semi合集-English.pdf - 第6463页

SEMI G77-0699 © SE MI 1999 4 horizontal datum plane bilateral datum plane z 4 = 33 bottom no minal tape frame seating plan e z 5 = 10 z 12 = 0 ± 0.5 (height of tape frame bottom) z 6 ≥ 5 z 3 ≤ 23 z 8 ≥ 15 z 43 = 1 + 0 − …

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SEMI G77-0699 © SEMI 19993
horizontal
datum plane
y
46 = 71
±
1
y
44
≤
53
z
49
≤
8
z
48
≥
15
facial
datum plane
z
47
= 210
(330 )
±
1
y
5
≤
200
y
1 = 193
±
0.25
z
43 = 1
z
8
≥
15
top of x,y
dimension
control area
robotic handling
flange (optional)
human handle
(optional)
+0
-1
rear cover
y
2 =193
±
0.25
top cover
z
1
≤ 183
(303 )
bottom
rail
Figure 1
Side View of Frame Cassette
horizontal
datum
plane
x
46 = 71
±
1
x
44
≤
53
z49
≤
8z48
≥
15
bilateral
datum plane
z43 = 1
z41
≥
1
z8
≥
15
z47
= 210
(330 ) ±
1
x57
≤
187
x
1
≤
203.5
x
56 = 194.75
±
0.25
x2
≤
240(at human handle)
z4 = 33
z3
≤
23
z7
≥
10
robotic handling
flange (optional)
human handle
(optional)
x
4 = 191.5
±
0.3
187
≥
x
3
≥
177
+0
-1
z9 = 215
(stacking)
13 slot cassette
stacking (optional)
Figure 2
Front View of Frame Cassette
SEMI G77-0699 © SEMI 1999 4
horizontal
datum plane
bilateral
datum plane
z
4 = 33
bottom nominal
tape frame
seating plane
z
5 = 10
z
12 = 0
±
0.5
(height of tape frame bottom)
z
6
≥
5
z
3
≤
23
z
8
≥
15
z
43 = 1
+
0
−
1
z
41
≥
1
Figure 3
Detail of Film Frame Supports
bilateral
datum plane
facial
datum
plane
y
1 = 193
±
0.25
x
1
≤
203.5
x
2
≤
240 (at human handle)
human
handle
(optional)
x
41 = 30
± 1
x
42 = 50
±
1
y47
≥
58
y
46 = 71
±
1
y
45
= 65.3
±
1
x
45
= 65.3
±
1
x
43 = 50
±
1
x
44
≤
53
x
46 = 71
±
1
x
47
≥
58
y
44
≤
53
y
41 = 30
±
1
(16x)
θ = 45
±
0.5
°
y5
≤
200
front side where tape
frames are accessed
top flange
(optional)
rear cover
Figure 4
Top View of Frame Cassette
SEMI G77-0699 © SEMI 19995
bilateral
datum plane
y
1 =193
±
0.25
x
1
≤
203.5
x
2
≤
240 (at human handle)
bottom
rail
x
56 = 194.75
±
0.25
x
57
≤
187
facial
datum
plane
x
13 = 88.5
x
14 = 118.5
y
18 = 40.2
y
19
= 61.1
r13
≥
2.5
r
13
≥
2.5
y
9 = 92.5
y
10 = 123.5
x
17 = 17.5
kinematic
coupling
pins
carrier
sensing
pads
human
handle
(optional)
front side where tape
frames are accessed
rear cover
y
5
≤
200
y
2 = 193
±
0.25
Figure 5
Bottom View of Frame Cassette