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SEMI F64-0701 © SEMI 2001 13 A P PENDIX 1 NOT E: T he mate rial in this a ppendix is an offic ial part of SEMI F64 and w as approved by full letter ba llot procedur es on April 30, 2001 by the Facilities Re gional Standa…

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SEMI F64-0701 © SEMI 2001 12
Time
0
Flo
w
10X MFC Indicated Flow
DUT Indicated Flow
DUT Actual Flow
Figure 11 Plots
Test Method D
Table 1 Data Presentation for Method B (see Appendix 1)
PC
o
= __________% of FS/psi
@ 50% FS @ FS
PC
A
(% of reading/psi)
SEMI F64-0701 © SEMI 200113
APPENDIX 1
NOTE: The material in this appendix is an official part of SEMI F64 and was approved by full letter ballot procedures on April
30, 2001 by the Facilities Regional Standards Committee.
A1–1 Data Analysis: Method A-1
Table A1–1 Sample Data Sheet: Methods A-1 and A-2
Date: ________________ Time: __________
D.U.T. # ________________ Ambient Temp __________°C
Standard Flow Device:________________
Full Scale:________________ sccm
Ramp Rate (Method A-2) ______________kPa/sec
Time (sec) P1 (psig) Q
A
(sccm) Q
I
(sccm)
0 25.01 50.00 50.01
0.05 25.01 50.01 50.01
0.10 25.02 50.00 50.02
0.15 25.01 49.99 50.01
.
.
.
.
.
.
.
.
.
.
.
.
2.20 25.40 52.68 51.38
2.25 25.85 55.23 52.56
.
.
.
.
.
.
.
.
.
.
.
.
6.30 26.89 46.28 49.23
A1–1.1 Data Interpretation, Method A-1
A1–1.1.1
δ
Q
+
= maximum positive deviation of actual flow from nominal
δ
Q
+
= Q
max
- Q
N
where:
Q
max
= maximum value of Q
A
Q
N
= average value of Q
A
during time when P
1
= initial steady state
δ
Q
-
= maximum negative deviation of actual flow from nominal
δ
Q
-
= Q
min
- Q
N
where:
Q
min
= minimum value of Q
A
SEMI F64-0701 © SEMI 2001 14
For example (see Table A1–1), if Q
N
= 50.01 sccm, Q
max
= 55.23 sccm, and Q
min
= 46.28 sccm, then
δ
Q
+
= 55.23 sccm - 50.01 sccm = 5.22 sccm
δ
Q
-
= 46.28 sccm - 50.01 sccm = -3.73 sccm
A1–1.1.2 t
s
is settling time to Q
N
; i.e.,
t
s
= elapsed time from initiation of pressure transient (t
o
) to when Q
A
is within 0.5% of
reading of Q
N
(t
f
) = t
f
- t
o
δ
M is deviation of mass of material delivered during the disturbance relative to steady state mass delivery; i.e.,
min/sec 60
)
t
-
t
()
Q
-
Q
(
= M
iih
NA
t
t
=
t
f
oi
δ
(2)
This quantity may be thought of as the net area between the Q
A
versus time curve and the Q
N
versus time line. See
Figure A1–1 below.
Figure A1–1
Q
N
versus t (sec)
NOTE 1:
δ
M is expressed in units of sccm.
A1–2 Data Analysis: Method A-2
Refer again to Table A1–1
A1–2.1 Data Interpretation, Method A-2
Q
R
is the steady state actual flow while the inlet pressure is being ramped. It is calculated by averaging Q
A
values from time t
o
+ 50 sec to t
o
+ 110 sec.
∆Q is the steady state deviation of actual flow during the inlet pressure ramp from that while inlet pressure
is constant; i.e.,
∆Q = Q
R
- Q
N
(3)