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SEMI E38-1296 © SEMI 1995 , 1996 9 • process m odule (PM)— prov ides manuf ac turing value to material • transport module (TM) — transfers material withi n cluster • cassette module (CM) — e xchanges material with factor…

SEMI E38-1296 © SEMI 1995, 1996 8

Figure 4

Object Designation

In addition to OMT conventions (see Section 5.2), each

object in the information models has one of three

designations: service objects with standardized

attributes (thick border); other objects described in the

sub-section (medium border); and objects described in

other subsections but included to show significant

relationships (thin border).

The models are process- and configuration-independent

and do not dictate the internal architecture of the

controlled modules beyond the physical requirements of

cluster tools.

The first two models show major entities of the

processing equipment and material being processed.

Subsequent models are oriented towards one of the

major functional domains.

7.1.1 Cluster Tool Module Model — The fundamental

component of a cluster tool is the module. Figure 5

shows that there are three module types within a cluster

tool:

Figure 5

Cluster Tool Module Information Model

SEMI E38-1296 © SEMI 1995, 19969

• process module (PM)— provides manufacturing

value to material

• transport module (TM) — transfers material within

cluster

• cassette module (CM) — exchanges material with

factory

A cluster tool must contain one or more of each of these

module types, as each performs a critical function in the

cluster tool mission. Any module can contain

processing resources.

Supervisory control within the cluster tool is the

responsibility of the cluster controller. The cluster

controller achieves this by supervising the various

module resources using the standard communications

services. It is the primary service-user in the cluster

tool. The form of the cluster controller is not specified

in this standard. It may be a single platform, distributed,

or incorporated with one or more modules.

A module contains and coordinates a number of module

resources dedicated to fulfilling a particular control

function. Each module resource contains at least one

material location, which may or may not contain

material. Note that the location for material processing

is defined separately from the location where the

material is received or sent. This may be virtual if they

are physically the same position, but they cannot be

assumed to be so as this would exclude certain

architectures.

The purpose of each type of module is described in

detail below.

Cassette Module — The component of a cluster used to

interface the cluster to the rest of the factory. It

provides material input and output for the cluster. It

makes only one material at a time available to the

cluster transport (the intratool environment), regardless

of how the material enters the cassette module from

outside the cluster (the intertool environment). It is a

specialization of attached module (AM).

Process Module — A process module is any component

within a cluster which provides one or more steps of

material processing for the cluster system. Material

enters the process module through an interface flange,

undergoes some transformation, and exits through the

same or another interface flange. It is also a

specialization of attached module (AM).

Transport Module — The transport module is

responsible for transfer of material from one cluster-

attached module to another. It consists of a robotic

handler capable of exchanging material with each of the

attached modules at the interface flanges. It can be a

variety of physical topologies (radial or linear, for

example). In SEMI standard cluster tools, the transport

module has an interface isolation valve at each point of

attachment to the attached modules. The transport

module is responsible for managing constraints on the

simultaneous opening of isolation valves as it relates to

contamination of the transport module's environment by

that of an attached module, as well as cross

contamination between attached modules.

The attributes of modules and related objects in Figure

5 are not standardized as these objects are equipment

and process-dependent.

7.1.2 Material Model — Material is received from the

factory, in a carrier or singly, at an intertool port

resource. They are transported within the cluster and

processed by processing resources. Once processed,

they are returned to the factory at the same, or another,

intertool port resource.

The processing which is to be performed on material is

determined from the process specification for that

material.

The material model in Figure 6 establishes the

relationships between the material and material

locations. Two material types are of interest in cluster

tool module communications, single material and

carriers. Single material may be grouped in carriers.

This is modeled by defining the material slot object,

which is a type of material location. A carrier is made

up of an ordered set of material slots. A single material

occupies a material slot when in the carrier. In addition,

a single material may be assigned a particular material

slot which it does not yet occupy, indicating that it is to

be received into that material slot when it arrives.

Figure 6

Material Information Model

Carriers may be cassettes used to transport single material in the factory and to input single material to the cluster

tool, or they may be material boats in batch process modules.

The attributes of the material slot object are standardized to enable mapping of single material in carriers. Other

objects in the diagram are not standardized. However, the identifier of the material, MaterialID, is an attribute of the

material slot object.

Other materials (consumable gases and fluids, etc.) are present in the cluster tool, but outside the scope of these

standards.

7.1.3 Material Processing Model — The material processing model in Figure 7 shows the use of the process job to

direct the processing resource to apply the appropriate process, as specified by the recipe, to one or more materials

in a process module. A processing resource in a process module has processing capabilities which are specified by

corresponding recipes.

Figure 7

Material Processing Information Model

A process job can control multiple material only if identical processing is applied to all. Processing should begin and

end simultaneously, synchronized with the arrival of the whole group of material.

The process job lifecycle extends beyond the active processing of the material. It exists from just before material

arrival at the intratool port resource, through setup and processing, and until just after the material departure at the

same, or another, intratool port resource. This allows for material-related pre-conditioning and post-conditioning of

the processing resource before the material is received and after it is sent. As material input and output is controlled

by the intratool port resource, it is the responsibility of the process module to ensure coordination of the intratool

port and processing resources.

This is the model used to establish the Processing Management definition. There is no standardization beyond

creation and control (starting, canceling, stopping, aborting, and pausing) of the high-level process job since the

low-level control of process modules is application-dependent.

There is a component of scheduling embodied in this model. The material, recipes, and processing resources are

scheduled by the cluster controller according to the process specification to a particular process module through the

use of the process job. In order to perform the required processing, material is transferred to the processing resource,

as directed by the cluster controller.