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SEMI E53.1-0704 © SEMI 1996, 2004 3 NOTICE: SEMI makes no warranties or representations as to the suitability o f the standards set forth herein for any particular application. The determination of the suitability o f th…

SEMI E53.1-0704 © SEMI 1996, 2004 2

6 Event Parameters Mapping

Table 2 Event Service Parameter Mapping

Parameter SECS-II Data Item or Object Attribute

ErrorCode ERRORCODE

ErrorText ERRTEXT

ReportID RPTID

DataSrcSpec DATASRC

CollEventID CEID

EvtSrcSpec EVNTSRC

Enabled CEED

(list of) AttrName (list of) VID

ReportChangeOnly RPTOC

TraceID TRID

SamplePeriod TRSPER

TotalSamples TOTSMP

GroupSize REPGSZ

StartEventID CEID

StopEventID CEID

AutoDelete TRAUTOD

7 Implementation Details

7.1 Many of the messages of the Event Reporting

Standard are implemented with currently defined

SECS-II messages. Certain restrictions must be applied

to their usage. These restrictions are specified in this

section.

7.2 To be OSS-compliant, the following data items

must use the format 20 specification:

• RPTID

• CEID

• TRID

• VID

7.2.1 The format of the ASCII strings shall conform to

the Object identifier specifications in the Object

Services Standards, document SEMI E39 and SEMI

E39.1.

7.3 Each Data Report sample, whether stand alone or

as part of an Event or Trace report, will report

TIMESTAMP as the first item in its list of report

variables and/or object attributes. This means for

reports defined by the service user, the user should

define TIMESTAMP as the first VID in the report

definition. Further, all of the service provider’s

predefined reports shall deliver the value of

TIMESTAMP in the first V.

7.4 Serveral capabilities of the Event Reporting

Standard are accessed through the Object Services

Standard. When an instance of a report (Report, Event,

or Trace) object has been created, then its attributes can

be read and written using the Object Service’s GetAttr

and SetAttr messages.

7.4.1 Object Services shall be used to set RPTOC and

to get CHGND.

7.4.2 Object Services shall be used to set or clear

CEED.

7.4.3 EVNTSRC shall be provided in supplier

documentation or as a list of Event Sources obtained by

using Object Services to interrogate the Collection

Event Object, COLLEVENT, with the GetAttrName

request message.

7.5 Event Reporting Services is protocol independent

and therefore, makes no mention of SECS-II multi-

block access and grant messages. When the Event

Reporting Services use the SECS-II protocol, then

S6F11,F13 shall be preceded by S6F5 if a report will be

multi-block. Trace Report Send, S6F27 shall also use

the multi-block access/grant transaction if the report

will be multi-block.

SEMI E53.1-0704 © SEMI 1996, 2004 3

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E54-0705

SENSOR/ACTUATOR NETWORK STANDARD

This standard was technically reapproved by the Global Information and Control Committee and is the direct

responsibility of the North American Information and Control Committee. Current edition approved by the

North American Regional Standards Committee on March 14, 2004. Initially available at www.semi.org

May 2004; to be published July 2004. Originally published in 1997; previously published March 2003.

NOTICE: The designation of SEMI E54 was updated during the 0705 publishing cycle to reflect the creation of

SEMI E54.16 and SEMI E54.17.

NOTICE: The document that was previously designated as SEMI E54 (Standard for Sensor/Actuator Network

Common Device Model) has been redesignated as SEMI E54.1. Because the Sensor/Actuator Network Standard is

the parent document, it has been designated as SEMI E54.

1 Purpose

1.1 This specification provides the structure of SEMI’s Sensor/Actuator Network (SAN) standard. It provides the

definition for interoperability with respect to SEMI SAN standard-compliant Sensor/Actuator devices.

2 Scope

2.1 This standard specifies how devices interoperate on a network as part of the control system for equipment.

2.2 This specification, which is the root of the SAN standard, defines the relationships of each of the other

specifications that are components of the SEMI SAN standard.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model

3.2 Other Documents

ISO 7498

— Basic Reference Model for Open Systems Interconnection (OSI)

James Rumbaugh, Michael Blaha, William Premerlani, Frederic Eddy, William Lorensen, Object-Oriented

Modeling and Design, Englewood Cliffs, New Jersey: Prentice-Hall, 1991.

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

4 Terminology

4.1 Abbreviations & Acronyms

4.1.1 API — Applications Programming Interface

4.1.2 CDM — Common Device Model. The root object application model for devices on the sensor bus.

4.1.3 DM — DeviceManager. An object specified in SEMI E54.1 (Standard for Sensor/Actuator Network Common

Device Model).

1 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.

Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30

Website: www.iso.ch