semi合集-English.pdf - 第1113页

SEMI E5-1104 © SEMI 1982, 2004 55 Attribute Name Descrip tion Access Format Related Data Item Value “RecID” Object Specifier of Recipe used b y a Process Job, see SEMI E39 and SEMI E42 RO 20 - - “PRRecipeMethod” Indicate…

SEMI E5-1104 © SEMI 1982, 2004 54

Attribute Name Description Access Format Value

“ExecChgCtrl” Specifies change control requirements for recipe.

Default is 0. Combinations of bits are used to

indicate multiple permissions.

RW 10 Binary.

Bitwise (MSB = 8):

1 - the recipe body may be changed

2 - change notification required

4 - recipe may be selected after

change,

8 - most recent parameter settings

shall be saved.

Any combination of these four bits

is allowed

“ExtRef” A list of all recipe specifiers as referenced within

the recipe. Explicit versions not required. Reset

when the recipe is created, updated, and verified.

RO 00 List of items of format 20.

“LinkList” A complete list of recipe specifiers found in the

ExtRef

attribute of a main recipe and all of its

subrecipes, with duplicates removed and all

versions explicitly determined. Set for the main

recipe when linked

. Reset when the recipe is

originated or verified. Required for multi-part

recipe support.

RO 00 List of items of format 20.

“LinkParam” A list of all variable parameter definitions

contained in the Parameters

attribute of a main

recipe and all of its subrecipes, with duplicates

removed. Reset when the recipe is created,

updated, or verified. Set when the recipe is linked.

Required for variable parameter support.

RO 00 List of parameter definition

structures composed of parameter

name, initial value, and restrictions.

“Parameters” A list of variable parameter definitions contained in

the recipe. Reset when the recipe is created,

updated, and verified. Set when the recipe is

verified. Required only for variable parameter

support.

RO 00 List of parameter definition

structures composed of parameter

name, initial value, and restrictions.

“SrcRecID” Identifier of the source form recipe from which a

derived object form recipe is derived. Value

determined by the verifier of the recipe. Required

only for support of derived object form recipes.

RO 20

“VerificationID” Identification code set by the verifier of the recipe.

May be used to determine out-of-date formats that

need to be re-verified.

RO 20 Maximum length is 40 characters.

“UD_” Non-standard attribute defined by supplier or user.

Asterisk indicates the part of the attribute name that

is provided in this definition. Shall be preserved

exactly except by the entity that defined it.

RO 10, 11, 20,

3(), 4(), 5()

Text form is limited to a maximum

of 80 characters.

Table 17 Process Job Attributes

Attribute Name Description Access Format Related

Data Item

Value

“ObjType” Name of the Object Type RO 20 - “PROCESSJOB”

“ObjID” Identifier of a Process Job RO 20 PRJOBID -

“PRMt1Type” Type of material being processed RO 20 - allowed values:

“css”

“wfr”

“PRMt1NameList” Process Material Name, identifies material

being processed by a job, which could be

more than one item.

RO 20 - (list of) Text

SEMI E5-1104 © SEMI 1982, 2004 55

Attribute Name Description Access Format Related

Data Item

Value

“RecID” Object Specifier of Recipe used by a Process

Job, see SEMI E39 and SEMI E42

RO 20 - -

“PRRecipeMethod” Indicates any special handling for a Process

Job’s Recipe

RO 20 - allowed values:

“STANDARD”

“USETUNING”

“PRJobState” Indicates the current state of a Process Job.

The state of a job may be a combination of

sub-states and concurrent states.

