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SEMI PR8-0703 © SEMI 2003 28 R3-1.1.3 Equipment Health Monitori ng from Analog Data an d Low Level Equipment Data R3-1.1.3.1 This example descri bes a hea lth check of vacuum level for each wafer. Step Description Assort…
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Table R3-1 Possible Data Life Cycle Scenarios
Steps Description
Generation Generation of data which can be reported out of the equipment.
Assortment 1 Least value adding processing for data handling; give tag such as name or index or time stamp.
Assortment
2, 2-1, 2-2
Make collected data be easily utilized by applications; linkage with other data or any value
adding data processing (calculation of average, max. or min.).
Storage Store EE data for a certain period of time.
May provide query function from the higher level applications.
This includes storage of value added data created by assortment 2.
Report Output by a certain application to viewers or in the form of files.
R3-1.1.1.2 The form of the data may vary depending on how much capability the equipment has to process the data,
or on the resolution that the application requires.
R3-1.1.1.3 Above data life cycle schematic show that:
1) The data resolution requirement varies with data itself, the application, or the system.
• Detailed equipment data such as detailed equipment event data (DEE)
• Data associated with JOB information
• Processed and value added data
2) Data acquisition method may vary.
• Trace data requirement
• Query (this is not the scope of this standard)
• Subscription by application
R3-1.1.2 Example of Data Life Cycle for Low Level Data such as Detailed Equipment Data (DEE)
R3-1.1.2.1 This example describes how the Calculation of equipment utilization Data for EPT and STS may be
generated from low level equipment data.
Step Description
Assortment
1
Input data is I/O event data of sensors and actuators.
Give name and time stamp.
Assortment
2-1
From the consequence abstract the sequence start and stop events. Link with equipment structure model or
JOB information.
Assortment
2-2
Calculate necessary indices.
Storage Store calculated data. Provide subscription capability to show past data.
Report Report or show.
Scenario Function/application in equipment Higher level applications
Scenario 1 Give elementary data its name and time stamp. Detect necessary sequence starts and stops so as to
calculate necessary indices. Report formation
function.
Scenario 4 Calculation for EPT/STS embedded in equipment and
put out data.
Application acquires the result of equipment
utilization calculation, and this application only has
viewer output function.
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R3-1.1.3 Equipment Health Monitoring from Analog Data and Low Level Equipment Data
R3-1.1.3.1 This example describes a health check of vacuum level for each wafer.
Step Description
Assortment 1 Input is analog data from vacuum gauge and time stamp will be given.
Assortment
2-1
Input is detailed equipment event data, and pump down sequence is detected for starts and ends, and these events
are linked with JOB information and with carrier ID, slot ID and so on.
Assortment
2-2
The vacuum level is compared with reference data per wafer so as to examine if there is vacuum level
deterioration.
Storage Vacuum level data, its consequence or context, and the result of judgment are stored for a certain period of time.
This provides subscription function from the higher level application.
Report Application acquires the result, and this application has viewer output function.
Scenario Function/application in equipment Higher level applications
Scenario 1 Low level data such as detailed equipment event data is
given timestamp.
Pump down sequence is detected for starts and ends,
compare with reference data per wafer so as to detect
any problem.
Problem will be reported.
Scenario 3 Pump down sequence is detected for starts and ends,
compare with reference data per wafer so as to detect
any problem.
Acquire result of malfunction detection from equipment.
Show the result.
R3-1.1.4 Data Available from EDA Port
R3-1.1.4.1 The data available from the EDA port contains some reporting information such as EPT. These reports
are high-level equipment management information utilized by the fab-wide productivity monitoring application.
Logical model based data includes the status, for example, of the load port, or job status (CJ and PJ). These data
have the data life cycle of scenario #3.
R3-1.1.4.2 The other type of the data available from the EDA port is equipment data such as I/O status, sensor data,
and all the equipment constants. These data have the data life cycle of scenarios #1 and #3.
R3-1.1.4.3 Both areas of data should be available for efficient equipment management and OEE improvement.
Data covered and value added by
EPT , ST S, A R AM S Stan dard s an d
gLogical Model Based Datah
gEle m en ta ry Da tah
and health monito ring
I/O even ts, Sen sor data, equipment
con stan ts and such
Data covered and value added by
EPT , ST S, A R AM S Stan dard s an d
CJ/PJ
Ho st view d ata fo r
Equipment M anagement
Logical Model Based Data
Ele m en ta ry Da ta
Eq u ip men t view data fo r diag no stics
Life Cycle Scenario 3
Life Cycle Scenario 1, 3
I/O even ts, Sen sor data, equipment
con stan ts and such
Se ttin g Da ta
Valu es to control
Eq uip m en t so to
perform intended
process
Data covered and value added by
EPT , ST S, A R AM S Stan dard s an d
gLogical Model Based Datah
gEle m en ta ry Da tah
and health monito ring
I/O even ts, Sen sor data, equipment
con stan ts and such
Data covered and value added by
EPT , ST S, A R AM S Stan dard s an d
CJ/PJ
Ho st view d ata fo r
Equipment M anagement
Logical Model Based Data
Ele m en ta ry Da ta
Eq u ip men t view data fo r diag no stics
Life Cycle Scenario 3
Life Cycle Scenario 1, 3
I/O even ts, Sen sor data, equipment
con stan ts and such
Se ttin g Da ta
Valu es to control
Eq uip m en t so to
perform intended
process
Figure R3-2
Data Available from EDA Port
R3-1.1.4.4 In the case where the equipment sends out equipment data right after “assortment 1”, the application
above EDA interface needs to have such functions as to link the equipment data with JOB information, to compare
the data with some threshold values, or to calculate for statistic data abstraction. JOB information, the setting values
which may be described in the recipes or used in the equipment internally, the equipment control structure, or the
data naming conventions are to be made available through EDA port or some other means.
R3-1.1.4.5 The data that are supposed to be made available through the EDA port are listed below.
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1) Control Job related
1. ControlJob ID
2. CarrierInputSpec: Carrier ID list
3. ProcessingCtrlSpec: PRjob list
4. ProcessOrderMgmt: PRjob execution sequence
5. MtrlOutSpec: Wafer origin and target specification
2) PR Job related
1. PRJobID
2. PRMtlType: Unit of material
3. PRMtlNameList: material name list
4. RecID
5. RecVariableList: Variable parameter name list and values
6. PRProcessStart: start method
NOTE 1: If process condition is changed, the content is to be reported for the name of parameters and values.
3) Recipe related
1. Recipe ID
2. Recipe body (detailed content)
3. Setting value data the equipment use internally for each of the process control devices (temperature
controllers, mass flow controllers and such)