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SEMI S2-0703a E © SEMI 1991, 2004 46 Optical Energy Physical Quantity Measured (units) Access Limit Testing Methods Visible Light 1 400 nm to 700 nm (e.g., heating lamps) Irradiance µ W/cm 2 (See NOTES 1, 2, and 3.) Radi…

SEMI S2-0703a

Energy

Category

Physical

Quantity

Measured

(units)

Operator-

Accessible Limit

Maintenance-

and Service-

Accessible Limit

Pacemaker

Labeling

Level

Testing Methods

Radio-

frequency

Field

100 kHz to

100 MHz

(e.g., RF used

to generate

plasma)

Induced

current and

contact

current

(mA)

18 mA through

both feet

9 mA through each

foot

9 mA contact

40 mA through

both feet

20 mA through

each foot

20 mA contact

NA Contact instrument vendor for

suitable instrument based on

frequency and emission

characteristics.

Measurement of induced and

contact currents for freq. < 100

MHz should be made when

approaching 20% of the

applicable electric field emission

limit.

Radio-

frequency

Field

3 kHz to

300 MHz

(e.g., RF used

to generate

plasma)

Electric

Field

Strength

(V/m) (See

NOTE 1.)

Frequency

dependent (see

ANSI/IEEE

C95.1).

20% of

Uncontrolled limit

in Table 2 of

C95.1

Frequency

dependent (see

ANSI/IEEE

C95.1).

20% of

Controlled limit

in Table 1 of

C95.1

NA Use a diode rectifier or

displacement sensor at each

location (use three axis probe or

make three mutually orthogonal

measurements at each location).

Measurements should be made at

20 cm from the surface.

Radio-

frequency

Field

3 kHz to

300 MHz

(e.g., RF used

to generate

plasma)

Magnetic

Field

Strength

(A/m) (See

NOTES 1

and 2.)

Frequency

dependent (see

ANSI/IEEE

C95.1).

20% of

Uncontrolled limit

in Table 2 of

C95.1

Frequency

dependent (see

ANSI/IEEE

C95.1).

20% of

Controlled limit

in Table 1 of

C95.1

NA Use a coil sensor at each location

(use three axis probe or make

three mutually orthogonal

measurements at each location)

Measurements should be made at

20 cm of the surface.

Radio-

frequency

Fields

300 MHz to

300 GHz

(e.g., RF used

to generate

plasma)

Power

Density

(mW/cm

)

(See NOTE

1.)

Frequency

dependent (see

ANSI/IEEE

C95.1).

20% of

Uncontrolled limit

in Table 2 of

C95.1

Frequency

dependent (see

ANSI/IEEE

C95.1).

20% of

Controlled limit

in Table 1 of

C95.1

NA Use a diode rectifier or

thermocouple at each location

(use three axis probe or make

three mutually orthogonal

measurements at each location).

Measurements should be made at

20 cm of the surface.

NOTE 1: It is assumed that electric and magnetic fields exist separately at frequencies below 300 MHz. It is assumed that electric and magnetic

fields exist as a combined entity (electromagnetic radiation) at higher frequencies. Two evaluations are needed at frequencies <300 MHz and only

one (usually made by measuring the electric field) at higher frequencies.

NOTE 2: 1 gauss (G) 79.55 amperes per meter (A/m). 1 tesla (T) = 10,000 G, 1 millitesla (mT) = 10 G.

Table A5-2 Optical Energy

Optical Energy Physical Quantity

Measured

(units)

Access Limit Testing Methods

Infrared

Energy

700 nm to

1 mm

(e.g., heating

lamps)

Irradiance

W/m

(See NOTES 1, 2,

and 3.)

Radiance

W/m

- sr

Wavelength dependent

20% of the applicable

exposure limits.

(See Reference 1.)

Thermocouple, thermopile, pyroelectric, photoelectric

Direct measurements locating the maximum irradiance

and orientation of the energy at the closest approach to

the view port(s) or accessible leakage point(s).

