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SEMI E49.7-0304 © SEMI 1995, 2004 5 NOTE 5: Practical limitations such as component size may not allow for permanent post installation marking of ever y component. 9.2 Packaging Rec ommendations 9.2.1 Applicable c ompone…
SEMI E49.7-0304 © SEMI 1995, 2004 4
8.4.1 In instances where dead volumes are
unavoidable, the dead leg should be <
3 nominal flow
path diameters.
8.4.2 Examples of components and practices which
help minimize system volume include:
• Dead-space-free branch valves
• Multi-component integrated assemblies
• Use of direct flow paths
• Trickle bypass valves
• Sampling valves
8.5 Flow Recommendations — Due to issues related to
equipment complexity and the cost of excessive liquid
consumption, general flow recommendations for
ultrapure water and liquid chemical delivery systems
are not provided. However, Related Information 1
provides a list of practices that tend to reduce microbial
proliferation in ultrapure water Systems. Because not
all liquid chemicals are subject to these effects, the user
is advised to obtain additional flow information related
to ensuring the quality of liquid chemicals from the
liquid chemical manufacturer.
8.6 Slurry System Recommendations — In addition to
the other design recommendations within this section,
the following recommendations are provided
specifically for slurry liquid delivery systems used
within CMP process equipment.
8.6.1 Areas of high shear can damage the quality of
many slurries resulting in large particle count (LPC)
growth. Sharp edges projecting into flow path, large
pressure drops, tight bends, and sudden large reductions
in tubing size can cause high shear.
8.6.2 Dead legs are of particular importance with
respect to slurries because the abrasives may settle and
agglomerate, creating LPC growth. To help minimize
this issue branch lines should be oriented such that they
project vertically above the main line to prevent the
abrasive from settling and agglomerating.
8.6.3 If point of use filtration is incorporated,
provisions to sample the slurry before and after the
filter should be provided for LPC monitoring.
8.7 Protection and Sampling Recommendations
These recommendations are intended to protect liquids
from back flow or cross contamination and to ensure
that sampling is adequate for evaluating liquid quality
throughout system.
8.7.1 Backflow/back pressure and cross contamination
protection should be included in the system.
8.7.2 The system should have provisions to accomplish
sampling. Sampling ports should be located as close as
possible to the liquid supply point, to bath/tank or
process chamber, and to the return header immediately
before exit.
8.7.3 Provisions to completely flush, drain, and sanitize
the liquid system completely (with ultrapure water or 2-
propanol/IPA for example) should be included in the
system.
8.8 Filtration Recommendations These
recommendations are intended to reduce negative
effects such as particle contamination, metallic
contamination, and micro bubbles.
8.8.1 Filters should be considered for all liquid
delivery systems. Location, selection, installation, start
up, and rinse of filters should be based on input from
customer, chemical manufacturer and equipment
manufacturer.
8.8.2 Process stream isolation should be provided for
all filters to allow for maintenance and replacement.
8.9 Labeling Recommendations — In addition to the
recommendations in Section 10.7, functional
labels/schematics should be included with assembly for
vents, drains, and other components as necessary to
ensure the proper operation of the system(s).
8.10 Maintainability Recommendations
8.10.1 Components that require operation, inspection,
or maintenance (i.e., valves, filters, pumps, gauges,
etc.) should be located where readily accessible.
8.10.2 Provide support on each side of components,
such as valves, where operation or assembly transmits
torque to the piping/tubing.
8.10.3 Design should allow for thermal expansion if
system operates at an elevated temperature.
9 Pre-Production Acceptance and Inspection
Recommendations
9.1 Identification Recommendations
9.1.1 Applicable components should meet the
traceability requirements found in SEMI F57. Where
practical, the traceability requirements of SEMI F57
should also be followed for components not covered
within SEMI F57 and assemblies, to ensure traceability
is provided from the resin source. Component and
assembly identification should provide nondestructive
post installation traceability. In addition, packaging
should have labels allowing for traceability as described
above that are clearly visible (without the need to open
the package).
