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SEMI E105-0701 © SEMI 2000, 2001 15 FO checks the logistic condition. (1) Start time of Lot-1 on EQ2 (10:00). (2) EQ2 is ready to load. (3) Lot-1 has arrived at Operation 20. If all conditions are OK, FO issues the Macro…

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SEMI E105-0701 © SEMI 2000, 2001 14
R2-2 Scenario 2 — Simulator Based Scheduler/Dispatcher, Stocker is Not Managed by Scheduling Component
R2-2.1 Lot 1 is scheduled for equipment 2. Lot is transported directly from Eqp1 to Eqp 2. Factory Operations
makes the carrier delivery decisions.
S/D provides the next Lot
information for EQ2.
S/D sends dispatch list.
Lot-1 / EQ2 / Start at 10:00
/ Receipe-A
STK1 STK2
Operation 10 -----------> Operation 20
EQ1 EQ2
Lot-1 processing in EQ1 is finished at 09:40.
<Scheduling Result>
10:00 11:00 12:00 13:00 14:00
EQ2 <-------------> <---------------------> <----------->
Lot-1 Lot-2 Lot-3
FO does not send the Macro Command
to MTSC. Because
(1) Lot-1 has not arrived at Operation 20
1:
4: ActivityForecast(Lot 1, Equipment 2, Start at 10:00)
5: Ready to Unload (Lot-1)
3: forecastForMaterialGroupByTime(Lot 1)
At 9:30
2: Ready to Load (EQ2)
At 09:40
6: Inquiry Estimated Transport Time
7: Estimated Transport Time (15 min)
S/D - Scheduling
Component
FO - Factory Operations
Component
MTSC - Material Transport
& Storage Component
Factory
Operations
Scheduling
Component
Material Transport
& Storage
Production
Machine (EQ2)
Production
Machine(EQ1)
MTSC keeps the historical data
of transportation time between
each source and destination of
Micro Transfer Command. The
estimated transport time is
calculated using the historical
data.
Figure R2-3
Scenario Case 2
SEMI E105-0701 © SEMI 2000, 200115
FO checks the logistic condition.
(1) Start time of Lot-1 on EQ2 (10:00).
(2) EQ2 is ready to load.
(3) Lot-1 has arrived at Operation 20.
If all conditions are OK, FO issues the Macro Command to MTSC
(1) Source : Port-1 of EQ1
(2) Destination : Port-1 of EQ2
(3) Carrier-1
10: P1 Start
11: P1 Complete
At 09:45
FO checks the condition to issue
Macro Command to MTSC.
(1) Lot-1 start time is 10:00
(2) It is 9:40 (Before 09:45)
(3) Next EQ2 is ready to load.
(4) Lot-1 has arrived at Operation 20.
FO decides to keep Lot-1 on Port-1
of EQ1 until 09:45.
8: Macro Command (Carrier 1)
9: Complete
Factory
Operations
Scheduling
Component
Material Transport
& Storage
Production
Machine (EQ2)
Production
Machine(EQ1)
Figure R2-4
Scenario Case 2 Continued
SEMI E105-0701 © SEMI 2000, 2001 16
R2-3 Scenario 3 — Dispatch List Based Scheduler/Dispatcher, Stocker is Not managed by Scheduling Component
R2-3.1 Dispatch list based. EQ1->EQ2. After lot 1 processing on EQ1 is finished, Scheduler assigns lot 1 to EQ2.
FO checks the EQ2 port status and finds the available port. FO makes the logistic decision to transfer lot 1 from
EQ1 to EQ2 directly. Scheduler does not assign lots to Stocker. In this scenario 3, the direct transfer “from EQ1 to
EQ2” is described.
Stocker 1
Production
EQ1
Stocker 2
Production
EQ2
Operation 1000 Operation 2000
lot 1 in C1
AGV 1 OHT 1
OHS 2
S/D assigns lot 1 to EQ2.
FO decides to transfer lot 1 to EQ2
Operation Description Step MES
Factory
Ops
Scheduler /
Dispatcher
MTSC
Production
Machine
EQ1
Production
Machine
EQ2
AMHS
Equipment
1
Inform State Transition (resource:EQ1, from: Down to:Available)
2
Inform (resource:EQ1LP1, to :Available)
3
Inform (resource:EQ1LP2, to :Available)
Dispatch Decision for EQ1
4
whatNextForResourceByCount (resource:EQ1)
5
Reply Production Activity (resource:EQ1, material:lot 1)
Port Reservation for EQ1LP1
6
Get Port Reservation (machine:EQ1, port:EQ1LP1, carrier:C1)
7
Production Job Setup (get Lot Info, verify job properties)
8
Reply Port Reservation (port:EQ1LP1, carrier:C1)
Request Transport Job for C1
from Stocker to EQ1
9
Request Transport Job (carrier:C1 dest:EQ1LP1, deadline: , priority)
10
Reply Transport Job (TJ1)
Request Production Job for
C1
11
Request Production Job (Lot:lot 1, machine:EQ1)
12
Reply Production Job (ProdJ1)
Determine EQ1 Lot to be
Processed after L1
13
whatNextForResourceByCount (resource:EQ1)
14
Reply Production Activity (resource:EQ1, material:L2)
Move C1 via AMHS
15
MTSC controls movement of TJ1 via AMHS
16
TransportJob State Change (job:TJ1, from:Queued, to:Executing)
17
<> MTSC publishes location updates as C1 moves through
AMHS
Port Reservation for EQ1LP2
18
Get Port Reservation (machine:EQ1, port:EQ1LP2, carrier:C2)
19
Production Job Setup (get Lot Info, verify job properties)
20
Reply Port Reservation (port:EQ1LP2, carrier:C2)
Request Transport Job for C2
from Stocker to EQ1LP2
21
Request Transport Job (carrier:C2 dest:EQ1LP2)
22
Reply Transport Job (TJ2)
Request Production Job for
C1
23
Request Production Job (Lot:L2, machine:EQ1)
24
Reply Production Job (ProdJ2)
25
TransportJob State Change (job:TJ2, from:Queued, to:Executing)
26
TransportJob State Change (job:TJ1, from:Executing, to:Completed)