semi合集-English.pdf - 第2739页
SEMI E98-1102 © SEMI 2000, 2002 4 5.2.24 ma terial — (1) any material use d in, or required by, the manufa cturing process. Material is c lassified as consumable, durable, or produ ct. (2) an abstraction of the various t…
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5.2 Definitions
5.2.1 abstract object type — an object supertype that is
not instantiated directly but only through one of its
subtypes.
5.2.2 actuator — an analog or digital output device
that is used to affect changes in the physical
environment. Examples of actuators include mass flow
controllers (MFCs) and open/closed valves.
5.2.3 advanced process control (APC) — techniques
covering both feedforward and feedback control and
automated fault detection, applied both by the
equipment (in situ) and by the factory (ex situ).
5.2.4 Automated Material Handling System (AMHS) —
a factory system used to transport and store carriers.
AMHS has two major types of components: an
automated transport system and one or more storage
systems (stockers).
5.2.5 automated transport system — the component of
AMHS used to transport carriers between stockers
and/or production equipment.
5.2.6 carrier — a container with one or more fixed
positions at which material may be held.
NOTE 2: Positions within a carrier may be considered as
material locations owned by the carrier.
5.2.7 clock — a device that is used to provide real-time
date and time information.
5.2.8 container — a durable that is used to hold other
material, including other containers, for transport,
storage, or shipping. Types of containers include
carriers and boxes.
5.2.9 dry run (mechanical dry run) — a complete
equipment cycle that allows the material handling and
software capabilities of the equipment to be exercised
without requiring full facilities hookups and without
changing the physical state of the wafer. Environ-
mental control subsystem (e.g., vacuum, nitrogen
purge, particle detection) should not be affected by a
dry run, and process consumables are not used.
5.2.10 durable — a type of material used to facilitate
manufacturing but not normally consumed in the
process that is removable, reusable, and trackable.
Examples include containers, reticles, and pellicles.
5.2.11 environmental subsystem — a subsystem of
equipment with the purpose of monitoring or
maintaining one or more specific environmental
conditions or used to handle product or durables.
Environmental subsystems include vacuum systems,
particle detection systems, and nitrogen purge systems.
5.2.12 equipment — equipment (manufacturing equip-
ment) performs one or more of the following manufac-
turing functions in the factory: material process,
material transport, or material storage. Equipment is
made up of various parts: modules, subsystems and
sensors/actuators. Equipment has at least one carrier
port. Equipment communicates with the factory.
5.2.13 equipment element — a component of the
equipment that behaves as a unit, performs work, and
may or may not contain lower-level components.
5.2.14 equipment module (module) — a major
component of equipment that contains at least one
material location and performs some task on material.
Equipment modules may be aggregates of equipment
subsystems, i/o devices, and other modules.
5.2.15 fault detection — analysis of data for early
detection of process faults before yield loss becomes
significant.
5.2.16 Front-Opening Unified Pod (FOUP) — a front-
opening pod with an integrated (non-removable)
cassette.
5.2.17 implementation — the internal view of a type,
class, or instance, including any non-public properties
and behavior. The specific code and functionality that
implements an interface. (See SEMI E81.)
5.2.18 interface — the external view of an object type,
class, or object that defines its public properties and
services without regard to the internal structure and
internal behavior. (See also SEMI E81.)
5.2.19 interface inheritance — the construction of an
interface by incremental modification of other interfa-
ces (see implementation inheritance). (See SEMI E81.)
OBEM specifies interface inheritance but not
implementation inheritance.
5.2.20 I/O device — a general term for any type of
sensor or actuator or aggregation of sensor and/or
actuator.
5.2.21 linked equipment — two or more equipment that
are physically and logically connected and function as a
single installation of equipment. In this case, the
individual component equipment are modeled as high-
level modules of the linked equipment.
5.2.22 load port — The physical interface provided for
the exchange of carriers with an agent of the factory
(operator or automated material handling system).
(Reference SEMI E15.)
5.2.23 Manufacturing Execution System (MES) — the
factory system responsible for managing the manufac-
turing process, including logistics and process flow.
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5.2.24 material — (1) any material used in, or required
by, the manufacturing process. Material is classified as
consumable, durable, or product. (2) an abstraction of
the various types of things used during manufacturing,
such as wafers, carriers, and chemicals, which require
some management.
5.2.25 material location — a reference to a place
within the equipment or an equipment component that
can hold material, such as the top surface of an indexer
or substrate chuck or the end effector of a substrate
handler.
5.2.26 measured value — a value representing a
measurement, with a numerical value, measurement
units, and a valid range.
5.2.27 measurement equipment — equipment whose
intended function is to measure or inspect the product
and to report results. Measurement of the product is the
factory’s means of gaining feedback on the
manufacturing process.
5.2.28 Object-Based Equipment Model — a model of
equipment, its components, behaviors, attributes, and
services, as defined by this document.
