semi合集-English.pdf - 第1127页

SEMI E5-1104 © SEMI 1982, 2004 69 Stream,Function Name (Mnemonic) Direction S2,F13 Equipment Constant Request (ECR) S,H->E,rep ly Description Constants such as for calibration , servo gain, alarm limits, data collecti…

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SEMI E5-1104 © SEMI 1982, 2004 68
Stream,Function Name (Mnemonic) Direction
S2,F10 Service Program Results Data (SRD) M,H<-E
Description
Get the results back
Structure
<SPR>
Exception
A zero-length item means SPR does not exist.
Stream,Function Name (Mnemonic) Direction
S2,F11 Service Program Directory Request (SDR) S,H<->E,reply
Description
There may be more than one service program.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F12 Service Program Directory Data (SDD) S,H<->E
Description
A list of service program names.
Structure
L,n
1. <SPID
1
>
.
.
n. <SPID
n
>
Exception
If n = 0, there are no service programs.
SEMI E5-1104 © SEMI 1982, 2004 69
Stream,Function Name (Mnemonic) Direction
S2,F13 Equipment Constant Request (ECR) S,H->E,reply
Description
Constants such as for calibration, servo gain, alarm limits, data collection mode, and other values that are changed infrequently
can be obtained using this message.
Structure
The following structure is approved for all item formats and should be used by all new
implementations:
L,n
1. <ECID
1
>
.
.
n. <ECID
n
>
The following structure is included for compatibility with previous implementations
and may only be used for items of format 3() and 5():
<ECID
1
, . . . , ECID
n
>
Exception
A zero-length list (structure1) or item (structure2) means report all ECVs according to a predefined order.
Stream,Function Name (Mnemonic) Direction
S2,F14 Equipment Constant Data (ECD) M,H<-E
Description
Data Response to S2,F13 in the order requested.
Structure
L,n
1. <ECV
1
>
2. <ECV
2
>
.
.
n. <ECV
n
>
Exception
A zero-length list item for ECV
i
means that ECID
i
does not exist. The list format for this data item is not allowed, except in this
case.
SEMI E5-1104 © SEMI 1982, 2004 70
Stream,Function Name (Mnemonic) Direction
S2,F15 New Equipment Constant Send (ECS) S,H->E,reply
Description
Change one or more equipment constants.
Structure
L,n
1. L,2
1. <ECID
1
>
2. <ECV
1
>
2. L,2
.
.
n. L,2
1. <ECID
n
>
2. <ECV
n
>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F16 New Equipment Constant Acknowledge (ECA) S,H<-E
Description
Acknowledge or error If EAC contains a non-zero error code, the equipment should not change any of the ECIDs specified in
S2F15.
Structure
<EAC>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F17 Date and Time Request (DTR) S,H<->E,reply
Description
Useful to check equipment time base or for equipment to synchronize with the host time base.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F18 Date and Time Data (DTD) S,H<->E
Description
Actual time data
Structure
<TIME>
Exception
A zero-length item means no time exists.