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SEMI E52-0703 © SEMI 1995, 2003 46 MIXED GAS NAME SYMBOL CODE 50% HYDROGEN BROMIDE/HYDROGEN CHLORIDE 50% HBr/HCI 0650 50% HYDROGEN/NITROGEN 50% H2/N2 0850 50% NITROGEN DIOXIDE/AMMONIA 50% NO2/NH3 0851 50% NITROGEN/HELIUM…

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SEMI E52-0703 © SEMI 1995, 2003 45
MIXED GAS NAME SYMBOL CODE
5%FLUORINE/NITROGEN 5%F2/N2 0732
5%FLUORINE/NITROGEN TRIFLUORIDE 5%F2/NF3 0669
5%GERMANE/HELIUM 5%GeH4/He 0765
5%HELIUM/ARGON 5%He/Ar 0846
5%HELIUM/NITROGEN 5%He/N2 0752
5%HEXAFLUOROETHANE/OXYGEN 5%C2F6/O2 0785
5%HYDROGEN CHLORIDE/NITROGEN 5%HCI/N2 0726
5%HYDROGEN SELENIDE/HYDROGEN 5%H2Se/H2 0510
5%HYDROGEN/ARGON 5%H2/Ar 0619
5%HYDROGEN/HELIUM 5%H2/He 0762
5%HYDROGEN/NITROGEN 5%H2/N2 0542
5%METHANE/HELIUM 5%CH4/He 0699
5%NITROGEN/HYDROGEN 5%N2/H2 0621
5%NITROGEN/PHOSPHINE 5%N2/PH3 0622
5%OXYGEN/ARGON 5%O2/Ar 0623
5%OXYGEN/CARBON TETRAFLUORIDE 5%O2/CF4 0753
5%OXYGEN/HELIUM 5%O2/He 0779
5%OZONE/OXYGEN 5%O3/O2 0624
5%PHOSPHINE/5%SILANE/NITROGEN 5%PH3/5%SiH4/N2 0625
5%PHOSPHINE/ARGON 5%PH3/Ar 0626
5%PHOSPHINE/HELIUM 5%PH3/He 0693
5%PHOSPHINE/HYDROGEN 5%PH3/H2 0709
5%PHOSPHINE/NITROGEN 5%PH3/N2 0501
5%PHOSPHINE/SILANE 5%PH3/SiH4 0627
5%PHOSPHORUS PENTAFLUORIDE/HELIUM 5%PF5/He 0777
5%PROPANE/HYDROGEN 5%C3H8/H2 0617
5%SILANE/ARGON 5%SiH4/Ar 0629
5%SILANE/HELIUM 5%SiH4/He 0780
5%SILANE/HYDROGEN 5%SiH4/H2 0847
5%SILANE/NITROGEN 5%SiH4/N2 0773
5%SULFUR DIOXIDE/HELIUM 5%SO2/He 0763
5%TETRAETHYLORTHOSILICATE(TEOS)/NITROGEN 5%Si(C2H5O)4/N2 0523
5%TRICHLOROSILANE/HYDROGEN 5%SiHCI3/H2 0679
5%TRIETHYLANTIMONY(TESb)/HYDROGEN 5%(C2H5)3Sb/H2 0524
5%WATER VAPOR/AIR 5%H2O/Air 0567
5.5%ARSENIC TRICHLORIDE/HYDROGEN 5.5%AsCl3/H2 0890
50%CARBON DIOXIDE/NITROGEN 50%CO2/N2 0848
50%FLUORINE/ARGON 50%F2/Ar 0756
50%FLUORINE/HELIUM 50%F2/He 0757
50%FLUORINE/NITROGEN 50%F2/N2 0760
50%FLUOROFORM/ARGON 50%CHF3/Ar 0686
50%GERMANE/ARGON 50%GeH4/Ar 0747
50%HELIUM/ARGON 50%He/Ar 0849
50%HELIUM/OXYGEN 50%He/O2 0630
50%HEXAFLUOROETHANE/OXYGEN 50%C2F6/O2 0769
SEMI E52-0703 © SEMI 1995, 2003 46
MIXED GAS NAME SYMBOL CODE
50%HYDROGEN BROMIDE/HYDROGEN CHLORIDE 50%HBr/HCI 0650
50%HYDROGEN/NITROGEN 50%H2/N2 0850
50%NITROGEN DIOXIDE/AMMONIA 50%NO2/NH3 0851
50%NITROGEN/HELIUM 50%N2/He 0852
50%NITROGEN/OXYGEN 50%N2/O2 0631
50%PHOSPHINE/NITROGEN 50%PH3/N2 0518
50%PHOSPHINE/SILANE 50%PH3/SiH4 0632
50%SILANE/HELIUM 50%SiH4/He 0521
50%SILANE/HYDROGEN 50%SiH4/H2 0633
50%SULFUR DIOXIDE/NITRIC OXIDE 50%SO2/NO 0853
6%CARBON DIOXIDE/NITROGEN 6%CO2/N2 0854
6%HYDROGEN CHLORIDE/OXYGEN 6%HCl/O2 0855
6%HYDROGEN/NITROGEN 6%H2/N2 0856
6%OZONE/OXYGEN 6%O3/O2 0857
6.5%DIBORANE/15%SILANE/NITROGEN 6.5%B2H6/15%SiH4/N2 0634
6.5%DIBORANE/HYDROGEN 6.5%B2H6/H2 0635
6.5%DIBORANE/NITROGEN 6.5%B2H6/N2 0858
7%CARBON DIOXIDE/10%HYDROGEN/20%CARBON
MONOXIDE/NITROGEN 7%CO2/10%H2/20%CO/N2 0748
7%HYDROGEN/ARGON 7%H2/Ar 0859
7%HYDROGEN/HELIUM 7%H2/He 0883
7%METHYLENE CHLORIDE/3%OZONE/AIR 7%CH2CI2/3%O3/Air 0685
7%OZONE/OXYGEN 7%O3/O2 0901
7.5%PHOSPHINE/SILANE 7.5%PH3/SiH4 0676
8%CARBON TETRAFLUORIDE(FREON-14)/OXYGEN 8%CF4/O2 0574
8%DIBORANE/ARGON 8%B2H6/Ar 0860
8%DIBORANE/NITROGEN 8%B2H6/N2 0861
8%GERMANE/HYDROGEN 8%GeH4/H2 0664
8%HYDROGEN/ARGON 8%H2/Ar 0692
8%HYDROGEN/NITROGEN 8%H2/N2 0727
8%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 8%O2/CF4 0613
8%OZONE/OXYGEN 8%O3/O2 0639
8%PHOSPHINE/HELIUM 8%PH3/He 0667
8%PHOSPHINE/NITROGEN 8%PH3/N2 0620
8%PHOSPHINE/SILANE 8%PH3/SiH4 0636
8%PROPANE/10%AMMONIA/AIR 8%C3H8/10%NH3/Air 0714
8.2%PROPANE/9.8%AMMONIA/AIR 8.2%C3H8/9.8%NH3/Air 0715
8.6%ARGON/NITROGEN TRIFLUORIDE 8.6%Ar/NF3 0706
9.4%ARGON/NITROGEN TRIFLUORIDE 9.4%Ar/NF3 0705
11 Related Document
11.1 Data Sheet
Schumacher Material Safety Data Sheet, No. 48.1 JN, Revision Date 8/94
14
14 Schumacher, 1969 Palomar Oaks Way, Carlsbad, CA 92009-1307, 619.931.9555
SEMI E52-0703 © SEMI 1995, 2003 47
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