RO 20 - Composed from the set:

“WAITINGFOR JOB”

“JOBQUEUED”

“JOB CANCELLED”

“JOBACTIVE”

“SETUP”

“WAITINGFORSTART”

“PROCESSING”

“NOTPAUSED”

“PAUSING”

“PAUSED”

“NOTSTOPPING”

“STOPPING”

“NOTABORTING”

“ABORTING”

“PROCESSCOMPLETE”

“JOBCOMPLETE”

“PRProcessStart” Processing should start automatically after Job

is defined when this Boolean is set TRUE

RO 11 - Boolean

Table 18 Recipe Executor Attribute Definition

Attribute Name Description Access Rqmt Form

“ObjType” The object type RO Y Text = “RcpExec”

“ObjID” Text RO Y Text

“DefaultNamespace” The name of an executing agent’s name-space used

for all hardware-dependent and other agent-specific

recipes.

RW Y Text

“ProdApprove” The minimum value of a recipe’s approval level

accepted during productive and standby states.

Required for SEMI E10 support only.

RW N Unsigned integer

“ProdCertify” The minimum value of a recipe’s certification level

accepted during productive and standby states.

Required for SEMI E10 support only.

RW N Unsigned integer

“RunCycleUnit” The process unit on which the calculation of the

estimated value of the recipe generic attribute

EstRunTime is based.

RO N Case-sensitive formatted text

composed of a unit of measure and

an optional numeric suffix.

Compliant with SEMI E5, Section

12.

“RecipeSelectID” A list of recipe identifiers for the currently selected

recipes.

RO Y List of formatted text.

“RecipeSelect-

Parameters”

A list of all parameter definitions in effect for the ith

recipe identifier in RecipeSelectID. The maximum

value for i is determined by the equipment supplier

as the maximum number of recipes which may be

selected at the same time. Required if variable

parameters are supported.

RO N List of structures composed of

parameter name, parameter value,

parameter restriction.

Table 19 Recipe Namespace Attribute Definition

Attribute Name Definition Access Format Value

“ObjType” The object type. RO 20 “RNS”

“ObjID” The name of the namespace. RO 20 A name of “Default” is prohibited.

“RecipeReadOnlyLevel” The level of approval at which recipes are read-

only.

RW 52

“Members” The names of agents capable of verifying and

executing the recipes in the namespace.

RW 00 List of items of format 20.

Table 20 Recipe Namespace Manager Attribute Definition

Attribute Name Definition Access Format Value

“ObjType” The object type. RO 20 “RNS_Mgr”

“ObjID” The manager’s name. RO 20

“NamespaceName” The name of the namespace managed. RO 20

Table 21 Table Attribute Definition

Attribute Name Definition Access Format Value

“ObjType” The object type. RO 20 “Table”

“ObjID” The object’s identifier. RO 20 1–80 characters.

“NumCols” Number of columns. RO 5() Non-zero.

“NumRows” Number of rows. RO 5() Non-zero.

“TableLength” Total number of bytes required to store the table elements,

exclusive of any formatting required for storage.

RO 5() Non-zero.

Table 22 Trace Object

Attribute Name Description Access Format Related Data Items Value

“ObjType” Trace Report Object type RO 20 - “TRACE”

“ObjID” Identifier of a specific Trace Report RO 20 TRID -

“Enabled” Boolean true means the specific Trace Report is

enabled.

RW * CEED -

“ReportID” List or report linked to this Trace Report RO 20 - (list of) RPTID

“SamplePeriod” Time between report samples given in floating

point seconds.

RW 4 () TRSPER -

“TotalSamples” The maximum number of samples that this Trace

Report will perform.

RW * TOTSMP -

“GroupSize” Number of trace reports to be grouped before a

report is sent.

RW * REPGSZ -

“StartEventID” Identifier of the event which starts trace

reporting.

RW 20 CEID -

“StartEvtSrcSpec” Source for the start event RW 20 EVNTSRC -

“StopEventID” Identifier of the event which stops trace

reporting.

RW 20 CEID -

“StopEvtSrcSpec” Source for the stop event RW 20 EVNTSRC -

“AutoDelete” Boolean true means this report is deleted when

reporting is complete.

RW 11 TRAUTOD -

“ReportChangeOnly” Boolean, if true, then trace reports are sent only

if at least one of the reported variables changes.

RW 11 RPTOC -