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SEMI M31-0705 © SEMI 1998, 2005 19 Value Specified Symbol Used Figure Number Manual Door Auto-Door Datum Measured from Feature Measured to z 47 #1 8, 9, 11 210 ± 1 mm (8.27 ± 0.04 in.) for 13-wafer FOSB and 330 ± 1 mm (1…

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SEMI M31-0705 © SEMI 1998, 2005 18
Value Specified Symbol
Used
Figure
Number
Manual Door Auto-Door
Datum Measured from Feature Measured to
y52 2, 8, 10, 12 165.5 ± 0.5
mm (6.52 ±
0.02 in.) at
frame seal
zones and 166
mm (6.54 in.)
maximum
elsewhere on
box shell
165.5 0.5
mm (6.52
0.02 in.) at
door and frame
seal zones and
at reserved
spaces for
vacuum
application and
166 mm (6.54
in.) maximum
elsewhere on
door or box
shell
facial datum plane FOSB front
y53 8, 10, 12 190 mm (7.48 in.) maximum facial datum plane FOSB rear
y58 8, 12 75 mm (2.95 in.) minimum facial datum plane end of left and right conveyor rails
y62 13,14 28 mm
(1.10 in.) maximum
facial datum plane rear of front retaining feature
y63 13,14 37.3 ± 0.5 mm
(1.47 ± 0.02 in.)
facial datum plane rear of ramp on front retaining feature
y64 13,14 42.1 ± 0.5 mm
(1.66 ± 0.02 in.)
facial datum plane front of ramp on front retaining feature
y65 13,14 104 mm
(4.09 in.) minimum
facial datum plane front of front retaining feature
y67 10 25 mm (0.98 in.) facial datum plane origin of r67 on bilateral datum plane
y68
#1
11 55 mm (2.17 in.) maximum facial datum plane near end of the front kinematic groove
in the top robotic handling flange
y81
#2
1 30 mm (1.18
in.) minimum
not applicable facial datum plane rear edge of manual door
y82
#2
1 191 mm (7.52
in.) maximum
not applicable facial datum plane front surface of manual door
z2 8, 9, 12 2 mm (0.08 in.) maximum horizontal datum plane
b
ottom of carrier sensing pads and info
pads (when down)
z26 12 9 mm (0.35 in.) minimum horizontal datum plane bottom of info pads (when up)
z30 none 106.5 ± 0 mm
(4.19 ± 0 in.)
for 13-wafer cassette
and
166.5 ± 0 mm
(6.56 ± 0 in.)
for 25-wafer cassette
horizontal datum plane vertical centerline of port
z41 8, 9 0 mm (0 in.)
minimum
external horizontal datum
plane
bottom of FOSB
z43 8, 9 2 ± 1 mm
(0.08 ± 0.04 in.)
external horizontal datum
plane
bottom conveyor rails
SEMI M31-0705 © SEMI 1998, 2005 19
Value Specified Symbol
Used
Figure
Number
Manual Door Auto-Door
Datum Measured from Feature Measured to
z47
#1
8, 9, 11 210 ± 1 mm
(8.27 ± 0.04 in.)
for 13-wafer FOSB
and
330 ± 1 mm
(12.99 ± 0.04 in.)
for 25-wafer FOSB
external horizontal datum
plane
bottom of robotic handling flange
z48
#1
8, 9, 11 15 mm (0.59 in.) minimum
b
ottom of robotic handling
flange
encroachment of FOSB top underneath
robotic handling flange
z49
#1
8, 9, 11 8 mm (0.31 in.) maximum bottom of robotic handling
flange
top of robotic handling flange and
upper door frame volume
z50
#1
11 5 mm (0.20 in.) minimum
b
ottom of robotic handling
flange
encroachment of FOSB top underneath
the center hole in the top robotic
handling flange
z60 14 8.0 ± 0.5 mm
(0.31 ± 0.02 in.)
external horizontal datum
plane
top of slot in center retaining feature
z61 14 15 mm
(0.59 in.) minimum
external horizontal datum
plane
top of chamber above slot in center
retaining feature
z62 14 18 mm
(0.71 in.) minimum
external horizontal datum
plane
top of front retaining feature
z63 14 7.5 ± 0.5 mm
(0.30 ± 0.02 in.)
external horizontal datum
plane
top of ramp on front retaining feature
z65 8, 9 7 mm (0.28 in.) minimum horizontal datum plane upper boundary of cylindrical fork-lift
p
in holes in left and right bottom
conveyor rails
#1
These dimensions are for optional features.
#2
These dimensions pertain to the manual door only.
facial
datum
plane
center
retaining
feature
y
62
28
r
60 =16
±0.5
r
64
9.5
x
64
35
bilateral
datum
plane
x
60
=8.0±0.5
r
61 16
front
retaining
feature
y
64
=42.1
±0.5
y
63
=37.3
±0.5
x
68
25
y
65
104
Figure 13
Bottom View of Retaining Features on Bottom of FOSB
SEMI M31-0705 © SEMI 1998, 2005 20
z
61
15
z
60
= 8 ± 0.5
y
64 = 42.1 ± 0.5
z
62
18
y
62
28
y
65
104
facial
datum plane
horizontal datum plane
of load port
y
63 = 37.3 ± 0.5
= 30
± 0.5°
z
63 = 7.5
± 0.5
r 61
16 (above
z
60)
r 60 = 16 ± 0.5 (below
z
60)
front side of the box
where wafers are accessed
Figure 14
Side View of Retaining Features on Bottom of FOSB
6 Related Documents
6.1 SEMI Standards
SEMI E22.1 — Cluster Tool Module Interface 300 mm: Transport Module End Effector Exclusion Volume
Standard
SEMI E63 — Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface
SEMI M28 — Specification for Developmental 300 mm Diameter Polished Single Crystal Silicon Wafers
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.