semi合集-English.pdf - 第5669页

SEMI P10-0705 © SEMI 1990, 2005 164 END_PATTERN_GROUP_OPTIONS PG2 LEVEL_ID 1 PATTERN_NAME SC9999X-1A-26 DIGITIZED_DATA_DARK T START_CD DIMENSION CD_DATA 0.8 CD_DIGITIZED T CD_TARGET 0.8 END_CD DIMENSION END_PATTERN_DEFIN…

100%1 / 7923
SEMI P10-0705 © SEMI 1990, 2005 163
LOCATION 0,-57500
LOCATION -11000,57500
END_CELL C1 !END TOP CELL DEFINITION
!
CELL_ID C2 !MAIN ARRAY DEFINITION
END_CELL_OPTIONS C2
PATTERN_GROUP_INSTANCE PG1 !PRIMARY DIE
LOCATION -15000,-17500
STEPPING_DISTANCE 30000,35000
STEPPING_COUNT 2,2
PATTERN_GROUP_INSTANCE PG2 !SCRIBE LINE
LOCATION 0,0
END_CELL C2
!
PATTERN_GROUP_ID PG1 !PRIMARY PATTERN GROUP
PATTERN_ADDRESS_SIZE 0.05
SCALE_FACTOR 1.0
STRIPE_HEIGHT 1024
UNSCALED_PATTERN_SIZE 25000,30000
END_PATTERN_GROUP_OPTIONS PG1
LEVEL_ID 1
PATTERN_NAME VT9999X-1A-26
DIGITIZED_DATA_DARK T
END_PATTERN_DEFINITION 1
LEVEL_ID 2
PATTERN_NAME VT9999X-1A-10
DIGITIZED_DATA_DARK F
END_PATTERN_DEFINITION 2
END_PATTERN_GROUP PG1
!
PATTERN_GROUP_ID PG2 !SCRIBE PATTERN GROUP
PATTERN_ADDRESS_SIZE 0.05
SCALE_FACTOR 1.0
STRIPE_HEIGHT 1024
UNSCALED_PATTERN_SIZE 65000,75000
START_CD CD_SITES
CD_SITE_ID CD_1
CD_LOCATION -40000,0
CD_SITE_ID CD_2
CD_LOCATION 0,-40000
CD_SITE_ID CD_3
CD_LOCATION 0,40000
CD_SITE_ID CD_4
CD_LOCATION 0,0
END_CD CD_SITES
SEMI P10-0705 © SEMI 1990, 2005 164
END_PATTERN_GROUP_OPTIONS PG2
LEVEL_ID 1
PATTERN_NAME SC9999X-1A-26
DIGITIZED_DATA_DARK T
START_CD DIMENSION
CD_DATA 0.8
CD_DIGITIZED T
CD_TARGET 0.8
END_CD DIMENSION
END_PATTERN_DEFINITION 1
LEVEL_ID 2
PATTERN_NAME SC9999X-1A-10
DIGITIZED_DATA_DARK F
START_CD DIMENSION
CD_DATA 0.8
CD_DIGITIZED T
CD_TARGET 0.8
END_CD DIMENSION
END_PATTERN_DEFINITION 2
END_PATTERN_GROUP PG2 !END SCRIBE GROUP
!
PATTERN_GROUP_ID PG3 !RMS ALIGNMENT MARK
PATTERN_ADDRESS_SIZE 0.5
SCALE_FACTOR 1.0
STRIPE_HEIGHT 1024
UNSCALED_PATTERN_SIZE 2000,2000
INSPECTION_AREA -3000,-3000,3000,3000
END_PATTERN_GROUP_OPTIONS PG3
LEVEL_ID A
PATTERN_NAME GCARMSB-OX-AA
DIGITIZED_DATA_DARK F
END_PATTERN_DEFINITION A
END_PATTERN_GROUP PG3 !END ALIGNMENT MARK
!
END_MASK_GROUP PSM
END_MASK_SET 9999
END_ORDER MS9999
CHECKSUM computed checksum
SEMI P10-0705 © SEMI 1990, 2005 165
RELATED INFORMATION 4
SEMI PHOTOMASK MASK RESULTS DATA FILE EXAMPLE
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the standard.
EXAMPLE: The actual mask CD data sent by the vendor to the customer for a 4-die 5 reticle with
SHIP_CD_DATA set to TRUE. (For reference, see Related Information 2, for MASK_ID = 1.)
START_MASK_RESULTS MS999
SEMI_REVISION P10-0704 !<mask_order>
CUSTOMER COMPANY NAME
VENDOR ULTIMATE MASK COMPANY
FILE_DATE_TIME 13-APR-1992, 13:00:00
MASK_SET_ID 9999 !<mask_set>
MASK_GROUP_ID 5X
MASK_ID 1
TITLE_TEXT DEVICE 9999
TITLE_TEXT DIFFUSION
START_CD_GROUP_MEASUREMENTS SPECIFICATION
CD_TARGET 10
CD_TOLERANCE 0.25
CD_RANGE 0.3
START_CD_MEASUREMENT CD_1
CD_SITE_ID CD_1
CD_LOCATION -40000,0
MEASURED_CD_SITE_ID CD_1
MEASURED_CD_LOCATION -40000.1,0.08
MEASURED_CD 9.95
END_CD_MEASUREMENT CD_1
START_CD_MEASUREMENT
CD_2
CD_SITE_ID
CD_2
CD_LOCATION 0,-40000
MEASURED_CD_SITE_ID CD_2
MEASURED_CD_LOCATION -0.07,-40000.11
MEASURED_CD 10.01
END_CD_MEASUREMENT CD_2
START_CD_MEASUREMENT CD_3
CD_SITE_ID CD_3
CD_LOCATION 0,40000
MEASURED_CD_LOCATION 0.03,39999.95
MEASURED_CD 9.98
END_CD_MEASUREMENT CD_3
START_CD_MEASUREMENT CD_4
CD_SITE_ID CD_4
CD_LOCATION 0,0