SEMI E49.7-0304 © SEMI 1995, 2004 5
NOTE 5: Practical limitations such as component size may
not allow for permanent post installation marking of every
component.
9.2 Packaging Recommendations
9.2.1 Applicable components should meet the
packaging requirements found in SEMI F57. Where
practical, the packaging requirements of SEMI F57
should also be followed for other components and
assemblies to avoid contamination of wetted surfaces.
9.3 Documentation
9.3.1 The equipment supplier should be responsible for
maintaining and supplying, upon request,
documentation that proves their assemblies meet the
user' s performance requirements. Similar requirements
for maintaining component documentation are covered
in SEMI F57 and are the responsibility of the
component manufacturer.
9.4 Receiving, Inspection, and Storage
9.4.1 All incoming components and assemblies should
be segregated until they have been formally accepted
through a documented procedure.
9.4.1.1 Cartons should be checked visually for damage
(e.g., torn bags, inadequate padding causing damage).
9.4.1.2 A statistically significant sample size should
undergo minimum QA checks such as visual inspection
and critical dimension inspection. In some instances
further inspection of components to ensure compliance
with SEMI F57 may be required.
9.4.1.3 Components and assemblies should be stored in
original packaging until ready for inspection.
Inspection involving opening sealed plastic bags should
be conducted within the staging prefab cleanroom.
After inspection, heat-seal the component (and if
appropriate the assembly) into a clean and dry
polyethylene bag.
9.4.2 Any component or assembly failing initial
inspection should be immediately “red tagged” and set
aside in a “quarantine” area until the supplier of the
component is notified and disposition is determined.
9.4.3 Components and assemblies should be accepted
only after these incoming QA checks are completed.
9.4.4 Accepted component and assemblies should have
traceability to the appropriate incoming QA check.
9.4.5 Components and assemblies should be stored in
the original shipping containers when possible. Pipe
may be stored on racks with appropriate supports.
9.5 Staging
9.5.1 Prior to entry into the cleanroom components and
assemblies should have the outer bag removed and the
inner bag wiped down with cleanroom wipes using 2-
propanol/IPA or 2-propanol/IPA and ultrapure water
mix in the staging area.
10 Assembly Recommendations
10.1 General
10.1.1 Assembly should take place in
assembly/cleanroom (see Section 6.5).
10.1.2 Inner bags should be removed within the
assembly/cleanroom.
NOTE 6: In the event components must be handled outside
cleanroom areas, personnel should wear protective gloves at
all times and components returning to the cleanroom should
be clean. All ends should be capped to avoid exposure of
wetted surfaces.
10.1.3 If work must stop for an extended period,
assemblies should be purged with nitrogen and capped
immediately to isolate wetted materials from
contamination.
10.2 Pipe/Tube Cutting
10.2.1 Use dedicated clean tools for piping/tubing
system fabrication and installation. Clean tools at the
start of each shift with 2-propanol/IPA, rinse with
ultrapure water, and blow dry with nitrogen. Maintain
tools in accordance with manufacturers’
recommendations.
10.2.2 Cut piping/tubing in accordance with
manufacturers recommendations. Saws are prohibited.
10.2.3 The cut end of the pipe/tube should be finished
before use to comply with the manufacturers’
recommendations for squareness and finish. Cut
surfaces should be clean and free of loose particles and
debris.
10.3 Component and Assembly Cleaning
10.3.1 What follows are limited and general
recommendations for cleaning components or
assemblies. It is the equipment manufacturer’s
responsibility to ensure that cleaning procedures and
solutions are adequate and do not impact equipment
performance.
10.3.1.1 Every effort should be made to keep the
interior of the pipe clean during cutting and prepping.
If, however, the pipe has become contaminated and
nitrogen (Section 7.1) will not dislodge the particles it
can be cleaned by blowing an ultrapure water soaked
swab (often called a “pig”) through it using nitrogen
(see Section 7.1). The pig should be constructed of a
SEMI E49.7-0304 © SEMI 1995, 2004 6
clean, unused, cleanroom approved, cloth soaked in
ultrapure water and wrapped around a plug of a
diameter less than the ID of the pipe to be cleaned. The
length of the pig should be about 2× its diameter.
