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SEMI T8-0698 E © SEMI 1998, 2004 1 SEMI T8-0698 E (Reapproved 1104) SPECIFICATION FOR MARKING OF GLASS FLAT PANEL DISPLAY SUBSTRATES WITH A TWO-DIMENS IONAL MATRIX CODE SYMBOL This specificati on was technically r eappro…

SEMI T7-0303 © SEMI 1997, 2003 4

Figure 4

Data Matrix Code Symbol Location on Back Surface of Notched 300 mm Diameter Wafer

NOTE 1: The peripheries are of wafers of nominal diameter with nominal notch dimensions. The dots of the finder pattern are

shown for an 8 row x 32 column data matrix code symbol with 125 µ m spacing.

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

of the standards set forth herein for any particular application. The determination of the suitability of the standard is

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product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are

subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require the use of copyrighted

material or of an invention covered by patent rights. RVSI Acuity CiMatrix has filed a statement with SEMI

asserting that the patented or copyrighted item can be used by the public for the purpose of implementing this

standard without specific license and without payment of royalty or other charge. Attention is also drawn to the

possibility that some elements of this standard may be subject to patented technology or copyrighted items other

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responsible for identifying any or all such patented technology or copyrighted items. By publication of this

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SEMI T8-0698

(Reapproved 1104)

SPECIFICATION FOR MARKING OF GLASS FLAT PANEL DISPLAY

SUBSTRATES WITH A TWO-DIMENSIONAL MATRIX CODE SYMBOL

This specification was technically reapproved by the Global Traceability Committee and is the direct

responsibility of the North American Traceability Committee. Current edition approved by the North

American Regional Standards Committee on August 16, 2004. Initially available at www.semi.org

September 2004; to be published November 2004. Originally published June 1998.

1 Purpose

1.1 This specification is intended to provide a marking

symbology that can be used to mark glass flat panel

display (FPD) substrates within the fixed quality area of

the edge exclusion area of the substrate.

2 Scope

2.1 This specification defines the geometric and spatial

relationships and content (including the error checking

and correcting code) of rectangular two-dimensional (2-

D), machine-readable, binary Data Matrix symbology

for front-surface or back-surface marking of glass FPD

substrates (sometimes called “motherglass” substrates)

which comply with the edge specifications of SEMI

D12. It may be used in conjunction with the

alphanumeric marking codes specified in SEMI M12

and SEMI M13 or the bar code specified in SEMI T1.

2.2 Although this specification does not specify the

marking techniques that may be employed when

complying with its requirements, it is assumed that the

symbol will be obtained by laser scribing individual

dots. A survivability experiment executed by the United

States Display Consortium found such marks suitable.

NOTE 1: Other techniques could include resist exposure and

grit blasting.

2.3 Data Matrix symbology is applicable to a broad

range of FPD products including virgin substrates,

processed and patterned substrates, panel assemblies,

and displays. An application note describes the

application of Data Matrix symbology to individual

panel sections contained within a multi-panel

motherglass substrate. The format and algorithms of

this code are based on two-dimensional symbology

specified in AIM International Symbology

Specification - Data Matrix.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI D12 — Specification for Edge Condition of Flat

Panel Display (FPD) Substrates

SEMI M12 — Specification for Serial Alphanumeric

Marking of the Front Surface of Wafers

SEMI M13 — Specification for Alphanumeric Marking

of Silicon Wafers

SEMI T1 — Specification for Back Surface Bar Code

Marking of Silicon Wafers

3.2 AIM International Technical Specifications

AIM International Symbology Specification - Data

Matrix

3.3 ANSI Standard

ANSI MH10.8.2 — Data Application Identifier

Standard

3.4 Uniform Commercial Council Standard

Manufacturer Identification Codes

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

4.1 Definitions

4.1.1 alignment bar, of a data matrix code symbol — a

solid line of contiguous filled cells abutting a line of

alternatively filled and empty cells (AIM International

Symbology Specification - Data Matrix).

