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SEMI E88-1104 E © SEMI 1999, 2004 1 SEMI E88-1104 E SPECIFICATION FOR AMHS ST ORAGE SEM (STOCKER SEM) This specification was technically approved by the Globa l Information & Control Committee and is the direct respo…

SEMI E87.1-0702 © SEMI 2000, 2002 7

7 SECS-II Attribute Definitions

7.1 Carrier Object SECS-II Attributes Definitions

7.1.1 The following are the SECS-II structure definitions for the E87 Carrier Object.

Table 5 Carrier Object Attribute Definitions

Attribute Name Attribute Data Form: SECS-II Structure

“ObjType” 1. “Carrier”

“ObjID” 1. <CARRIERID> (Conforms to the restrictions of ObjID as specified in SEMI E39.1,

Section 6.)

“Capacity” 51 (U1) Capacity

Capacity Range: 1..25

Capacity Examples: 1, 13, 25

“CarrierAccessingStatus” 51 (U1) CarrierAccessingStatus

CarrierAccessingStatus enumerated per Variable CarrierAccessingStatus

“CarrierIDStatus” 51 (U1) CarrierIDStatus

CarrierIDStatus enumerated per Variable CarrierIDStatus

“ContentMap” L, n n=Capacity

1. L,2

1. 20 (A) LotID

2. 20 (A) SubstID

…

n. L,2

1. 20 (A) LotID

2. 20 (A) SubstID

SubstID conform to the restrictions of ObjID as specified in SEMI E39.1, Section 6.

“LocationID” 20 (A) LocationID

LocationID conforms to the restrictions of ObjID as specified in SEMI E39.1, Section 6.

“SlotMap” L, n n=Capacity

1. 51 (U1) enumerated

…

n. 51 (U1) enumerated

enumerated per variable SlotMap

“SlotMapStatus” 51 (U1) SlotMapStatus

SlotMapStatus enumerated per Variable SlotMapStatus.

“SubstrateCount” 51 (U1) SubstrateCount

SubstrateCount Range: 0..25

SubstrateCount Examples: 1, 3, 21, 25

“Usage” 20 (A) Usage

Usage is equipment defined, examples: “TEST”, “DUMMY”, “PRODUCT”

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SEMI E88-1104

SPECIFICATION FOR AMHS STORAGE SEM (STOCKER SEM)

This specification was technically approved by the Global Information & Control Committee and is the direct

responsibility of the North American Information & Control Committee. Current edition approved by the

North American Regional Standards Committee on July 11, 2004. Initially available at www.semi.org

September 2004; to be published November 2004. Originally published September 1999; last published July

2004.

This standard was editorially modified in September 2004 to correct a formatting error. Changes were made

to Table 6.

1 Purpose

1.1 This standard establishes a Specific Equipment

Model (SEM) for AMHS storage equipment (Stocker

SEM). The model consists of equipment characteristics

and behaviors that are to be implemented in addition to

the SEMI E30 fundamental requirements and selected

additional capabilities. The intent of this standard is to

facilitate the integration of Stocker SEM equipment

into an automated (e.g., semiconductor fabrication and

flat panel display) factory. This document accomplishes

this by defining an operational model for Stocker SEM

equipment as viewed by a factory automation controller

(Host). This definition provides a standard host

interface and equipment operational behavior (e.g.,

control, state models, and data reports). Several topics

require additional activity that are within the scope of

this standard: queuing, parallel interface for carrier

transfer (SEMI E23), stocker controller architecture,

and scheduling and transport of the transfer unit.

2 Scope

2.1 The scope of this standard is limited to the usage

and description of AMHS storage equipment (Stockers)

as perceived by a SEMI Equipment Communications

Standard 2 (SECS-II) host that complies with the GEM

model (as specified in Section 13). It defines the view

of the equipment through the SECS communication

link. It does not define the internal operation of the

equipment. It includes a specific transfer command

state model and stocker controller state model as the

basis for all equipment of this class.

2.2 This document assumes that the GEM fundamental

requirements and selected additional capabilities (as

specified in Section 13) have been implemented on the

Stocker SEM equipment. It expands the GEM standard

requirements and capabilities in the areas of state

models (stocker controller, transfer command, carrier

and stocker crane state models), collection events,

alarm documentation, remote commands, data item

variables, and material movement.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 SEMI Standards Alignment

3.1.1 The GEM (SEMI E30) model was used as the

basis for Stocker SEM requirements definition in

alignment with existing AMHS SEM Specifications.