10.3.1.2 Components or assemblies that have become
contaminated should be cleaned. The procedure for
cleaning cannot be defined but frequently includes:
• Rinse in ultrapure water.
• Soak in cleaning solution if necessary and
compatible with process
• Rinse in flowing ultrapure water (see Section 7.2).
• After rinse, check cleanliness.
• If necessary, repeat the procedure until clean.
10.3.1.3 Any assemblies that have been wetted in a
cleaning process shall be dried with Nitrogen.
10.3.2 Use 2-Propanol/IPA to remove any ink
markings from the exterior of the pipe.
10.4 Welded Connections
NOTE 7: Refer to Sections 8.3 and 8.3.2 for general joining
and weld recommendations.
10.4.1 Welder Qualification
10.4.1.1 Welders should have prior experience in the
specific welding method of specific types of polymer
components. To be qualified, the welder should be able
to safely cut, prep, clean, purge, fit, and weld the sizes
for which he or she is seeking qualification and produce
consistently acceptable weld joints. It is recommended
that welders undergo weld training and certification by
a pipe manufacturer.
10.4.2 Weld Qualification
10.4.2.1 During fabrication, each welder should submit
weld samples daily to the QA manager at the beginning
of the shift. The welds should be representative of the
types of welds the welder will perform during the shift.
10.4.2.2 These welds should meet a defined criteria of
acceptability, which may include inspection for visible
discoloration, uniformity of weld area, maximum weld
misalignment, and weld bead height. These criteria
may be derived from sources such as the component
manufacturer, the process equipment manufacturer, and
the end user. General recommendations for weld
inspection are included in Section 10.4.4.
10.4.3 Welding Procedures
10.4.3.1 In general the use of weld methods that
minimize dead space and entrapment areas are the
preferred means of welding plastic pipe/tubing (i.e.,
PVDF, PFA, and Polypropylene). The weld method
should be as shown on the fabrication drawings.
NOTE 8: Users of this guideline are cautioned that suitable
welding methods, such as thermal butt welding, may be
covered by patents or other intellectual property. When
possible, use reduced bead welding method and fixturing to
reduce areas on inside diameter where bacteria may
accumulate.
10.4.3.2 Welding equipment should be maintained in
accordance with manufacturer recommendations. For
example, tools and heating elements should be kept
clean and thermostat should be calibrated regularly.
10.4.3.3 Components should be firmly and accurately
clamped in the welding equipment. Check alignment
and clamp adjustment regularly.
10.4.3.4 Logs should be kept for each weld to ensure
traceability back to the welding equipment, welder, date
of weld, and inspector.
10.4.4 Weld Inspection Criteria
NOTE 9: Refer to manufacturer recommendations for socket
weld inspection criteria.
10.4.4.1 All welds should exhibit little or no visible
discoloration.
10.4.4.2 The maximum weld misalignment should be
10% of the wall thickness of the material.
10.4.4.3 Visual inspection for voids should be
performed in accordance with manufacturers
recommendations.
10.4.4.4 The physical characteristics of the weld bead
should be in accordance with criteria which may be
derived from component manufacturer, process
equipment manufacturer, and end user
recommendations.
10.5 Mechanical Connections
NOTE 10: Joining technology that is free of dead space and
entrapment areas is recommended. See Sections 8.3 and 8.3.1
for general joining recommendations and specific mechanical
connection recommendations. In the event that these
recommendations cannot be followed, assembly
recommendations for other commonly used mechanical
connections are provided.
10.5.1 Flaring should be performed at the temperature
and with the equipment recommended by the fitting
manufacturer.
10.5.2 O-rings used in mechanical connections should
be positioned per manufacturer recommendations
before closing the fitting. Manufacturer
recommendations for torque should be applied.
10.5.3 Gaskets used in flanged connections should be
positioned per manufacturer recommendations before