5.2.29 object type — a declaration (specification) that
describes the common properties and behavior for a
collection of objects. Types classify objects according
to a common interface; classes classify objects
according to a common implementation. (See also
SEMI E39 and E81.)
5.2.30 object specifier — designates a logical path
pointing to a specific instance of an object through a
hierarchy of owners. See SEMI E39.
5.2.31 Personal Guided Vehicle (PGV) — a manually
guided and operated vehicle capable of placing and
removing carriers to and from a carrier port.
5.2.32 pod — as used in this document, a container
providing environmental control, such as a SMIF or
FIMS pod
1
.
5.2.33 production equipment — process equipment and
measurement equipment.
5.2.34 process durable — a specialized durable used
by process equipment and specified by the user as part
of the process, such as a reticle or burin-in board.
5.2.35 process equipment — equipment whose
intended function is to process product, adding value to
the product.
5.2.36 product — (1) from the equipment’s perspec-
tive, product is a synonym for substrate, and includes
1 The term “pod” was originally defined as a bottom-opening pod
with a SMIF interface.
non-product substrates such as test substrates and send-
ahead substrates; (2) from the factory perspective,
product is the material being processed and produced
by the factory.
5.2.37 run-to-run control — techniques for varying
settings in one run based on analysis of either incoming
product (feed-forward) or product from an earlier run.
5.2.38 sensor — a component that responds to changes
in the physical environment and provides an analog or
digital input value.
5.2.39 sensor/actuator device — a device consisting of
one or more sensors and/or actuators on the physical
tool. See SEMI E54 for a precise definition of “sensor
or actuator” and for a description of the internal
structure of an sensor/actuator network Common
Device Model definition.
5.2.40 setup — 1. (verb) the performance of one or
more steps that puts the equipment into a known state in
which it is ready to perform a specific process; 2.
(noun) the state of the equipment once it has been
setup.
5.2.41 standardized object — an object that is formally
defined and compliant to SEMI E39, Object Services
Standard (reference SEMI E42).
5.2.42 storage equipment (stocker) — equipment
whose intended function is primarily to provide storage,
either short-term or long-term, for carriers.
5.2.43 subassembly — a component of equipment that
provides some limited functionality.
5.2.44 substrate — basic unit of material on which
work is performed to create a product. Examples
include wafers, die, plates used for masks, flat panels,
circuit boards, and leadframes.
5.2.45 subsystem — a subsystem is an intelligent
aggregate that behaves as a unit. A subsystem is made
up of sensors and/or actuators and may contain
mechanical assemblies. Subsystems may be shared by
multiple modules.
5.2.46 subtype — an object type that is based on
(derived from) another type and adds some specializa-
tion or overrides some properties or services. The type
from which the subtype is derived is the supertype. For
additional detail, see SEMI E39, Object Services
Standard.
5.2.47 supertype — an object type which is used as a
basis from which specializations are derived. The
derived types are called subtypes. For additional detail,
see SEMI E39.
5.2.48 transport equipment — equipment whose
intended function is primarily to move material from
SEMI E98-1102 © SEMI 2000, 2002 5
one location in the factory to another location.
Transport equipment may also provide short-term
storage for material. (See also AMHS.)
5.2.49 virtual sensor (synthetic sensor, derived sensor)
— one or more calculated measured values that are
based on one or more sensor readings. This may
include results based on neural nets, statistical analysis,
etc. or may be based on a single sensor value.
5.2.50 work — a group of one or more substrates that
undergo processing in a factory. Something that may be
work in one kind of factory, such as reticles and
leadframes, may have a different role in other types of
factories. Work includes, but is not limited to, material
intended as product. For example, it may include
product substrates, test substrates, and filler substrates.
5.2.50.1 From the point of view of the equipment,
work is either new (processing has not started),
completed (all intended processing has been performed,
terminated, or aborted, including rejected and resorted
work, and no further processing is to be done) or
incomplete (work in progress, on hold).
6 Conventions
6.1 This section defines the conventions followed by
this document.
6.2 Object Conventions — This document conforms to
the conventions for objects established by SEMI E39,
including object diagrams, object terminology, and re-
quirements for standardized objects. Accordingly, not-
ation is based on Object Modeling Technique (OMT) as
described in Object Oriented Modeling Design
.
2
6.2.1 Formal Name of an Object — The text capitalizes
formal object name references. Similar to the way
capitalization is normally used when discussing entities.
When describing something in the general (like cities)
lower case is used, but when a specific entity is of
interest (New York City), then first letters are
capitalized.
6.2.2 Components of Complex Attributes — The names
of object attributes defined in tables are left-justified.
The individual elements of complex attributes are right-
justified in order of appearance below the complex
attribute.
2 Rumbaugh, James, et al, Object Oriented Modeling Design,
Prentice Hall, Englewood Cliffs, NJ, c1991.