1 AIM International, Inc., 634 Alpha Drive, Pittsburgh, PA 15238-

2802, tel 412.963.8588, fax 412.938.8753

2 American National Standards Institute, Headquarters: 1819 L

Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020;

Fax: 202.293.9287, New York Office: 11 West 42nd Street, New

York, NY 10036, USA. Telephone: 212.642.4900; Fax:

212.398.0023, Website: www.ansi.org23

3 Uniform Code Council, 7887 Washington Village Drive, Suite 300

Dayton, OH 45459 Telephone: 937.435.3870, Fax: 937.435.7317,

Website: info@uc-council.org

SEMI T8-0698

4.1.2 binary values — a dot in the substrate surface

indicates the binary value 1. The absence of a dot, or a

smooth surface surrounding a cell center point,

indicates the binary value 0.

4.1.3 border column — the outermost column of a data

matrix code symbol. This column is a portion of the

finder pattern.

4.1.4 border row — the outermost row of a data matrix

code symbol. This row is a portion of the finder pattern.

4.1.5 cell, of a data matrix code symbol — the area

within which a dot may be placed to indicate a binary

value.

4.1.6 cell center point, of an array — the point at

which the centerline of a row intersects the centerline of

a column.

4.1.7 cell spacing, of an array — the (equal) vertical or

horizontal distance between the cell center points of

contiguous cells.

4.1.8 center line, of a row or column — the line

positioned parallel to, and spaced equally between, the

boundary lines of the row or column.

4.1.9 central area, of a cell — the area enclosed by a

circle centered at the cell center point; used by code

readers to sense the binary value of the cell.

4.1.10 data matrix code symbol — a two-dimensional

array of square cells arranged in contiguous rows and

columns. In certain ECC200 symbols, data regions are

separated by alignment patterns. The data region is

surrounded by a finder pattern (AIM International

Symbology Specification - Data Matrix).

4.1.11 dot — a localized region with a reflectance

which differs from that of the surrounding surface.

NOTE 2: To assure reading efficiency, a minimum contrast

of 30% is required between the reflectance value of a dot and

the surrounding substrate surface. Various densitometers can

provide such measurements non-destructively.

4.1.12 dot misalignment, within a cell — the distance

between the physical center point of a dot and the cell

center point.

4.1.13 finder pattern, of a data matrix code symbol —

a perimeter to the data region. Two adjacent sides

contain dots in every cell; these are used primarily to

define physical size, orientation, and symbol distortion.

The two opposite sides are made up of cells containing

dots in alternate cells (AIM International Symbology

Specification - Data Matrix).

4.1.14 reference point, of a data matrix code symbol —

the physical center point of a cell common to a

designated row and column, used to identify the

physical location of the symbol on the object being

marked with the symbol.

NOTE 3: The reference point is at a fixed location on the

object. Different cells may be chosen as the reference point,

depending on the desired orientation of the symbol on the

object and on the size variability of the symbol. The particular

cell to be used as the reference point must be specified for

each application.

5 Ordering Information

5.1 Purchase orders for substrates furnished to this

specification shall include the following items:

5.1.1 Message Characters

5.1.1.1 Quantity (15 to nn, where nn is 16–46, and

depends on the character set to be encoded [see Table

2]).

5.1.1.2 Content of Message Characters 16 and up, if

present.

6 Requirements

6.1 Shape and Size of the Data Matrix Code Symbol

6.1.1 Data Matrix Code Symbol Dimensions

6.1.1.1 Each rectangular matrix code symbol shall be

composed of an array of 8 to 16 rows and 32 to 46

columns (see Table 1 and Figure 1) as defined in AIM

International Symbology Specification - Data Matrix. It

may contain an alignment bar.

6.1.1.2 Cell spacing shall be 125 µm, center to center.

6.1.2 Dot Size — the nominal shape of the dot

produced in the matrix may be circular or square. Its

diameter or edge length shall be 100 ± 10 µm.

6.1.3 Border Rows and Columns (see Figure 3)

6.1.3.1 One border row and one border column shall

contain a dot in each cell. These are identified as the

primary border row and the primary border column.

These are used by the code reader to determine the

orientation of the matrix.

6.1.3.2 The opposing (secondary) border row and

column shall contain dots in alternating cells.

6.1.3.3 For these rectangular matrix code symbols, the

reference point of the symbol shall be the physical

centerpoint of the cell common to the primary border

row and the primary border column.

6.1.4 The maximum allowable dot misalignment

within a cell is 20 µm. This ensures that a minimum

size dot covers a cell central area of radius 25 µm.