3.2 AMHS Storage Equipment Description

3.2.1 This standard is targeted at the different

types/configurations of 300 mm AMHS storage

equipment. The term Stocker SEM equipment refers to

all the types of AMHS storage equipment. The

equipment types may have fundamental mechanical

differences.

3.2.2 Stocker (configuration)

3.2.2.1 A Stocker is generally an AMHS automated

storage and retrieval device used to provide temporary

storage of carriers. The device is not required to

provide temporary storage of carriers (for example,

when used as a device to connect multiple IBSEM

devices or as a floor to floor lifter). Additionally, any

number of physical interfaces may exist to connect the

stocker with external devices such as: Interbay and/or

Intrabay Transport Systems, Process Equipment, other

StockerSEM devices, Operator ports, etc.

4 Referenced Standards

4.1 SEMI Standards

SEMI E4 — SEMI Equipment Communications

Standard 1 Message Transfer (SECS-I)

SEMI E5 — SEMI Equipment Communications

Standard 2 Message Content (SECS-II)

SEMI E23 — Specification for Cassette Transfer

Parallel I/O Interface

SEMI E30 — Generic Model for Communications and

Control of Manufacturing Equipment (GEM)

SEMI E88-1104

SEMI E37 — High-Speed SECS Message Services

(HSMS) Generic Services

SEMI E37.1 — High-Speed SECS Message Services

Single Selected-Session Mode (HSMS-SS)

SEMI E84 — Specification for Enhanced Carrier

Handoff Parallel I/O Interface

4.2 Other References

Harel, D., “Statecharts: A Visual Formalism for

Complex Systems,” Science of Computer Programming

8 (1987) 231-274.

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 AMHS — Automated Material Handling System

5.1.2 BP — Buffer Port

5.1.3 FOUP — Front Opening Unified Pod

5.1.4 GEM — Generic Equipment Model

5.1.5 IBSEM — InterBay/IntraBay Specific Equipment

Model

5.1.6 ITS — Interbay or Intrabay Transport System

5.1.7 LP — Loading Port

5.1.8 OP — Output Port

5.1.9 PGV — Person Guided Vehicle

5.1.10 SC — Stocker Controller

5.1.11 TCP/IP — Transmission Control

Protocol/Internet Protocol

5.1.12 TSC — Transport System Controller

5.2 Definitions

5.2.1 Automated Material Handling System — an

automated system to store and transport materials

within the factory.

5.2.2 automation — the capability of managing

material and data within the factory.

5.2.3 bidirectional load port — a load port used for

loading and unloading carriers.

5.2.4 buffer — a set of one or more locations for

holding carriers at the production equipment.

5.2.5 buffer port — special buffer port location on a

stocker output shuttle. Contains carrier presence

1 Elsevier Science, P.O. Box 945, New York, NY 10159-0945,

http://www.elsevier.nl/homepage/browse.htt

sensors so that the host can be notified when a carrier is

situated at this position.

5.2.6 carrier — a container with one or more fixed

positions for holding substrates. Examples of carriers

include FOUPs and open cassettes.

5.2.7 carrier ID — a readable and unique identifier for

the carrier.

5.2.8 FOUP—a closed carrier for holding wafers.

5.2.9 host — the factory computer system, or an

intermediate system, that represents the factory and the

user to the equipment. Refers system that controls or

supervises the Stocker Controller (SC) throughout this

document.

5.2.10 independent port — a load port on the stocker

that is dedicated to input or output. It is considered that

the carriers can only be transferred in one direction.

5.2.11 interbay transport system — a transport system

used to move work-in-process between stockers in

different parts of the factory.

5.2.12 Intrabay Transport System — a transport

system dedicated to one or more bays in the factory and

responsible for transferring carriers to and from

production equipment. ITS consists of the physical

units of the system (e.g., vehicles, nodes, docking

stations), the low-level unit controllers, and a system-

level controller. ITS excludes factory floor storage

systems (stockers), but includes any short-term storage

integral to the system, such as storage locations within

an overhead track system that are accessible only to

units of the particular ITS.

5.2.13 load port — the interface location on the

equipment where carriers are transferred.

5.2.14 loading port — user or vehicle accessible port

location on a stocker output shuttle. Contains carrier

presence sensors so that the host can be notified when a

carrier is situated at this position.

5.2.15 output port —port location on a stocker output

shuttle, typically accessible by the stocker crane.

Contains carrier presence sensors so that the host can be

notified when a carrier is situated at this position.

5.2.16 process equipment — equipment used to make

semiconductor devices. This excludes metrology and

material handling equipment.

5.2.17 production equipment — equipment used to

produce semiconductor devices, including wafer

sorting, process, and metrology equipment and

excluding material handling equipment.