SEMI S2-0703a

Optical Energy Physical Quantity

Measured

(units)

Access Limit Testing Methods

Visible Light

400 nm to

700 nm

(e.g., heating

lamps)

Irradiance

µW/cm

(See NOTES 1, 2,

and 3.)

Radiance

W/m

- sr

Wavelength dependent

20% of the applicable

exposure limits.

(See Reference 1.)

Thermocouple, thermopile, pyroelectric, photoelectric

Direct measurement locating the maximum irradiance and

orientation of the light energy at the closest approach to

view port(s) or accessible leakage point(s).

Ultraviolet

Energy

315 nm to

400 nm

(e.g., plasma,

stepper)

Irradiance

mW/cm

(See NOTES 1

and 2.)

0.2 mW/cm

Photoelectric detectors with filters and or controlled

phosphors

Direct measurements locating the maximum irradiance

and orientation of the energy at the closest approach to

the view port(s) or accessible leakage point(s).

Ultraviolet

Light

180 nm to

315 nm

(e.g., plasma,

stepper)

Effective

Irradiance

µW/cm

(See NOTE 4.)

0.02 W/ cm

Photoelectric detectors with filters and/or controlled

phosphors (See NOTE 5.)

Direct measurements locating the maximum irradiance

and orientation of the energy at the closest approach to

the view port(s) or accessible leakage point(s).

NOTE 1: “Irradiance” is essentially the same as “power density.”

NOTE 2: Lamp manufacturer data can sometimes be used to estimate and evaluate exposures using a spreadsheet.

NOTE 3: These guidelines cover visible, IR-A, and IR-B, and are frequency dependent. Separate evaluations may be needed for thermal or

photochemical retinal hazards and infrared eye hazards.

NOTE 4: “Effective irradiance” is irradiance adjusted to account for the wavelength-dependent biological hazard. Permissible exposure time =

0.003 J/cm2 divided by the effective irradiance.

NOTE 5: Instrumentation is commercially available that accounts for the wavelength dependence of the standard and gives results in effective

irradiance.

A5-5 References

1. 1996 TLVs and BEIs Threshold Limit Values for Chemical Substances and Physical Agents Biological

Exposure Indices, ACGIH, Cincinnati, OH

2. ANSI/IEEE Standard for Safety Levels with Respect to Human Exposure to Radio Frequency Electromagnetic

Fields, 3 kHz to 300 GHz, C95.1-1991, Piscataway, New Jersey

3. Guidelines on Limits of Exposure to Broad-Band Incoherent Optical Radiation (0.38 to 3 M), Health Physics

Vol. 73, No. 3 (September), pp.539-554, 1997

4. ICNIRP 1994 “Guidelines on Limits of Exposure to Static Magnetic Fields,” Health Physics Vol 66 (1)

(January), pp. 100-106, 1994

5. Interim Guidelines on the Limits of Exposure to 50/60 Hz Electric and Magnetic Fields, IRPA/ICNIRP

Guidelines, Health Physics Vol. 58, No. 1 (January), pp. 113-122, 1990

SEMI S2-0703a

APPENDIX 6

FIRE PROTECTION: FLOWCHART FOR SELECTING MATERIALS OF

CONSTRUCTION

NOTICE: The material in this appendix is an official part of SEMI S2 and was approved by full letter ballot

procedures on December 15, 1999 by the North American Regional Standards Committee.

Construct of

materials which do

not propagate flame

Can the system

reasonably be constructed

of materials which do not

propagate flame

Start

Construct from

non-combustible

materials

Can the system

reasonably be constructed

of non-combustible

materials?

Is there a significant fire

risk, based on process

chemicals?

End

Does a qualified

party (see Section 14.2.1)

accept the risk assessment and

engineering controls?

Yes

Design engineering controls to mitigate

the fire risks based on materials of

construction and process chemicals.

This may include fire detection and

suppression systems.

Yes

Assess the fire risks based on the

materials of construction and process

chemicals.

Assess the fire risks based

on the process chemicals.

*beyond the ignition zone with or

without the continued application of

the ignition source