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SEMI E52-0703 © SEMI 1995, 2003 18 Code Gas Name Symbol Formula Synonym Ref 194 Titanium Tetraisopropoxide C12H28OTi Ti(OC 3 H 7 ) 4 1 181 Toluene C7H8 C 6 H 5 CH 3 Methylbenzene 2 98 Transbutene C4H8 CH 3 CH=CHCH 3 2 32…

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SEMI E52-0703 © SEMI 1995, 2003 17
Code Gas Name Symbol Formula Synonym Ref
88 Silicon Tetrafluoride SiF4 SiF
4
1
245 Stibine SbH3 SbH
3
2
319 Styrene C8H8 C
8
H
8
Ethenylbenzene; Un 2055 2
32 Sulfur Dioxide SO2 SO
2
1
110 Sulfur Hexafluoride SF6 SF
6
1
189 Sulfur Monochloride S2Cl2 S
2
Cl
2
2
86 Sulfur Tetrafluoride SF4 SF
4
1
246 Sulfur Trioxide SO3 SO
3
2
171 Sulfuric Acid H2SO4 H
2
SO
4
2
87 Sulfuryl Fluoride SO2F2 SO
2
F
2
1
279 Tantalum (V) ethoxide C10H25O5Ta C
10
H
25
O
5
Ta Ta(Oet)5 2
274 TEAsat C6H15O4As (C
2
H
5
O)
3
AsO 1
247 Tellurium Hexafluoride TeF6 TeF
6
2
337 Tertiary Butyl Alcohol C4H10O (CH
3
)
3
COH 3
161 Tertiarybutylarsine C4H11As C(CH
3
)
3
AsH
2
TBA 8
162 Tertiarybutylphosphine C4H11P C(CH
3
)
3
PH
2
TBP 8
248 Tetrachlorodiborane B2Cl4 B
2
Cl
4
2
168 Tetrachloroethylene C2Cl4 Cl
2
C=CCl
2
Perchloroethylene or Ethylene,
Perchloro
2
144 Tetraethoxysilane C8H20O4Si (C
2
H
5
O)
4
Si TEOS 2
316 Tetraethyl lead C8H20Pb (C
2
H
5
)
4
Pb Plumbane, tetraethyl; UN 1649 2
317 Tetraethyl silane C8H20Si C
8
H
20
Si Tetraethylsilane;
Tetraethylsilicon; (C2H5)4Si
2
315 Tetraethylgermane C8H20Ge (C
2
H
5
)
4
Ge (C2H5)4Ge; Germanium
tetraethyl
2
94 Tetrafluorethylene C2F4 F
2
C=CF
2
1
249 Tetrafluorodiborane B2F4 B
2
F
4
2
156 Tetrafluoroethane C2H2F4 CH
2
FCF
3
R-134A, F-134A 2
157 Tetrafluorohydrazine N2F4 F
2
NNF
2
Dinitrogen Tetrafluoride 1
182 Tetrahydrofuran C4H8O C
4
H
8
O 2
282 Tetrakis( diethylamino )titanium C16H40N4Ti C
16
H
40
N
4
Ti 2
318 Tetrakis( dimethylamino )titanium C8H24N4Ti C
8
H
24
N
4
Ti 2
301 Tetramethoxy silane C4H12O4Si (CH
3
O)
4
Si Silicic Acid (H4SiO4);
Tetramethyl ester; Tetramethyl
silicate
2
299 Tetramethoxygermanium C4H12GeO4 (CH
3
O)
4
Ge Ge(OMe)4 2
302 Tetramethyl lead C4H12Pb (CH
3
)
4
Pb (CH3)4Pb; Plumbane,
tetramethyl;
2
252 Tetramethyl Tin C4H12Sn (CH
3
)
4
Sn 2
158 Tetramethylcyclotetra-siloxane C4H16Si4O4 (CH
