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SEMI E127-0705 © SEMI 2003, 2005 16 Initialization activities inclu de both software initialization and hardware initialization. On the completion of initialization, the IMM is in a known condition, and the follo wing re…
SEMI E127-0705 © SEMI 2003, 2005 15
11.3.4.2.1 Once all retention rules have been satisfied for a given table for all clients, the IMM may delete the table
at its own discretion based on internal requirements that are outside the scope of this standard. The IMM is
responsible for managing both its storage space and those tables that do not need to be retained for any client.
11.3.4.2.2 As a single level list, when any item list is satisfied, the table may be deleted (a logical OR condition).
11.3.4.2.3 If one or more conditions need to be satisfied before a table may be deleted (a logical AND condition),
the items should appear as a list of RetentionRules that occupy one element of the top level list. For instance, if the
retention rule is that conditions A and B both need to be met, or condition C must be met, then the
DefaultDataRetention rule is a two element list with one element being a 2 item list of A and B and the other is just
condition C:
(A,B), C
11.3.4.2.4 An empty (null) list is equivalent to a “No Retention Rule” condition.
11.3.4.2.5 Actual representation of this list is dependent upon the communication protocol used.
11.3.4.3 Until or unless set by the client, the client’s retention rule is a zero element list, signifying that no retention
rule has been set.
11.3.4.4 Except when required by automatic rollover (¶11.3.5.2), no IMM Data Table Object shall be deleted until
all client retention rules have been satisfied.
11.3.4.5 The definitions of individual standard retention rule elements are provided in Table 3. Additional rules
may be defined in the future. All of the individual rules shall be integers, where a non-value indicates that this rule
is enabled. Otherwise it is disabled. The default value for each element is zero.
Table 3 Retention Rule Element Definitions
Retention Rule Definition
After Transfer The table may be deleted after it has been sent to the client. Any non-zero value indicates that this rule is
enabled. A value of zero disables it.
Client Delete If ClientDelete is non-zero, tables are retained until deleted by the client. However, each time the table
capacity drops below the value in ClientDelete, the TableStorageCapacityWarning event is generated and
sent to the client, so the client can then delete tables no longer needed. If the client fails to delete sufficient
tables, then the Automatic Rollover deletes the oldest tables as described below.
Maximum Tables
Stored
This rule sets a value for the maximum number of tables that should accumulated before Automatic Rollover
takes effect and the oldest table(s) are deleted when there is insufficient room to store a new table.
Maximum value for this rule is Table Capacity – 1.
RetentionTime The value in RetentionTime indicates the maximum length of time, in hours, that a table should be retained
in storage. The table may be deleted after this period of time has expired. Any internal timers used are not
visible to the client.
11.3.5 Table Storage Management — All tables shall be stored in non-volatile storage once they have been
completed.
11.3.5.1 Calibration Table — The latest instance of Calibration Table shall always be retained in storage.
11.3.5.2 Automatic Rollover — In the event that there is not enough storage capacity remaining to store a new table,
then the oldest tables of the same type as the new table (for either raw data or converted data) shall be deleted, one at
a time, until there is room to store the new table, regardless of the presence or absence of retention rules.
NOTE 4: The size of Raw Data Table Objects and Converted Data Table Objects may be significantly different.
11.3.5.3 TableStorageAlert is a constant determined by the supplier that represents either the approximate number
of tables (total) that may still be stored, or a percentage of total remaining storage capacity (TableCapacity). When
the remaining capacity drops to the level indicated by TableStorageAlert, a Table Storage Capacity Warning event is
sent (¶11.4.5).
11.4 System Initialization — Whenever the Integrated Measurement Module is powered on or reset, it goes through
a system initialization before it is acknowledges communications with, or establishes, any potential client.
SEMI E127-0705 © SEMI 2003, 2005 16
Initialization activities include both software initialization and hardware initialization. On the completion of
initialization, the IMM is in a known condition, and the following requirements have been satisfied:
All state models have been set to their entry state,
Communications have been initialized,
The physical status of the IMM is known,
The absence or presence of substrates is known,
Exceptions, including all alarm conditions, have been determined,
No process jobs are defined,
No clients have been established, and
All internal equipment substrate locations have been checked for the presence of substrates, and the total count
of substrates detected has been compared with the number expected.
11.4.1 Substrate Count Discrepancy
11.4.1.1 The determination of expected substrate count requires that sufficient information about actual count must
be maintained in non-volatile memory during run-time so that is available to accurately determine expected count
during system initialization. For example:
The content of the IMM attribute SubstrateList is saved in non-volatile memory whenever it is updated, and
expected count is determined by the number of valid entries in the list, or
A list of occupied internal substrate locations is retained in non-volatile memory each time any one is updated,
and the expected count is determined by the number of valid entries in the list, or
A simple count of the number of current substrates is retained in non-volatile memory.
