semi合集-English.pdf - 第1713页
SEMI E40-0705 © SEMI 1995, 2005 25 12.3.1 The services are defined with mech anisms to reject unsupported services and op tions should they be requested. This im proves robustness a nd enables sophisticated service-u ser…
SEMI E40-0705 © SEMI 1995, 2005 24
11 Variable Data
11.1 The purpose of this section is to define the list of variable data requirements for Processing Management
compliant equipment. Values of these variables are available to the host via collection event reports.
11.2 Variable Data Definitions — The identifier and all other attributes of the ProcessJob object shall be available
for inclusion in event reports associated with it. The following attributes are most likely to be used: PRJobID,
PRJobState, RecID, RecVariableList and PRMtlNameList.
12 Compliance
12.1 Processing management defines the standard services available to achieve job-based material processing in
equipment. The capabilities supported allow flexible management of automated processing encompassing many
process types. Only a subset of these capabilities may be needed for a particular implementation.
12.2 Fundamental Requirements — All processing agent implementations shall support the fundamental
requirements. These have been indicated in the appropriate sections of the document and are listed together below:
Create and execute a single process job to completion, given:
a single material of the appropriate type, uniquely identified.
a unique recipe identifier for which the corresponding recipe can be found.
Detect and report the success or failure of the process job, indicating complete, partial, or non-processing of the
material.
Support Abort of the process job at all times, immediately ceasing activity and terminating the process job.
Maintain the data of required process job attributes indicated in Table 2.
Reject requests with incomplete or invalid parameters.
Reject requests for capabilities not supported.
Implement the services and messages with the exception of those required for the Optional capabilities.
12.2.1 Satisfying fundamental requirements may not provide sufficient flexibility or performance for some
equipment. In such cases, fundamental functionality should be supplemented by optional capabilities as appropriate
to the needs of the system.
12.3 Additional Capabilities — Optional capabilities defined or enabled in this standard include:
Processing resource pre-conditioning and post-conditioning.
Stop, Pause, and Resume of a process job.
Manual process start.
Process job queuing and Cancel on a queued job.
Process tuning.
Processing of material groups.
Multiple concurrent process jobs.
Multiple consecutive process jobs in a single visit.
Process job with no material.
Notification of waiting for material.
Implement PRJobCreateEnh and PRJobMultiCreate.
Report the process job milestones: Setup, Processing, Processing Complete, and Job Complete.
SEMI E40-0705 © SEMI 1995, 2005 25
12.3.1 The services are defined with mechanisms to reject unsupported services and options should they be
requested. This improves robustness and enables sophisticated service-users to adjust their requests to the
capabilities of the particular processing agent.
12.4 Table 21 provides a checklist for Processing Management (PM) compliance.
Table 20 PM Compliance Statement
Fundamental PM Requirements PM Section Implemented PM Compliant
Single Process Job Execution 8.2 Yes No Yes No
Process Job Failure Indication 8.2.1.7 Yes No Yes No
Abort Command 8.2.3.2 Yes No Yes No
Process Job Object Implementation 8.3, 9 Yes No Yes No
Reject Invalid/Incomplete Parameters 8.2.1.2.1 Yes No Yes No
Reject Unsupported Capabilities 11.2 Yes No Yes No
Services Implementation (not per Additional) 10 Yes No Yes No
Additional PM Capabilities PM Section Implemented PM Compliant
Process Job Milestones 8.2.1 (except 8.2.1.2,3) Yes No Yes No
Resource Pre/Post-conditioning Yes No Yes No
Stop, Pause and Resume Commands 8.2.3.3,4,5 Yes No Yes No
Manual Process Start 8.2.3.9 Yes No Yes No
Process Job Queuing 8.3 Yes No Yes No
Process Tuning 7.5, 10.4.9 Yes No Yes No
Processing of Material Groups 7.6 Yes No Yes No
Multiple Concurrent Process Jobs 7.7 Yes No Yes No
Multiple Consecutive Process Jobs 7.8 Yes No Yes No
Process Job with No Material 7.9 Yes No Yes No
Event Notification 8.2.2 Yes No Yes No
Enhanced Job Creation 10.4.2 Yes No Yes No
Multiple Job Creation 10.4.3 Yes No Yes No
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E40.1-0705 © SEMI 1996, 2005 1
SEMI E40.1-0705
SECS-II SUPPORT FOR PROCESSING MANAGEMENT STANDARD
This standard was technically approved by the global Information & Control Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available
at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published in 1995; last published in
2004.
1 Purpose
1.1 This document maps the services and data of SEMI E40 to SECS-II streams and functions and data definitions.
2 Scope
2.1 This is the standard way to implement the Processing Management, which provides remote control of wafer
processing, using the SECS-II message protocol.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards and Documents
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E40 — Standard for Processing Management
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Terminology
4.1 None.
5 Mapping of Processing Services
Table 1 Processing Management Messages Mapping
Service Message Name Stream, Function SECS-II Name
PRJobCreate request S16F3,F4 Process Job Create Request/Acknowledge
PrJobCommand request S16F5,F6 Process Job Command Request/Acknowledge
PRJobAlert notify If E30 style events:
S6F11,F12
If E40 style alerts:
S16F7,F8
If E53 style events:
S6F11,F12
S6F13,F14
If E30 style events:
Event Report Send/Acknowledge
If E40 style alerts:
Process Job Alert Notify/Confirm
If E53 style events:
Event Report Send/Acknowledge
Annotated Event Report Send/Ack
PRJobEvent notify If E30 style events:
S6F11,F12
If E40 style events:
S16F9,F10
If E53 style events:
S6F11,F12
S6F13,F14
If E30 style events:
Event Report Send/Acknowledge
If E40 style events:
Process Job Event Notify/Confirm
If E53 style events:
Event Report Send/Acknowledge
Annotated Event Report Send/Ack
PRSetMtrlOrder request S16F29,30 Process Job Set Material Order
PRJobCreateEnh S16F11/F12 PRJobCreateEnh
PRJobMultiCreate S16F15/F16 PRJobMultiCreate