3
)
4
H
4
(SiO)
4
TOMCATS 7
250 Tetramethylgermanium C4H12Ge (CH
3
)
4
Ge 2
251 Tetramethylsilane C4H12Si (CH
3
)
4
Si 2
253 Tetrasilane Si4H10 Si
4
H
10
2
145 Tin Tetrachloride SnCl4 SnCl
4
Tetrachlorostannane 2
114 Titanium Tetrachloride TiCl4 TiCl
4
2
254 Titanium Tetraiodide TiI4 TiI
4
2
SEMI E52-0703 © SEMI 1995, 2003 18
Code Gas Name Symbol Formula Synonym Ref
194 Titanium Tetraisopropoxide C12H28OTi Ti(OC
3
H
7
)
4
1
181 Toluene C7H8 C
6
H
5
CH
3
Methylbenzene 2
98 Transbutene C4H8 CH
3
CH=CHCH
3
2
320 Triallylamine C9H15N C
9
H
15
N 2
83 Tribromomethane CHBr3 CHBr
3
2
255 Tribromostibine SbBr3 SbBr
3
2
146 Tributylaluminum C12H27Al (CH
3
CH
2
CH
2
CH
2
)
3
Al TBAl 3
112 Trichloroethane C2H3Cl3 CH
3
CCl
3
TCA, Methylchloroform 2
91 Trichlorofluoromethane CCl3F CCl
3
F F-11, R-11 1
147 Trichlorosilane SiHCl3 SiHCl
3
5
256 Trichlorostibine SbCl3 SbCl
3
2
126 Trichlorotrifluoroethane C2Cl3F3 CF
2
ClCCl
2
F F-113, R-113 1
312 Triethoxy silane C6H16O3Si (C
2
H
5
O)
3
SiH 2
308 Triethoxyborane C6H15BO3 (C
2
H
5
O)
3
B Boron triethoxide; 2
311 Triethoxyphosphine C6H15O3P (C
2
H
5
O)
3
P Triethyl phosphite; UN 2323;
Phosphorous acid, triethyl ester
2
306 Triethyl arsine C6H15As (C
2
H
5
)
3
As Arsine; Triethylarsenic 2
313 Triethyl silane C6H16Si (C
2
H
5
)
3
SiH (C2H5)3SiH 2
257 Triethylaluminum C6H15Al (C
2
H
5
)
3
Al 2
310 Triethylamine C6H15N (C
2
H
5
)
3
N UN 1296; Ethanamine 2
258 Triethylantimony C6H15Sb (C
2
H
5
)
3
Sb 2
163 Triethylborate C6H15O3B B(OC
2
H
5
)
3
TEB, Triethoxyborane 2
148 Triethylgallium C6H15Ga (C
2
H
5
)
3
Ga TEGa 4
309 Triethylindium C6H15In (C
2
H
5
)
3
In Indium triethyl 2
307 Trietoxy arsine C6H15AsO3 (C
2
H
5
O)
3
As Triethyl ester arsenous acid;
Triethyl arsenite
2
259 Trifluoroacetic Acid CF3CO2H CF
3
CO
2
H 2
260 Trifluoroacetonitrile C2F3N F
3
CCN 2
321 Trifluoromethylhypofluorite CF4O CF
4
O CF3OF; Hypofluorous acid;
trifuoromethyl ester
2
290 Trifluoropropane C3H5F3 C
3
H
5
F
3
1,1,1-Trifluoropropane;
CH3CH2CF3
2
261 Trifluorosilane SiHF3 SiHF
3
2
262 Triisobutylaluminum C12H27Al (C
4
H
9
)
3
Al 2
287 Trimethoxy silane C3H10O3Si C
3
H
10
O
3
Si 2
131 Trimethoxyborine C3H9BO3 B(OCH
3
)
3
TMB, Trimethylborate 2
294 Trimethyl ester phosphoric acid C3H9O4P C
