semi合集-English.pdf - 第1187页

SEMI E5-1104 © SEMI 1982, 2004 129 Stream,Function Name (Mnemonic) Direction S6,F27 Trace Report Send (TRS ) M,H<-E, [reply] Description The equipment sends a complete d Trace Report to the host. Structure L,3 1. <…

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SEMI E5-1104 © SEMI 1982, 2004 128
Stream,Function Name (Mnemonic) Direction
S6,F26 Notification Report Send Acknowledge S,H<->E
Description
This message is used to acknowledge the confirmation report. It is defined for completeness and as an aid to the user in
identifying problems.
Structure
<ACKC6>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 129
Stream,Function Name (Mnemonic) Direction
S6,F27 Trace Report Send (TRS) M,H<-E,[reply]
Description
The equipment sends a completed Trace Report to the host.
Structure
L,3
1. <DATAID>
2. <TRID>
3. L,n (n cannot exceed group size specified by S2F53)
1. L,p (p is the number of reports for each trace sample)
1. L,2
1. <RPTID
1
>
2. L,m (number of items in this data report)
1. <V
1
>
.
.
m. <V
m
>
.
.
p. L,2
1. <RPTID
p
>
2. L,m
1. <V
1
>
.
.
m. <V
m
>
.
.
n. L,p (p is the number of reports for each trace sample)
1. L,2
1. <RPTID
1
>
2. L,m (number of items in this data report)
1. <V
1
>
.
.
m. <V
m
>
.
.
p. L,2
1. <RPTID
p
>
2. L,m
1. <V
1
>
.
.
m. <V
m
>
Exception
The lists of variables associated with a unique RPTID are also unique. This structure illustrates the form of the message, so in
general, V
1
for RPTID
a
and V
1
for RPTID
b
do not reference the same variable.
SEMI E5-1104 © SEMI 1982, 2004 130
Stream,Function Name (Mnemonic) Direction
S6,F28 Trace Report Send Acknowledge S,H->E
Description
The host Acknowledges receipt of the Trace Report.
Structure
<TRID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S6,F29 Trace Report Request (TRR) S,H->E
Description
Request that the data reports assigned to the trace report be sampled and returned to the host.
Structure
<TRID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S6,F30 Trace Report Data (TRD) M,H<-E
Description
Message containing the requested data reports associated with the TRID of trace data report definition.
Structure
L,3
1. <TRID>
2. L,n (n = number data reports defined for this TRID)
1. L,2
1. <RPTID
1
>
2. L,m (m = number of items in this RPTID)
1. <V
1
>
.
.
m. <V
m
>
.
.
n. L,2
1. <RPTID
n
>
2. L,m (m = number of items in this RPTID)
1. <V
1
>
.
.
m. <V
m
>
3. <ERRCODE>
Exception
If TRID is unknown, a zero-length list (n = 0) shall be sent. Item 3 (ERRCODE) shall be set to zero length when there is no
error.
10.11 Stream 7 Process Program Management — The functions in this stream are used to manage and transfer
process programs. Process programs are the equipment-specific descriptions that determine the procedure to be
conducted on the material by a single piece of equipment. Methods are provided to transfer programs as well as
establish the link between the process program and the material to be processed with that program.