semi合集-English.pdf - 第6465页
SEMI G77-0699 © SE MI 1999 6 Table 1 Dime nsions for Frame Cassette Symbol Value Specified Datum Measure d From Feature Me asured To θ ‡ 45 ± 0.5° either vertic al datum plane side s of position and orienta tion notches …
SEMI G77-0699 © SEMI 19995
bilateral
datum plane
y
1 =193
±
0.25
x
1
≤
203.5
x
2
≤
240 (at human handle)
bottom
rail
x
56 = 194.75
±
0.25
x
57
≤
187
facial
datum
plane
x
13 = 88.5
x
14 = 118.5
y
18 = 40.2
y
19
= 61.1
r13
≥
2.5
r
13
≥
2.5
y
9 = 92.5
y
10 = 123.5
x
17 = 17.5
kinematic
coupling
pins
carrier
sensing
pads
human
handle
(optional)
front side where tape
frames are accessed
rear cover
y
5
≤
200
y
2 = 193
±
0.25
Figure 5
Bottom View of Frame Cassette
SEMI G77-0699 © SEMI 1999 6
Table 1 Dimensions for Frame Cassette
Symbol Value Specified Datum Measured From Feature Measured To
θ‡
45 ± 0.5° either vertical datum plane sides of position and orientation notches
r13† 2.5 mm
2.6 minimum
line segment along center of
cassette sensing pad
edge of cassette sensing pad
x1 203.5 mm
maximum
bilateral datum plane outer surface of frame cassette (without
handles)
x2 240 mm
maximum
bilateral datum plane furthest reach of human handles
x3 177 mm
minimum
187 mm
maximum
bilateral datum plane inside edge of tape frame support
x4 191.5 ± 0.3 mm bilateral datum plane inside wall of frame cassette
x13† 88.5 mm bilateral datum plane
near end of line segment along center of
front cassette sensing pads
x14† 118.5 mm bilateral datum plane far end of line segment along center of
front cassette sensing pads
x17† 17.5 mm bilateral datum plane line segment along center of rear cassette
sensing pads
x41‡ 30 ± 1 mm bilateral datum plane front right orientation notch on robotic
handling flange
x42‡ 50 ± 1 mm bilateral datum plane front left orientation notch on robotic
handling flange
x43‡ 50 ± 1 mm bilateral datum plane rear orientation notch on robotic handling
flange
x44‡ 53 mm
maximum
bilateral datum plane encroachment of box underneath robotic
handling flange
x45‡ 65.3 ± 1 mm bilateral datum plane
nearest point of side position and
orientation notches on robotic handling
flange
x46‡ 71 ± 1 mm bilateral datum plane sides of robotic handling flange
x47‡ 58 mm
minimum
bilateral datum plane end of robotic handling flange front and
rear
x56‡ 194.75 ± 0.25 mm bilateral datum plane outside edge of bottom rails
x57 187 mm
maximum
bilateral datum plane box sides underneath bottom rails
y1 193 ± 0.25 mm facial datum plane front outside edge of frame cassette
y2 193 ± 0.25 mm facial datum plane back outside bottom edge of frame
cassette
SEMI G77-0699 © SEMI 19997
Symbol Value Specified Datum Measured From Feature Measured To
y5 200 mm
maximum
facial datum plane rear outside edge of frame cassette
including rear cover
y9† 92.5 mm facial datum plane
front end of line segment along center of
rear cassette sensing pads
y10† 123.5 mm facial datum plane
rear end of line segment along center of
rear cassette sensing pads
y18† 40.2 mm facial datum plane
near end of line segment along center of
front cassette sensing pads
y19† 61.1 mm facial datum plane
far end of line segment along center of
front cassette sensing pads
y41‡ 30 ± 1 mm facial datum plane
left orientation notch on robotic handling
flange
y44‡ 53 mm
maximum
facial datum plane
encroachment of frame cassette
underneath robotic handling flange
y45‡ 65.3 ± 1 mm facial datum plane nearest point of front and rear position and
orientation notches on robotic handling
flange
y46‡ 71 ± 1 mm facial datum plane front and rear edge of robotic handling
flange
y47‡ 58 mm
minimum
facial datum plane end of robotic handling flange sides
z1 183 mm
maximum
13-frame cassette
303 mm
maximum
25-frame cassette
facial datum plane top of frame cassette
z2† 2 mm
maximum
horizontal datum plane bottom of frame cassette sensing pads
z3 23 mm
maximum
horizontal datum plane internal floor of frame cassette
z4 33 mm horizontal datum plane bottom nominal film frame seating plane
z5 10 mm each nominal film frame seating
plane
adjacent nominal film frame seating
planes
z65 mm
minimum
bottom of film frame support top of film frame support below
z7 10 mm
minimum
top surface of the top frame
support
internal ceiling of frame cassette
z8 15 mm
minimum
horizontal datum plane top of x56 and y1 dimension controlled
area
z9 215 mm horizontal datum plane bottom nominal film frame seating plane
of top stacked cassette (13 slot only)
z12 0 ± 0.5 mm
each nominal tape frame seating
plane
bottom of the tape frame