3
H
9
O
4
P Methyl phosphate;
Trimethoxyphosphine oxide
2
190 Trimethyl Silane C3H10Si (CH
3
)
3
SiH 2
149 Trimethylaluminum C3H9Al Al(CH
3
)
3
TMA, TMAl 4
109 Trimethylamine C3H9N (CH
3
)
3
N Methylamine 1
165 Trimethylaminealane C3H12AlN (CH
3
)
3
NAlH
3
TMAA 11
150 Trimethylantimony C3H9Sb (CH
3
)
3
Sb Trimethylstibene 2
151 Trimethylarsenic C3H9As (CH
3
)
3
As Trimethylarsine, TMAs 2
277 Trimethylborane C3H9B (CH
3
)
3
B 2
152 Trimethylgallium C3H9Ga Ga(CH
3
)
3
TMGa 4
SEMI E52-0703 © SEMI 1995, 2003 19
Code Gas Name Symbol Formula Synonym Ref
153 Trimethylindium C3H9In (CH
3
)
3
In TMIn 3
314 Trimethylisoxazole C6H9NO CH
3
CH=CHCH=CHCON
H
2
3,4,5-Trimethylisoxazole,
Sorbamide
3
133 Trimethylphosphite C3H9PO3 (CH
3
O)
3
P TMPi, Trimethoxyphosphine 2
132 Trimethylphosphorous C3H9P (CH
3
)
3
P Trimethylphosphine, TMP 2
303 Trimethylvinylsilane C5H12Si C
5
H
12
Si Vinyltrimethylsilane;
CH2=CHSi(CH3)3
2
328 Trisilane Si3H8 Si
3
H
8
Silicopropane; Trisilicane; H
8
Si3 2
159 Tritium T2 H
3
2
T2 2
273 Tungsten Hexacarbonyl C6O6W W(CO)
6
1
121 Tungsten Hexafluoride WF6 WF
6
2
123 Uranium Hexafluoride UF6 UF
6
2
56 Vinyl Bromide C2H3Br CH
2
=CHBr 1
55 Vinyl Chloride C2H3Cl CH
2
=CHCl Chloroethylene 1
51 Vinyl Fluoride C2H3F H
2
C=CHF 1
20 Water Vapor H2O H
2
O 2
6 Xenon Xe Xe 1
324 Xenon difluoride XeF2 XeF
2
F
2
Xe; Xenon fluoride 2
263 Xylene m- C8H10 1,3-(CH
3
)
2
C
6
H
4
1,3 Dimethyl Benzene 3
264 Xylene p- C8H10 1,4-(CH
3
)
2
C
6
H
4
1,4 Dimethyl Benzene 3
330 Zinc Zn Zn UN 1383 2
8 Gas Table Sorted by Symbol
Table 3 Gases Sorted by Symbol
Code Gas Name Symbol Formula Synonym Ref
8 Air Air 1
226 Aluminum Trifluoride AlF3 AlF
3
2
4 Argon Ar Ar 1
242 Arsenic Tribromide AsBr3 AsBr
3
2
216 Arsenic Trichloride AsCl3 AsCl
3
2
195 Arsenic Trifluoride AsF3 AsF
3
2
96 Arsenic Pentafluoride AsF5 AsF
5
2
35 Arsine AsH3 AsH
3
1
196 Arsenic Triiodine AsI3 AsI
3
2
248 Tetrachlorodiborane B2Cl4 B
2
Cl
4
2
249 Tetrafluorodiborane B2F4 B
2
F
4
2
58 Diborane B2H6 B
2
H
6
1
198 Borazine B3N3H6 H
3
B
3
N
3
H
3
14
239 Pentaborane(11) B5H11 B
5
H
11
2
142 Pentaborane B5H9 B
5
H
9
2
79 Boron Tribromide BBr3 BBr
3
1
70 Boron Trichloride BCl3 BCl
3
1
48 Boron Trifluoride BF3 BF
3
1