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SEMI E54.15-0305 © SEMI 2005 2 NOTICE: This standard does not purport to address sa fety issu es, if any, associated w ith its use. It is the responsibility of th e users of this standard to establish appropriate safety …
SEMI E54.15-0305 © SEMI 2005 1
SEMI E54.15-0305
SENSOR/ACTUATOR NETWORK COMMUNICATION SPECIFICATION
FOR SafetyBUS p
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on December 10, 2005. Initially available at www.semi.org
February 2005; to be published March 2005.
1 Purpose
1.1 This standard defines a communication specification based on the SafetyBUS p protocol to enable
communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI
specified device models (common and device specific) in a semiconductor manufacturing equipment.
1.2 Background and Motivation
1.2.1 SafetyBUS p is a device level network which provides a simple, inexpensive, fast, and deterministic means of
exchanging data among industrial devices (e.g., sensors and actuators) and higher level devices such as controllers
(e.g., programmable control systems) while at the same time providing for the communication of information at a
high priority level to support reliable operations. SafetyBUS p provides:
A solution to low-level device networking,
Access to intelligence present in low-level devices,
Networking between higher level controllers,
Master/Slave and Peer-to-Peer communication capabilities, and
Serial communication of device-critical information.
1.2.2 SafetyBUS p specifies a communication model and protocol. The Physical and Data Link Layer definitions
are defined by the Controller Area Network (CAN) technology. The CAN specification provides the Media Access
Control (MAC) methodology and physical signaling characteristics.
1.2.3 This document enables communications between intelligent devices on a SEMI compliant SAN by providing
a presentation mapping of common and specific device network visible structure and behavior to SafetyBUS p
network.
1.2.4 This Network Communication Standard specification for SafetyBUS p is not intended to be a safety guideline
for using SafetyBUS p technology. This document specifies a SAN communications standard specification based
on the Object Communication Specification (OCS) for the SafetyBUS p Protocol. This SAN is structured in
compliance with SEMI E54.1.
2 Scope
2.1 This document specifies the protocol and services that compliant intelligent devices shall support to exchange
information over the SafetyBUS p semiconductor equipment sensor/actuator network.
2.2 This document specifies the utilization of the SafetyBUS p protocol to present externally visible device
structure and behavior, specified in the Common Device Model (CDM) and appropriate Specific Device Models
(SDMs), on a SafetyBUS p network.
2.3 This document is used in conjunction with a SEMI standard SAN Common Device Model specification, one or
more SEMI standard Specific Device Model (SDM) specifications (e.g. for a mass flow device), the SafetyBUS p
Object Communications Specification Reference Guide. Together, they describe the SafetyBUS p protocol, the
externally visible data structures and behaviors of devices utilizing the SafetyBUS p networking capability in a
SEMI compliant SAN system.
SEMI E54.15-0305 © SEMI 2005 2
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This document specifies a semiconductor equipment SAN based solely on SafetyBUS p and is a companion
document to the Object Communication Specification for the SafetyBUS p Protocol; thus a complete specification
of this standard necessarily includes the SafetyBUS p protocol specifications. There are other semiconductor
equipment SAN communications options. The specifications for these options are not included.
3.2 This standard specifies enhancements that provide additional capabilities over and above those currently
required by SafetyBUS p. In order to avoid document consistency problems, information in the Object
Communication Specification for the SafetyBUS p Protocol that relate to this standard is not repeated in this
document. This document is limited to describing enhancements or limitations to the SafetyBUS p specifications
that are imposed by this standard specification.
4 Referenced Standards
4.1 SEMI Standards
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services (OSS)
SMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard For Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification For Sensor/Actuator Network Specific Device Model For Mass Flow Device
SEMI E54.10 — Specification For Sensor/Actuator Network Specific Device Model For An In-Situ Particle
Monitor Device
SEMI E54.11 — Specification For Sensor/Actuator Network Specific Device Model For An Endpoint Device
4.2 ISO Standards
1
ISO 7498 — Basic Reference Model for Open Systems Interconnection
4.3 SafetyBUS p Club International
2
Specification — Object Communication Specification (OCS) for the SafetyBUS p Protocol Version 1.1
April 09, 2004 may be accessed on the SafetyBUS p Club International web site http://www.safetybus.com/semi/
Reference Guide — Pilz Automation Technology – Guide to Programmable Safety Systems, February 2002
Volume 2, 1
st
Edition
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Terminology that is common to all of the documents in this SAN standard may also be defined in the Sensor
/Actuator Network Standard (see reference SEMI E54 ¶4.1). Terminology may be reproduced here which is defined
in other SEMI documents.
5.2 Abbreviations and Acronyms
5.2.1 CAN — Controller Area Network
5.2.2 CDM — Common Device Model
5.2.3 DM — Device Manager (object)
1 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.
Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30, Website: /www.iso.ch
2 SafetyBUS p Club International Partner Association, Robert-Bosch-Str. 30, 73760 Ostfildern, Germany ,Telephone (+49) 711 3409-118, Fax:
(+49) 711 3409-449, website: www.safetybus.com
SEMI E54.15-0305 © SEMI 2005 3
5.2.4 ISO — International Standards Organization
5.2.5 MAC — Media Access Control
5.2.6 NCS — Network Communication Standard
5.2.7 OCS — Object Communications Specification
5.2.8 OSI — Open Systems Interconnect
5.2.9 SAC — Sensor, Actuator, Controller (Object)
5.2.10 SAN — Sensor/Actuator Network
5.2.11 SDM — Specific Device Model
5.3 Device Component Definitions
5.3.1 As this standard specification defines the presentation or mapping of CDM data structure and behavior over a
network, it makes use of many of the terms in the SEMI E54.1 CDM document. Table 1 provides a mapping of
fundamental terminology of the CDM document into this document and the SafetyBUS p standard specifications.
Note that Column 2 contains an equal sign “=” if the definition is used exactly as specified in the CDM
specification.
Table 1 Mapping of Common Device Model to NCS Terminology
CDM Term NCS Equivalent SafetyBUS p Equivalent
Device = =
Device Model = =
Class = Server Class
Object =, Class, Instance =, Server Class, Instance
Instance = =
Attribute = =
Behavior = =
Service = =
State Diagram = =
Byte = =
Nibble = =
Character String = =
5.4 SafetyBUS p Specific Definitions
5.4.1 Server Class — subset of devices that offer similar functions and provide fixed defined functionality in a
uniform way.
5.4.2 master/slave — communication over a SafetyBUS p network provides exclusive control of data by a “master”
or “host” device. All network input data is reported exclusively to the host when requested by the host, and the host
has exclusive control over the states of all network output signals of all nodes acting as its “slaves”. Master/Slave
communication provides the typical request/response oriented network communications.
5.4.3 peer-to-peer — On SafetyBUS p networks, messages formatted according to the SafetyBUS p protocol are
embedded into the SafetyBUS p packet structure that is used on the CAN network. The SafetyBUS p protocol over
CAN supports the asynchronous or unsolicited bi-directional transmission of data between nodes. This type of
communication is referred to as peer-to-peer.
5.4.4 SafetyBUS p — an open protocol maintained by Pilz GmbH & Co and distributed by SafetyBUS p Club
International as a reliable and standard means of interconnection for simple field devices. The SafetyBUS p
standard wraps a communication model and protocol as well as CAN specifications for OSI reference model layers
1 and 2, to provide a complete network definition. The OSI reference model layer 7 specifies the application layer.