semi合集-English.pdf - 第5151页
SEMI M31-0705 © SEMI 1998, 2005 11 facial datum pl ane horizontal datum of box nest or load port pl ane y 53 190 y 52 165 ± 0.5 mm (6.52 ± 0.02 in.) y 50 130 (numbers in paren theses are for 25-wafer FOSB , if d…
SEMI M31-0705 © SEMI 1998, 2005 10
Value Specified Symbol
Used
Figure
Number
Manual Door Auto-door
Datum Measured from Boundary or Feature Measured to
z8 3, 4, 7 44 mm (1.73 in) horizontal datum plane bottom nominal wafer seating plane
z10 5, 6 0 ± 0.5 mm
(0.00 ± 0.02 in.)
each nominal wafer seating
plane
entire bottom of the wafer
z11 5, 6 See Table 1. each nominal wafer seating
plane
encroachment of FOSB side domains on
clearance above the wafer
z12 3, 4, 5, 6, 7 See Table 1. each nominal wafer seating
plane
adjacent nominal wafer seating planes
z15 3, 4, 5 13 mm (0.51 in.) minimum top nominal wafer seating
plane
bottom of FOSB top domain
z23 5 3 mm (0.12 in.) maximum each nominal wafer seating
plane
bottom of wafer extraction volume
z29 6 0.7 mm (0.028 in.) maximum each nominal wafer seating
plane
encroachment of FOSB side domains
under wafer extraction volume
#1
These dimensions are for optional features.
5.11 External Dimensions — Figures 8 through 12 respectively show the side view, rear view, top view, robotic
flange, and bottom view for the front-opening FOSB. Table 3 defines all of the dimensions. If an identification tag is
used, it must be located at the bottom rear centered on the bilateral datum plane and must be contained within the
maximum outer dimensions of the FOSB.
5.12 Human Handles — All handles for use by humans must either be contained within the maximum outer
dimensions of the FOSB, be detached when not in use, or be retractable into the maximum outer dimensions when
not in use. Although such handles may extend past x53, they must still be contained within x50, y40, and r67.
Handles for use by humans (if present) must follow SEMI S8, and they must require the use of both hands (each
using a full wrap-around grip, given the minimum clearance requirement in SEMI E15.1). Automation handling
features shall not be considered dual purpose unless they are designed to meet SEMI S8 guidelines.
5.13 Automation Handling — On the top of the FOSB, there is an optional robotic handling flange for manipulating
the FOSB as illustrated in Figure 12 On the bottom of the FOSB, there are optional rails for use with roller
conveyors or forklifts. Although they are only required to extend y58 to the left and right, it is recommended that
they be as long as possible. Beyond y58, only the lower bound on z43 apply. These optional conveyor rails (defined
by x56, x57, and z43) are located on the left and right bottom edges of the front-opening shipping box. The
conveyor rails also have vertical cylindrical pin holes for fork lift centering (defined by d65).
SEMI M31-0705 © SEMI 1998, 2005 11
facial
datum plane
horizontal datum of
box nest or load
port plane
y53 190
y52 165 ± 0.5 mm
(6.52 ± 0.02 in.)
y50 130
(numbers in parentheses are for 25-wafer FOSB, if different)
y46
= 71 ± 1
y44
53
z49
8
z48
15
z47
= 210
(330)
± 1
y40
116
human
handle
(optional)
front side
of the
FOSB
where
wafers
are
accessed
y
58 75
z
41 0
z
2 2
(
at sensor
p
ads
)
d
65 =10±0.5
z
65 7
z43 = 2 ± 1
Figure 8
Side View of FOSB
bilateral datum plane
(numbers in parentheses are for 25-wafer FOSB, if different)
horizontal datum plane of
box nest or load port
x
53
195 (elsewhere)
x
46
= 71 ± 1
x
44
53
z
49
8
z
48
15
z
47
= 210
(330)
± 1
human
handle
(optional)
z
41
0
z
2
2
(at sensor pads)
z
43 = 2 ± 1
bottom rail
x
57
180
d65
= 10± 0.5
z
65 7
x
65 = 187.5
x
56 = 194.75(at bottom rail)
x
50
215 (at human handle)
Figure 9
Rear View of FOSB
SEMI M31-0705 © SEMI 1998, 2005 12
human
handle
(optional)
y53
190
y52 =
165.5 ± 0.5 mm
(6.52 ± 0.02 in.)
bilateral
datum plane
front side of the FOSB where wafers are accessed
y51
50
y50
130
x50 215 (at human handle)
x53 195 (elsewhere)
r67 240
facial
datum
plane
y40
116
y67
= 25
detail in
Figure 12
r68 271
x81 215
y82
191
y81
30
x81 215
Manual door exclusion zone
Figure 10
Top View of FOSB