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SEMI F59-0302 © SEMI 2000, 2002 7 Minimum ( 2.5x)A, Rec omm ended ( 5x)A A Size of P ipe “A” No t Exceeding “A” Not Less t han Les s t ha n 5 0 mm (2 i n. ) 6 mm (1/4 in.) 3 mm (1/8 in.) 50 mm to 75 mm (2–3 in.) 9 mm (3/…

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SEMI F59-0302 © SEMI 2000, 2002 6
Device Under
Test
∆
P
A
BCD
A — At least 16 nominal pipe diameters of straight pipe.
B — 2 Nominal pipe diameters of straight pipe.
C — 6 Nominal pipe diameters of straight pipe.
D — At least 1 nominal pipe diameters of straight pipe
.
NOTE 1: Dimension “A” may be reduced to 8 nominal diameters if straightening vanes are used. Design of straightening vnes
can be found in ASME Performance Test Code PTC 19.5-1972, “Applications – Part 2 of “Fluid Meters, Interim Supplement on
Instruments and Apparatus.”
NOTE 2: If an upstream flow disturbance consists of two elbows in series and they are in different planes, dimension “A” must
exceed 16 nominal pipe diameters unless straightening vanes are used.
Figure 2
Piping Requirements – Standard Test Section
SEMI F59-0302 © SEMI 2000, 2002 7
Minimum (2.5x)A,
Recommended (5x)A
A
Size of Pipe “A” Not Exceeding “A” Not Less than
Less than 50 mm (2 in.) 6 mm (1/4 in.) 3 mm (1/8 in.)
50 mm to 75 mm (2–3 in.) 9 mm (3/8 in.) 3 mm (1/8 in.)
100 mm to 200 mm (4–8 in.) 13 mm (1/2 in.) 3 mm (1/8 in.)
250 mm and greater ( 10 in. and greater) 19 mm (3/4 in.) 3 mm (1/8 in.)
NOTE 1: Edge of hole must be clean and sharp or slightly rounded, free from burrs, wire edges or other irregularities. In no case
shall fitting protrude inside pipe.
NOTE 2: Any suitable method of making the physical connection is acceptable if above recommendations are adhered to.
See ASME Performance Test Code PTC 19.5-1972, “Applications. Part II of Fluid Meters, Interim Supplement on
Instruments and Apparatus.
Figure 3
Recommended Pressure Connection
SEMI F59-0302 © SEMI 2000, 2002 8
Table 1 DUT Flow Pressure Drop for Integral Filtration Unit or Gas System
DUT Unit Identification
Test Number _____________________
Date _____________________
Operator Name _____________________
Barometric Pressure _____________________
Test Gas _____________________
Integral Filtration Unit or Gas System
Ambient
Temperature
(
o
C)
Inlet Pressure
(psig, gauge)
∆
P(Unit) Differential
Pressure, unit
(psid, differential)
Flow Meter
Reading
(units)
Normal
Flow
Rate(m
3
/hr)