (Appendix 1) and the definitions found

in Section 4.

Table 1 Report Types

Code Type of EDI Message

CA Certificate of Analysis

RT Test Results

SR Statistical Results

5.1.2 Define data requirements representing the

requested measurements and statistics that are recorded

for reporting electronically. (See Appendix 2.)

5.1.3 Select codes for parameters, units of measure,

and statistical terms. Appendix 4 is a guideline to assist

in modeling the EDI message. It uses codes selected

from the ANSI Data Dictionary as well as codes created

by SEMI for the semiconductor industry.

2 The term “Trading Partner” is referenced from the Global

Electronics Guidelines (DRAFT) for Bar Code & 2D Symbol

Marking of Products and Packages in Conjunction with EDI.

5.1.4 Data is electronically reformatted from the

application where it resides into a format suitable for

EDI transmission. This usually requires the use of

translation software and the development of application

interface programs.

5.2 Thorough piloting, testing, and educating is

required for successful implementation.

6 Procedures

6.1 See Appendix 4.

7 Application Notes

7.1 Pending ANSI approval, SEMI is an authorized

agency to maintain the tables of codes.

7.2 The material contained in Appendix 4 was created

by using an EDI simulator referencing the ASC X12

“863 Report of Test Reports”, version 003 release 050.

7.3 In using Appendix 4, refer to the column “SEMI

Use” (far-left) to determine if data element usage is

mandatory, conditional, or optional. SEMI mandatory

elements include all ASC X12 863 mandatory elements,

as well as selected other elements that are optional or

conditional within ASC X12 863.

7.4 In Appendix 5, the example messages in this

appendix were simplified by showing only a portion of

what they can do. In practice, all of the transaction

types (CA, RT, and SR) can use any combination of the

statistical codes in Appendix 4, the new statistical codes

in Appendix 4, or raw measurement data.

7.5 Additional statistical codes are defined in

Appendix 3. These codes are pending ANSI approval.

7.6 This procedure will accommodate date/time

considerations for the turn of the century. There are

many options found in the data transmission segments

in this document. The end result for which option is

utilized will be agreed upon by the trading partners.

The message is itself part of the ANSI standard, and

any revisions to this standard will be incorporated.

7.6.1 In the data element type, DT is a standard ANSI

definition and is being addressed by ASC X12

Committee.

7.6.2 In the BTR segment, used to identify the date of

the actual transmission, BTR06 may be used as a

century reference number.

7.6.3 In the DTM segments, used to identify the date

for the actual data, the DTM05 data element of CC

represents a two-digit century code (e.g., 19 for 1999,

20 for 2000).