11.4.1.2 If both the expected count and the actual count are zero, and there are no other errors or alarms, then the
IMM Service state is IN SERVICE, and the IMM EPT state is IDLE.
11.4.1.3 If both the expected count and the actual count are equal and non-zero, then the IMM Service state is OUT
OF SERVICE, and the IMM EPT state is BLOCKED. In this case, the substrates are assigned temporary identifiers
of “unknown
i
”, where i = 1,…, number of actual substrates detected. The substrates shall be unloaded in an orderly
manner. When all substrates have been unloaded, and all alarms are cleared, the IMM Service state changes to IN
SERVICE, and the IMM EPT state changes to IDLE
11.4.1.4 If the expected count is greater than the actual count, then a Missing Substrate alarm is set. If the expected
count is less than the actual count, then an Unexpected Substrate alarm is set. In either case, the IMM remains OUT
OF SERVICE and BLOCKED until the alarm condition is cleared. The IMM may provide a method for a
maintenance technician to determine if the “lost substrate” is actually present or if the “unexpected substrate” is
actually present (for example, the physical module may provide a view plate). and to indicate whether or not it is
safe to unload. Such methods are beyond the scope of this standard. Note that sensor errors can result in an apparent
loss or gain that is not real. Note also that it may be possible for a maintenance technician to interact with the IMM
as a “control client”.
11.5 IMM Events and Alarms
11.5.1 In addition to the special events and alarms described below, all state transitions shall be capable of
triggering an event, including all state models required by other standards required by IMMC.
11.5.2 Alarms — Various alarms caused by hardware-specific malfunction may occur at any time, including those
detected by the Substrate Transfer Path Object (STPO). In addition, alarms may be caused by a discrepancy
between actual and expected substrate counts.
11.5.2.1 Missing Substrate Alarm — This alarm is set whenever a substrate is no longer detected. The substrate is
either broken (and must be manually removed) or a sensor has failed so that it can no longer detect a substrate. This
condition shall cause the IMM Service state to set to OUT OF SERVICE and the IMM EPT state to be set to
BLOCKED so long as this condition exists. This condition may occur at any time, either during system
SEMI E127-0705 © SEMI 2003, 2005 17
initialization or runtime. In either case, the alarm condition shall be cleared before processing continues. See
¶11.4.1.4 for further detail.
11.5.2.2 Unexpected Substrate Alarm — This alarm is set during system initialization when substrates have been
detected, and the actual substrate count exceeds the number expected. See ¶11.4.1.4 for further detail.
11.5.3 SubstrateListUpdate — The SubstrateList attribute is a list of the ObjIDs for all substrates currently present
within the IMM module. Whenever a Substrate Object is created or deleted, this attribute is updated and an event
message is sent with the ObjID of the Substrate Object associated with the change.and whether it was added or
removed.
11.5.4 Table Storage Capacity Warning — A notification sent to the client when table capacity decreases below
TableStorageAlert and each time the storage further decreases.
11.5.5 Table Storage Capacity Overflow — Tables have been removed due to capacity overflow. Note: This is a
trigger for Transition 6 in the IMM Data Table state model, ¶14.2.
11.5.6 Event Variables — Certain variables shall be provided that are associated with certain events and contain the
values that were valid at the time the event occurred. For the IMM object, these variables are specified in Table 4.
The names of variables as specified shall be implemented exactly as text strings.
Table 4 Event Variables for IMM Object
Variable Name Description Type Event Comment
DateTime The date and time that the
event occurred.
Conforms to the
clock format in
SEMI E98.
All
Service Current state of Service
State Model.
Enumerated
IN SERVICE
OUT OF
SERVICE
All
SubstrateListChangeType Indicates the type of
change: addition or
deletion.
Enumerated
Addition
Deletion
SubstrateListUpdate
SubstrateID The last SubstrateID added
to or removed from the
SubstrateList attribute.
Text. SubstrateListUpdate
TableCount The number of tables
currently stored.
Integer. TableStorageCapacityWarning,
TableStorageCapacityOverflow
11.6 IMM Object Services
11.6.1 Table 5 defines the services specific to the Integrated Measurement Module. Message details are defined in
§19.
Table 5 IMM Object Services
Message Service Name Description Type Reqd
ChangeService Set the IMM in service or out of service. R Y
ClientConnect A request to become a Control Client or Data Client. R Y
ClientDisconnect A request to terminate the Client role. R Y
RequestRetentionConditions A request to send the rules and retention time for this client. R Y
SetAutoTableSend A request to set AutoTableSend on or off for this client. R Y
SetRetentionConditions The client sends a one or two level list of 0+ Retention Rules and an optional
minimum retention time.
R Y
TableRequest The client requests a specific table, or table subset. R Y
TableSend Used by the client to send a table or delete an existing table. Used by the
IMM to request to send a table to the client by the AutoTableSend capability.
R Y