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SEMI E125-0305 © SEMI 2003, 2005 4 6 Conventions 6.1 Document and Notation Conventio ns 6.1.1 Unified Modeling Language (UML) — This specification uses the UML conventions for representing all class, state, object, and s…

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SEMI E125-0305 © SEMI 2003, 2005 3
SEMI E39 Object Services Standard: Concept, Behavior, and Services
SEMI E120 Provisional Specification for the Common Equipment Model (CEM)
4.2 ISO Standards
1
ISO 639:1988 — Code for the representation of names of languages
ISO 3166-1:1997 — Codes for the representation of names of countries and their subdivisions – Part 1: Country
codes
ISO 8601 — Representations of dates and times, 1988-06-15
ISO 8601 Draft Revision — Representations of dates and times, draft revision, 2000
4.3 Other Standards
American National Standards Institute (ANSI) X3.135-1992 – Information Systems – Database Language – SQL
(
http://www.ansi.org)
2
Internet Engineering Task Force (IETF) RFC 1776 – Tags for the Identification of Languages, ed. H. Alvestrand.
1995 (
http://www.ietf.org/rfc/rfc1766.txt)
Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67, available from
http://www.omg.org/technology/documents/modeling_spec_catalog.htm
Uniform Resource Name (URN) Syntax, IETF RFC 2141, May 1997 (
http://www.ietf.org/rfc/rfc2141.txt)
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 Descriptions of many of the abbreviations and acronyms used in this specification may be found in the SEMI
Compilation of Terms, available on the SEMI web site,
http://www.semi.org/. In most cases, these terms are not
included in this section.
5.1.2 IDL — Interface Definition Language
5.1.3 OMG — Object Management Group
5.1.4 SQL — Standard Query Language
5.1.5 UML — Unified Modeling Language
5.1.6 URN — Uniform Resource Name
5.1.7 XML — eXtensible Markup Language
5.2 Definitions
5.2.1 Definitions or descriptions of many of the terms used in this specification may be found in the SEMI
Compilation of Terms, available on the SEMI web site,
http://www.semi.org/. In most cases, these terms are not
included in this section.
5.2.2 Related Information 8 contains useful definitions of UML terms taken directly from the UML standard. UML
terms used in this document conform to these definitions. Please refer to this section as needed.
5.2.3 metadata — data used to describe data. For example, if a tool can report an event with several associated
variables under certain conditions, the metadata for that event would provide a description of what condition will
produce the event, what the type and units are of each variable, and the id of the event itself.
1 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.
Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30, Website: /www.iso.ch
2 American National Standards Institute, Headquarters: 1819 L Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020; Fax:
202.293.9287, New York Office: 11 West 42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900; Fax: 212.398.0023, Website:
www.ansi.org
SEMI E125-0305 © SEMI 2003, 2005 4
6 Conventions
6.1 Document and Notation Conventions
6.1.1 Unified Modeling Language (UML) — This specification uses the UML conventions for representing all
class, state, object, and sequence diagrams. Refer to the UML specification for a detailed description of these
conventions.
6.1.2 Attribute Tables — The table below provides an example of the tables used to list and describe attributes of
classes defined in this specification.
Table 1 Attribute Table Format
Attribute Name Definition Required Form
Y or N See list below
6.1.2.1 Form — Defines the data type of the attribute. The terms used to describe data types in this column are
defined in the SEMI Compilation of Terms, or are included as part of the specification. Refer to the compilation of
terms for the definition of SEMI type name meanings.
6.1.3 UML Associations — The mechanism used for representing UML associations between classes is
implementation dependent. This document is abstract in nature, and does not specify or imply any such mechanism.
Any adjunct standard that provides an implementation of this specification must include a description of the
mechanism used for representing the UML associations shown in this document.
Class2Class1
1 roleName10..*
1..*
roleName2
1
{XOR}
Class3
1
roleName3 1
1
roleName4 1
Figure 1
Association Notation
6.1.3.1 Association Notation — This document uses the UML aggregation diamond adornment, role names, end
multiplicities, and navigability in all class diagrams specifying associations. Unadorned associations are not used,
for economy of notation. See the UML 1.4 specification, Section 3.43 for details. All role names are public by
default; therefore the visibility symbols are not used.
6.1.3.1.1 Open diamond adornments indicate that instances of the target class may be shared among aggregate
classes. Closed diamond adornments indicate that target instances belong to at most one composite class. The part-
whole semantics of the aggregation/composition symbol is not significant in this specification. See the UML 1.4
specification, sections 3.43.2.5 and 3.48 for further information.
6.1.3.1.2 Some diagrams use the UML “XOR” constraint where applicable. An “XOR” constraint indicates that
only one of many possible associations can be instantiated at any one time for a given instance of the association
class. See the UML 1.4 specification, Section 3.42.5.1 for further information.
6.1.4 Association Tables — The table below provides an example of the tables used to list and describe associations
between classes defined in this specification.
SEMI E125-0305 © SEMI 2003, 2005 5
Table 2 Association Table Format
Association Role Name Definition Comments
6.1.4.1 Association Role Name — The name of the association role being specified.
6.1.4.2 Definition — Describes the function or purpose of the association.
6.1.4.3 Comments — Any additional comments or notes regarding the association.
6.1.5 Operation Definition Tables — The table below provides an example of the tables used to list and describe the
interface operations defined in this specification.
Table 3 Operation Definition
Operation Description Type
See list below
6.1.5.1 Operation — Specifies the name of the operation.
6.1.5.2 Type — Specifies the messaging semantics of the operation. Only Request-Reply (RR) semantics are used
in this specification. Request-Reply messages are messages that involve an initiator and a receiver. In a Request-
Reply exchange, the initiator sends a single request message to the receiver, and the receiver sends a single reply
message to that request back to the initiator. Fire-and-Forget messages are messages that involve a sender and a
receiver. In a Fire-and-Forget exchange, the sender sends a single message to the receiver, with no associated
response.
6.1.6 Operation Argument Definition Table — The table below provides an example of the tables used to list and
describe arguments for interface operations defined in this specification.
Table 4 Operation Argument Definitions
Argument Description Kind Form
See list below See list below
6.1.6.1 Argument — Specifies the name of the argument.
6.1.6.2 Kind — Specifies whether the argument is an ‘in’, ‘out’, or ‘error’ argument for the operation. ‘Error’
arguments always function as ‘out’ arguments, but indicate that the operation did not complete successfully.
6.1.6.3 Form — Defines the data type of the argument. The terms used to describe data types in this column are
defined in the SEMI Compilation of Terms, or are included as part of the specification. Refer to the compilation of
terms for the definition of SEMI type name meanings.
6.2 Terms
6.2.1 Class, type — This specification uses the terms “class” and “type”, interchangeably to refer to a UML class.
7 Background
7.1 Motivation
7.1.1 This specification is designed to help address the problem of integrating semiconductor equipment from a
variety of suppliers into an automated factory environment, and to provide a standard mechanism for describing
information and data that the equipment can provide for a wide variety of uses. See Related Information 1 for an
overview of some example use cases.
7.1.2 This specification defines the information that is needed to communicate essential features of the equipment
to software applications, and provides extensibility features to allow suppliers to communicate information unique to
their equipment or that may not be specified in a SEMI standard.