semi合集-English.pdf - 第1288页

SEMI E5-1104 © SEMI 1982, 2004 230 Stream,Function Name (Mnemonic) Direction S16,F11 PRJobCreateEnh M,H->E,reply Description Request equipment to crea te a Process Job with t he given PRJOBI D. If mu lti-block, this m…

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SEMI E5-1104 © SEMI 1982, 2004 229
Stream,Function Name (Mnemonic) Direction
S16,F9 Process Job Event Notify (PRJE) S,H<-E,[reply]
Description
Send Processing Job related event to the controlling entity.
Structure
L,4
1. <PREVENTID>
2. <TIMESTAMP>
3. <PRJOBID>
4. L,n
1. L,2
1. <VID
1
>
2. <V
1
>
.
.
n. L,2
1. <VID
n
>
2. <V
n
>
Exception
The VID, V pairs are variable data identifiers and values; exceptions n = 0 is valid for some events (PREVENTID).
Stream,Function Name (Mnemonic) Direction
S16,F10 Process Job Event Confirm (PRJEC) S,H->E
Description
Host confirms receipt of S16,F9 message to equipment.
Structure
Header only
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 230
Stream,Function Name (Mnemonic) Direction
S16,F11 PRJobCreateEnh M,H->E,reply
Description
Request equipment to create a Process Job with the given PRJOBID. If multi-block, this message must be preceded by the
S16,F1/F2 transaction.
Structure
L,7
1. <DATAID>
2. <PRJOBID>
3. <MF>
4a. L,n [MF = carrier, n = # of carriers]
1. L,2
1. <CARRIERID
1
>
2. L,j [j = # of slots, may be implemented as an array]
1. <SLOTID
1
>
2. <SLOTID
2
>
.
.
j. <SLOTID
j
>
.
.
n. L,2
1. <CARRIERID
n
>
2. L,j [j = # of slots, may be implemented as an array]
1. <SLOTID
1
>
2. <SLOTID
2
>
.
.
j. <SLOTID
j
>
4b. L,n [MF = substrate]
1. <MID
1
>
.
.
n. <MID
n
>
5. L,3
1. <PRRECIPEMETHOD>
2. <RCPSPEC>
3. L,m [m = # recipe parameters]
1. L,2
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
.
m. L,2
1. <RCPPARNM
m
>
2. <RCPPARVAL
m
>
6. <PRPROCESSSTART>
7. <PRPAUSEEVENT>
Exception
The list for specifying material (item 4a and 4b) is empty (L,0 instead of L,n), when no material is specified for the process job.
The form of data item 4(a or b) depends on the value in MF.
SEMI E5-1104 © SEMI 1982, 2004 231
Stream,Function Name (Mnemonic) Direction
S16,F12 PRJobCreateEnh Acknowledge S,H<-E
Description
This message acknowledges the request and reports any errors in the creation of a process job.
Structure
L,2
1. <PRJOBID>
2. L,2
1. <ACKA>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
If n = 0, no errors exist.
Stream,Function Name (Mnemonic) Direction
S16,F13 PRJobDuplicateCreate M,H->E,reply
Description
Not used.
Structure
Exception
Stream,Function Name (Mnemonic) Direction
S16,F14 PRJobDuplicateCreate Acknowledge S,H<-E
Description
Not used.
Structure
Exception